Impact of polarized illumination on high NA imaging in ArF immersion lithography at 45 nm node

Immersion lithography has been considered as the mainstream technology to extend the feasibility of optical lithography to further technology nodes. Using proper polarized illumination in an immersion lithographic tool is a powerful means to enhance the image quality and process capability for high numerical aperture (NA) imaging. In this paper, the impact of polarized illumination on high NA imaging in ArF immersion lithography for 45 nm dense lines and semi-dense lines is studied by PROLITH simulation. The normalized image log slope (NILS) and exposure defocus (ED) window are simulated under various polarized illumination modes, and the impact of polarized illumination on image quality and process latitude is analyzed. (C) 2007 Elsevier GmbH. All rights reserved.

QtUCP-A program for determining unit-cell parameters in electron diffraction experiments using double-tilt and rotation-tilt holders

A computer program, QtUCP, has been developed based on several well-established algorithms using GCC 4.0 and Qt (R) 4.0 (Open Source Edition) under Debian GNU/Linux 4.0r0. it can determine the unit-cell parameters from an electron diffraction tilt series obtained from both double-tilt and rotation-tilt holders. In this approach, two or more primitive cells of the reciprocal lattice are determined from experimental data, in the meantime, the measurement errors of the tilt angles are checked and minimized. Subsequently, the derived primitive cells are converted into the reduced form and then transformed into the reduced direct primitive cell. Finally all the patterns are indexed and the least-squares refinement is employed to obtain the optimized results of the lattice parameters. Finally, two examples are given to show the application of the program, one is based on the experiment, the other is from the simulation. (C) 2008 Elsevier B.V. All rights reserved.

Oil-immersion or solid-immersion power enhancement of very-small-aperture lasers

An analysis of the enhancement of light transmission through a sub-wavelength aperture by oil- or solid-immersion is presented in this letter. An output power enhancement phenomenon related to the oil-immersion or solid-immersion mechanism is realized experimentally and reported for a very small aperture laser, which is an agreement with simulation analysis. This phenomenon could be useful for future optical data storage, microscopy and lithography.

Simulation of micromegas detector by garfield program

In this paper, a batch file which describes the detailed structure and the corresponding physical process of Micro-Mesh Gaseous Structure (Micromegas) detector, the macro commands and the control structures based on the Garfield program has been developed. And using the Garfield program controlled by this batch file, the detector's gain and spatial resolution have been investigated under different conditions. These results obtained by the simulation program not only exhibit the influences of the mesh and drift voltage, the mixture gas proportion, the distance between the mesh cathode and the printed circuit board readout anode, and the Lines Per Inch of the mesh cathode on the gain and spatial resolution of the detector, but also are very important to optimize the design, shorten the experimental period, and save cost during the detector development. Additionally, they also indicate that the Garfield program is a powerful tool for the Micromegas detector design and optimization.

HIRFL-CSR PHYSICS PROGRAM

The research activities at HIRFL-CSR cover the fields of the radio-biology, material science, atomic physics, and nuclear physics. This talk will mainly concentrate on the program on nuclear physics with the existing and planned experimental setups at HIRFL-CSR.

Nuclear physics program at HIRFL

With the commissioning of HIRFL-CSR, HIRFL can provide heavy ion beams with energy covering the range of several MeV/u to 1 GeV/u. In this talk, the experiments on nuclear physics at different energies to be carried out with different experimental setups at HIRFL will be introduced.