Effect of Process Deviations on Performance of Piezoresistive Pressure Sensors

Diaphragm thickness and the corresponding piezoresistor locations change due to over or under etching in bulk micromachined piezoresistive pressure sensor which intern influences the device performance. In the present work, variation of sensitivity and nonlinearity of a micro electro mechanical system low pressure sensor is investigated. The sensor is modeled using finite element method to analyze the variation of sensitivity and nonlinearity with diaphragm thickness. To verify the simulated results, the sensors with different diaphragm thicknesses are fabricated. The models are verified by comparing the calculated results with experimental data. This study is potentially useful for the researchers as most of the times the diaphragm is either over-etched or under-etched due to inherent variation in wafer thickness and involving manual operations.

Investigations on pressure and thickness profiles in carbon fiber-reinforced polymers during vacuum assisted resin transfer molding

Systematic experiments have been carried out by monitoring the in-situ pressure and thickness profiles for three different configurations, viz., flat plate, flat plate with a central circular hole, and an L-section using vacuum assisted resin transfer molding (VARTM) process. The effect of anisotropy on resin flow has been quantified by considering uni-directional carbon fiber preforms with 0 degrees and 90 degrees orientation to the flow direction for each configuration. A quasi-isotropic 45 degrees/0 degrees/-45 degrees/90 degrees](S) layup has also been included for flat plate case. Additionally, the study has been extended to understand the effect of using high permeability medium for each configuration. Fluid pressure profiles and thickness variation profiles have been obtained using an array of pressure sensors and linear variable differential transformers for each configuration. Experimental data reveal that anisotropy (due to changing fiber orientations), configuration, and gravity significantly change fluid pressure and displacement fields obtained during VARTM.

Peristaltic pump-based low range pressure sensor calibration system

Peristaltic pumps were normally used to pump liquids in several chemical and biological applications. In the present study, a peristaltic pump was used to pressurize the chamber (positive as well negative pressures) using atmospheric air. In the present paper, we discuss the development and performance study of an automatic pressurization system to calibrate low range (millibar) pressure sensors. The system includes a peristaltic pump, calibrated pressure sensor (master sensor), pressure chamber, and the control electronics. An in-house developed peristaltic pump was used to pressurize the chamber. A closed loop control system has been developed to detect and adjust the pressure leaks in the chamber. The complete system has been integrated into a portable product. The system performance has been studied for a step response and steady state errors. The system is portable, free from oil contaminants, and consumes less power compared to existing pressure calibration systems. The veracity of the system was verified by calibrating an unknown diaphragm based pressure sensor and the results obtained were satisfactory. (C) 2015 AIP Publishing LLC.

A New Liquid Level Sensor for Process-Control Applications

Many process-control systems are air-operated. In such an environment, it would be desirable and economical to use pneumatic sensors. Bubble-back pressure sensors perform quite satisfactorily, but in case of viscous inflammable and slurry-like liquids with a tendency to froth, this level sensor is inadequate. The method suggested in this paper utilizes a pneumatic capacitor, one boundary of which is formed by the liquid level, to modulate a fluid amplifier feedback oscillator. The absence of moving parts and economy obtained makes this method attractive for process-control applications. The system has been mathematically modeled and simulated on an IBM 360/44 digital computer. Experimental values compare fairly well with the theoretical results. For the range tested, the sensor is found to have a linear frequency variation with the liquid level Extended running in the laboratory shows that the system is very reliable. This system has been found insensitive to temperature variations of up to 15ðC.

Ultrasonic wave characteristics of a monolayer graphene on silicon substrate

The present work deals with an ultrasonic type of wave propagation characteristics of monolayer graphene on silicon (Si) substrate. An atomistic model of a hybrid lattice involving a hexagonal lattice of graphene and surface atoms of diamond lattice of Si is developed to identify the carbon-silicon bond stiffness. Properties of this hybrid lattice model is then mapped into a nonlocal continuum framework. Equivalent force constant due to Si substrate is obtained by minimizing the total potential energy of the system. For this equilibrium configuration, the nonlocal governing equations are derived to analyze the ultrasonic wave dispersion based on spectral analysis. From the present analysis we show that the silicon substrate affects only the flexural wave mode. The frequency band gap of flexural mode is also significantly affected by this substrate. The results also show that, the silicon substrate adds cushioning effect to the graphene and it makes the graphene more stable. The analysis also show that the frequency bang gap relations of in-plane (longitudinal and lateral) and out-of-plane (flexural) wave modes depends not only on the y-direction wavenumber but also on nonlocal scaling parameter. In the nonlocal analysis, at higher values of the y-directional wavenumber, a decrease in the frequency band gap is observed for all the three fundamental wave modes in the graphene-silicon system. The atoms movement in the graphene due to the wave propagation are also captured for all the tree fundamental wave modes. The results presented in this work are qualitatively different from those obtained based on the local analysis and thus, are important for the development of graphene based nanodevices such as strain sensor, mass and pressure sensors, atomic dust detectors and enhancer of surface image resolution that make use of the ultrasonic wave dispersion properties of graphene. (C) 2011 Elsevier Ltd. All rights reserved.

Modeling wrap faced reinforced soil retaining walls subjected to dynamic excitation

This paper describes some of the physical and numerical model tests of reinforced soil retaining walls subjected to dynamic excitation through uni-axial shaking tests. Models of retaining walls are constructed in a perspex box with geotextile reinforcement using the wrap around technique with dry sand backfill and instrumented with displacement sensors, accelerometers and soil pressure sensors. Numerical modelling of these shaking table tests is carried using FLAC. Numerical model is validated by comparing physical model results. Responses of wrap faced walls with different number of reinforcement layers are discussed from both the physical and numerical model tests. Results showed that the displacements are decreasing with the increase in number of reinforcement layers while acceleration amplifications are not affected significantly.

Temperature effects on wave propagation in nanoplates

In this paper, the thermal effects on the ultrasonic wave propagation characteristics of a nanoplate are studied based on the nonlocal continuum theory. The nonlocal governing equations are derived for the nanoplate under thermal environment. The axial stress caused by the thermal effects is considered. The wave propagation analysis is carried out using spectral analysis. The influences of the nonlocal small scale coefficient, the room or low temperature, the high temperature and the axial half wave numbers on the wave dispersion properties of nanoplate are also discussed. Numerical results show that the small scale effects and the thermal effects are significant for larger half wavenumbers. The results are qualitatively different from those obtained based on the local plate theory and thus, are important for the development of graphene-based nanodevices such as strain sensor, mass and pressure sensors, atomic dust detectors, and enhancer of surface image resolution. (C) 2011 Elsevier Ltd. All rights reserved.

Modeling the dynamic response of wrap-faced reinforced soil retaining walls

This paper describes the development of a numerical model for simulating the shaking table tests on wrap-faced reinforced soil retaining walls. Some of the physical model tests carried out on reinforced soil retaining walls subjected to dynamic excitation through uniaxial shaking tests are briefly discussed. Models of retaining walls are constructed in a perspex box with geotextile reinforcement using the wraparound technique with dry sand backfill and instrumented with displacement sensors, accelerometers, and soil pressure sensors. Results showed that the displacements decrease with the increase in number of reinforcement layers, whereas acceleration amplifications were not affected significantly. Numerical modeling of these shaking table tests is carried out using the Fast Lagrangian Analysis of Continua program. The numerical model is validated by comparing the results with experiments on physical models. Responses of wrap-faced walls with varying numbers of reinforcement layers are compared. Sensitivity analysis performed on the numerical models showed that the friction and dilation angle of backfill material and stiffness properties of the geotextile-soil interface are the most affecting parameters for the model response.

Seismic response of reduced-scale modular block and rigid faced reinforced walls through shaking table tests

This paper focuses on understanding the seismic response of geosynthetic reinforced retaining walls through shaking table tests on models of modular block and rigid faced reinforced retaining walls. Reduced-scale models of retaining walls reinforced with geogrid layers were constructed in a laminar box mounted on a uniaxial shaking table and subjected to various levels of sinusoidal base shaking. Models were instrumented with ultrasonic displacement sensors, earth pressure sensors and accelerometers. Effects of backfill density, number of reinforcement layers and reinforcement type on the performance of rigid faced and modular block walls were studied through different series of model tests. Performances of the walls were assessed in terms of face deformations, crest settlement and acceleration amplification at different elevations and compared. Modular block walls performed better than the rigid faced walls for the same level of base shaking because of the additional support derived by stacking the blocks with an offset. Type and quantity of reinforcement has significant effect on the seismic performance of both the types of walls. Displacements are more sensitive to relative density of the backfill and decrease with increasing relative density, the effect being more pronounced in case of unreinforced walls compared to the reinforced ones. Acceleration amplifications are not affected by the wall facing and inclusion of reinforcement. (C) 2015 Elsevier Ltd. All rights reserved.

Subspace intersection method of high-resolution bearing estimation in shallow ocean using acoustic vector sensors

The subspace intersection method (SIM) provides unbiased bearing estimates of multiple acoustic sources in a range-independent shallow ocean using a one-dimensional search without prior knowledge of source ranges and depths. The original formulation of this method is based on deployment of a horizontal linear array of hydrophones which measure acoustic pressure. In this paper, we extend SIM to an array of acoustic vector sensors which measure pressure as well as all components of particle velocity. Use of vector sensors reduces the minimum number of sensors required by a factor of 4, and also eliminates the constraint that the intersensor spacing should not exceed half wavelength. The additional information provided by the vector sensors leads to performance enhancement in the form of lower estimation error and higher resolution.

Pressure sensor based tsunami detection system: A laboratory study

In this paper, we present the study and implementation of a low-cost system to detect the occurrences of tsunamis at significantly smaller laboratory scale. The implementation is easily scalable for real-time deployment. Information reported in this paper includes the experimentally recorded response from the pressure sensor giving an indication as well as an alarm at remote place for the detection of water turbulence similar to the case of tsunami. It has been found that the system developed works very well in the laboratory scale.

Detection of Tsunami Wave Generation and Propagation Using Fiber Bragg Grating Sensors

This paper describes the design and development of a Fiber Bragg Grating (FBG) sensor system for monitoring tsunami waves generated in the deep ocean. An experimental setup was designed and fabricated to simulate the generation and propagation of a tsunami wave. The characteristics and efficiency of the developed FBG sensor was evaluated with a standard commercial Digiquartz sensor. For real time monitoring of tsunami waves, FBG sensors bonded to a cantilever is used and the wavelength shifts (Delta lambda(B)) in the reflected spectra resulting from the strain/pressure imparted on the FBGs have been recorded using a high-speed Micron Optics FBG interrogation system. The parameters sensed are the signal burst during tsunami generation and pressure variations at different places as the tsunami wave propagates away from the source of generation. The results obtained were compared with the standard commercial sensor used in tsunami detection. The observations suggest that the FBG sensor was highly sensitive and free from many of the constraints associated with the commercial tsunameter.

Fiber Bragg Grating Sensors for Real Time Monitoring of Evacuation Process

Fiber bragg grating (FBG) sensors have been widely used for number of sensing applications like temperature, pressure, acousto-ultrasonic, static and dynamic strain, refractive index change measurements and so on. Present work demonstrates the use of FBG sensors in in-situ measurement of vacuum process with simultaneous leak detection capability. Experiments were conducted in a bell jar vacuum chamber facilitated with conventional Pirani gauge for vacuum measurement. Three different experiments have been conducted to validate the performance of FBG sensor in monitoring vacuum creating process and air bleeding. The preliminary results of FBG sensors in vacuum monitoring have been compared with that of commercial Pirani gauge sensor. This novel technique offers a simple alternative to conventional method for real time monitoring of evacuation process. Proposed FBG based vacuum sensor has potential applications in vacuum systems involving hazardous environment such as chemical and gas plants, automobile industries, aeronautical establishments and leak monitoring in process industries, where the electrical or MEMS based sensors are prone to explosion and corrosion.

Multi-point sensing system for plantar pressure measurement

In this paper, the development of a novel multipoint pressure sensor system suitable for the measurement of human foot pressure distribution has been presented. It essentially consists of a matrix of cantilever sensing elements supported by beams. Foil type strain gauges have been employed for the conversion of foot pressure in to proportional electrical response. Information on the signal conditioning circuitry used is given. Also, the results obtained on the performance of the system are included.

MEMS based pressure sensor with triple modular redundancy

In this paper, the design and development of micro electro mechanical systems (MEMS) based pressure sensor with triple modular redundancy (TMR) for space applications has been presented. In order to minimize the mass of the system and also to avoid the uncertainty in the pressure measurement of the three independent hardware, an integrated approach with TMR is adopted. Sequential steps of TMR logic followed and the test results obtained are included.