MEMS based pressure sensor with triple modular redundancy

In this paper, the design and development of micro electro mechanical systems (MEMS) based pressure sensor with triple modular redundancy (TMR) for space applications has been presented. In order to minimize the mass of the system and also to avoid the uncertainty in the pressure measurement of the three independent hardware, an integrated approach with TMR is adopted. Sequential steps of TMR logic followed and the test results obtained are included.