Two-step chemical mechanical polishing of sapphire substrate
| Data(s) |
01/01/2010
|
|---|---|
| Identificador | |
| Idioma(s) |
eng |
| Publicador |
Electrochemical Society |
| Relação |
http://dro.deakin.edu.au/eserv/DU:30052755/hu-twostepchemical-2010.pdf http://dx.doi.org/10.1149/1.3410116 |
| Palavras-Chave | #chemical mechanical polishing #friction #planarisation #sapphire #substrates #surface topography measurement |
| Tipo |
Journal Article |
