Virtual metrology enabled early stage prediction for enhanced control of multi-stage fabrication processes


Autoria(s): Susto, Gian Antonio; Johnston, Adrian B.; O'Hara, Paul G.; McLoone, Sean
Data(s)

01/12/2013

Resumo

<p>Semiconductor fabrication involves several sequential processing steps with the result that critical production variables are often affected by a superposition of affects over multiple steps. In this paper a Virtual Metrology (VM) system for early stage measurement of such variables is presented; the VM system seeks to express the contribution to the output variability that is due to a defined observable part of the production line. The outputs of the processed system may be used for process monitoring and control purposes. A second contribution of this work is the introduction of Elastic Nets, a regularization and variable selection technique for the modelling of highly-correlated datasets, as a technique for the development of VM models. Elastic Nets and the proposed VM system are illustrated using real data from a multi-stage etch process used in the fabrication of disk drive read/write heads. © 2013 IEEE.</p>

Identificador

http://pure.qub.ac.uk/portal/en/publications/virtual-metrology-enabled-early-stage-prediction-for-enhanced-control-of-multistage-fabrication-processes(7f620a53-9a16-46bb-8b9d-c7e49ebde9ce).html

http://dx.doi.org/10.1109/CoASE.2013.6653980

http://www.scopus.com/inward/record.url?scp=84891521136&partnerID=8YFLogxK

Idioma(s)

eng

Direitos

info:eu-repo/semantics/restrictedAccess

Fonte

Susto , G A , Johnston , A B , O'Hara , P G & McLoone , S 2013 , Virtual metrology enabled early stage prediction for enhanced control of multi-stage fabrication processes . in IEEE International Conference on Automation Science and Engineering . , 6653980 , pp. 201-206 , 2013 IEEE International Conference on Automation Science and Engineering, CASE 2013 , Madison , United States , 17-20 August . DOI: 10.1109/CoASE.2013.6653980

Palavras-Chave #Elastic Nets #LASSO #Regularization Methods #Ridge Regression #Semiconductor Manufacturing #System Identification #Virtual Metrology #/dk/atira/pure/subjectarea/asjc/2200/2207 #Control and Systems Engineering #/dk/atira/pure/subjectarea/asjc/2200/2208 #Electrical and Electronic Engineering
Tipo

contributionToPeriodical