Virtual metrology enabled early stage prediction for enhanced control of multi-stage fabrication processes

Semiconductor fabrication involves several sequential processing steps with the result that critical production variables are often affected by a superposition of affects over multiple steps. In this paper a Virtual Metrology (VM) system for early stage measurement of such variables is presented; the VM system seeks to express the contribution to the output variability that is due to a defined observable part of the production line. The outputs of the processed system may be used for process monitoring and control purposes. A second contribution of this work is the introduction of Elastic Nets, a regularization and variable selection technique for the modelling of highly-correlated datasets, as a technique for the development of VM models. Elastic Nets and the proposed VM system are illustrated using real data from a multi-stage etch process used in the fabrication of disk drive read/write heads. © 2013 IEEE.

Analysis of Transmission Loss with Droop Control in a Multi-Terminal HVDC System

High Voltage Direct Current (HVDC) electric power transmission is a promising technology for integrating offshore wind farms and interconnecting power grids in different regions. In order to maintain the DC voltage, droop control has been widely used. Transmission line loss constitutes an import part of the total power loss in a multi-terminal HVDC scheme. In this paper, the relation between droop controller design and transmission loss has been investigated. Different MTDC layout configurations are compared to examine the effect of droop controller design on the transmission loss.

Co-operative tensegrity-based formation control algorithm for a multi-aircraft system

This paper presents a tensegrity-based co-operative control algorithm for an aircraft formation. The 6 degrees-of-freedom model of the well-known Aerosonde unmanned aerial vehicle (UAV), is integrated with the model of the tensegrity structure and a decentralised control scheme is proposed. The strategy is shown to be scalable for 2n number of UAVs and is able to maintain a firm geometry whilst allowing flexible shape transformations. Simulation results demonstrate the effectiveness and stability of the proposed tensegrity-based formation control algorithm in 3D.

Wireless networked control systems with QoS-based sampling

Closing feedback loops using an IEEE 802.11b ad hoc wireless communication network incurs many challenges sensitivity to varying channel conditions and lower physical transmission rates tend to limit the bandwidth of the communication channel. Given that the bandwidth usage and control performance are linked, a method of adapting the sampling interval based on an 'a priori', static sampling policy has been proposed and, more significantly, assuring stability in the mean square sense using discrete-time Markov jump linear system theory. Practical issues including current limitations of the 802.11 b protocol, the sampling policy and stability are highlighted. Simulation results on a cart-mounted inverted pendulum show that closed-loop stability can be improved using sample rate adaptation and that the control design criteria can be met in the presence of channel errors and severe channel contention.

Feasibility of online collaborative voltage stability control of power systems

This paper presents the results of feasibility study of a novel concept of power system on-line collaborative voltage stability control. The proposal of the on-line collaboration between power system controllers is to enhance their overall performance and efficiency to cope with the increasing operational uncertainty of modern power systems. In the paper, the framework of proposed on-line collaborative voltage stability control is firstly presented, which is based on the deployment of multi-agent systems and real-time communication for on-line collaborative control. Then two of the most important issues in implementing the proposed on-line collaborative voltage stability control are addressed: (1) Error-tolerant communication protocol for fast information exchange among multiple intelligent agents; (2) Deployment of multi-agent systems by using graph theory to implement power system post-emergency control. In the paper, the proposed on-line collaborative voltage stability control is tested in the example 10-machine 39-node New England power system. Results of feasibility study from simulation are given considering the low-probability power system cascading faults.

Dynamic control of laser-produced proton beams

The emission characteristics of intense laser driven protons are controlled using ultrastrong (of the order of 10(9) V/m) electrostatic fields varying on a few ps time scale. The field structures are achieved by exploiting the high potential of the target (reaching multi-MV during the laser interaction). Suitably shaped targets result in a reduction in the proton beam divergence, and hence an increase in proton flux while preserving the high beam quality. The peak focusing power and its temporal variation are shown to depend on the target characteristics, allowing for the collimation of the inherently highly divergent beam and the design of achromatic electrostatic lenses.

Plasma dynamics in an inductively coupled magnetic neutral loop discharge

Magnetic neutral loop discharges (NLDs) can be operated at significantly lower pressures than conventional radio-frequency (rf) inductively coupled plasmas (ICPs). These low pressure conditions are favourable for technological applications, in particular anisotropic etching. An ICP–NLD has been designed providing excellent diagnostics access for detailed investigations of fundamental mechanisms. Spatially resolved Langmuir probe measurements have been performed in the plasma production region (NL region) as well as in the remote application region downstream from the NL region. Depending on the NL gradient two different operation modes have been observed exhibiting different opportunities for control of plasma uniformity. The efficient operation at comparatively low pressures results in ionization degrees exceeding 1%. In this regime neutral dynamics has to be considered and can influence neutral gas and process uniformity. Neutral gas depletion through elevated gas temperatures and high ionization rates have been quantified. At pressures above 0.1 Pa, gas heating is the dominant depletion mechanism. At lower pressures neutral gas is predominantly depleted through high ionization rates and rapid transport of ions by ambipolar diffusion along the magnetic field lines. Non-uniform profiles of the ionization rate can, therefore, result in localized neutral gas depletion and non-uniform processing. We have also investigated the electron dynamics within the radio-frequency cycle using phase resolved optical emission spectroscopy and Thomson scattering. In these measurements electron drift phenomena along the NL torus have been identified.

The design of a navigation guidance and control system for an unmanned surface vehicle for environmental monitoring

Maintaining the ecosystem is one of the main concerns in this modern age. With the fear of ever-increasing global warming, the UK is one of the key players to participate actively in taking measures to slow down at least its phenomenal rate. As an ingredient to this process, the Springer vehicle was designed and developed for environmental monitoring and pollutant tracking. This special issue paper highlighted the Springer hardware and software architecture including various navigational sensors, a speed controller, and an environmental monitoring unit. In addition, details regarding the modelling of the vessel were outlined based mainly on experimental data. The formulation of a fault tolerant multi-sensor data fusion technique was also presented. Moreover, control strategy based on a linear quadratic Gaussian controller was developed and simulated on the Springer model.
Gaussian controller is developed and simulated on the Springer model.

Reconfigurable system-on-a-chip motion estimation architecture for multi-standard video coding

A new domain-specific, reconfigurable system-on-a-chip (SoC) architecture is proposed for video motion estimation. This has been designed to cover most of the common block-based video coding standards, including MPEG-2, MPEG-4, H.264, WMV-9 and AVS. The architecture exhibits simple control, high throughput and relatively low hardware cost when compared with existing circuits. It can also easily handle flexible search ranges without any increase in silicon area and can be configured prior to the start of the motion estimation process for a specific standard. The computational rates achieved make the circuit suitable for high-end video processing applications, such as HDTV. Silicon design studies indicate that circuits based on this approach incur only a relatively small penalty in terms of power dissipation and silicon area when compared with implementations for specific standards. Indeed, the cost/performance achieved exceeds that of existing but specific solutions and greatly exceeds that of general purpose field programmable gate array (FPGA) designs.

An integrated multi-sensor data fusion algorithm and autopilot iImplementation in an uninhabited surface craft

Unmanned surface vehicles (USVs) are able to accomplish difficult and challenging tasks both in civilian and defence sectors without endangering human lives. Their ability to work round the clock makes them well-suited for matters that demand immediate attention. These issues include but not limited to mines countermeasures, measuring the extent of an oil spill and locating the source of a chemical discharge. A number of USV programmes have emerged in the last decade for a variety of aforementioned purposes. Springer USV is one such research project highlighted in this paper. The intention herein is to report results emanating from data acquired from experiments on the Springer vessel whilst testing its advanced navigation, guidance and control (NGC) subsystems. The algorithms developed for these systems are based on soft-computing methodologies. A novel form of data fusion navigation algorithm has been developed and integrated with a modified optimal controller. Experimental results are presented and analysed for various scenarios including single and multiple waypoints tracking and fixed and time-varying reference bearings. It is demonstrated that the proposed NGC system provides promising results despite the presence of modelling uncertainty and external disturbances.

Efficient control of quantum paths via dual-gas high harmonic generation

The accurate control of the relative phase of multiple distinct sources of radiation produced by high harmonic generation is of central importance in the continued development of coherent extreme UV (XUV) and attosecond sources. Here, we present a novel approach which allows extremely accurate phase control between multiple sources of high harmonic radiation generated within the Rayleigh range of a single-femtosecond laser pulse using a dualgas, multi-jet array. Fully ionized hydrogen acts as a purely passive medium and allows highly accurate control of the relative phase between each harmonic source. Consequently, this method allows quantum path selection and rapid signal growth via the full coherent superposition of multiple HHG sources (the so-called quasi-phase-matching). Numerical simulations elucidate the complex interplay between the distinct quantum paths observed in our proof-of-principle experiments.