Research on nitrogen implantation energy dependence of the properties of SIMON materials

With different implantation energies, nitrogen ions were implanted into SIMOX wafers in our work. And then the wafers were subsequently annealed to form separated by implantation of oxygen and nitrogen (SIMON) wafers. Secondary ion mass spectroscopy (SIMS) was used to observe the distribution of nitrogen and oxygen in the wafers. The result of electron paramagnetic resonance (EPR) was suggested by the dandling bonds densities in the wafers changed with N ions implantation energies. SIMON-based SIS capacitors were made. The results of the C-V test confirmed that the energy of nitrogen implantation affects the properties of the wafers, and the optimum implantation energy was determined. (c) 2005 Elsevier B.V. All rights reserved.

Research on nitrogen implantation energy dependence of the properties of SIMON materials

With different implantation energies, nitrogen ions were implanted into SIMOX wafers in our work. And then the wafers were subsequently annealed to form separated by implantation of oxygen and nitrogen (SIMON) wafers. Secondary ion mass spectroscopy (SIMS) was used to observe the distribution of nitrogen and oxygen in the wafers. The result of electron paramagnetic resonance (EPR) was suggested by the dandling bonds densities in the wafers changed with N ions implantation energies. SIMON-based SIS capacitors were made. The results of the C-V test confirmed that the energy of nitrogen implantation affects the properties of the wafers, and the optimum implantation energy was determined. (c) 2005 Elsevier B.V. All rights reserved.

具有复合埋层的新型SIMON材料的制备

采用氮氧共注入方法制备了新型的SIMON(separation by implanted oxygen and nitrogen)SOI材料.采用不同的制备方法分别制作出样品并进行了结构测试和分析,发现SIMON材料的结构和质量对注入条件和退火工艺非常敏感.并对各种氮氧复合注入技术做了分析和比较,发现氮氧分次注入可以得到更好的结构和性能.

注氮剂量对SIMON材料性能影响的研究

采用氧氮共注的方法制备了氮氧共注隔离 SOI (SIMON) 圆片,对制备的样品进行了二次离 子质谱和透射电镜分析,并对埋层结构与抗辐射性能的机理进行了分析.结果表明,注氮剂量较低 时埋层质量较好.机理分析结果表明,圆片的抗辐照性能与埋层质量之间存在很密切的关系,埋层 的绝缘性能是影响器件抗辐射效应的关键因素.

1736～1999年西安与汉中地区年冬季平均气温序列重建

基于现代气象资料所建立的西安、汉中地区冬季降雪天数与年冬季平均气温之间的相关关系,根据清代档案所记载的西安与汉中地区冬季降雪日数,恢复了西安与汉中地区1736～1910年的年冬季平均气温,重建了1736～1999年西安与汉中地区年冬季平均气温序列。序列分析表明,这两个地区年冬季平均气温变化趋势一致:18世纪和20世纪为暖期,19世纪为冷期,且20世纪的增暖趋势明显。与利用树轮重建的镇安初春(3～4月)温度序列对比分析表明:西安、汉中地区冬季平均气温与镇安初春温度的低频变化趋势基本一致,但镇安较西安与汉中有

1736年以来长江中下游梅雨变化

利用清代雨雪分寸资料,复原了1736~1911年长江中下游地区的梅雨入出日期、雨期长度,重建了1736年以来长江中下游地区梅雨雨量变化序列,分析了梅雨的变化特征;并根据梅雨期长度与东亚夏季风指数之间的关系,分析了1736年以来东亚夏季风的强弱及与之对应的雨带位置阶段性变化特征.结果表明:长江中下游地区入、出梅日期及雨期长度均存在明显的年-年代际变化,雨期长度除具有2,7~8,20~30及40a的年际与年代际周期外,还具有百年波动的信号.1736年以来,雨期长短、中国东部季风雨带位置移动与东亚夏季风强弱变化