Aberration measurement of projection optics in lithographic tools based on two-beam interference theory

The degradation of image quality caused by aberrations of projection optics in lithographic tools is a serious problem in optical lithography. We propose what we believe to be a novel technique for measuring aberrations of projection optics based on two-beam interference theory. By utilizing the partial coherent imaging theory, a novel model that accurately characterizes the relative image displacement of a fine grating pattern to a large pattern induced by aberrations is derived. Both even and odd aberrations are extracted independently from the relative image displacements of the printed patterns by two-beam interference imaging of the zeroth and positive first orders. The simulation results show that by using this technique we can measure the aberrations present in the lithographic tool with higher accuracy. (c) 2006 Optical Society of America.

Aberration measurement of projection optics in lithographic tools by use of an alternating phase-shifting mask

As a critical dimension shrinks, the degradation in image quality caused by wavefront aberrations of projection optics in lithographic tools becomes a serious problem. It is necessary to establish a technique for a fast and accurate in situ aberration measurement. We introduce what we believe to be a novel technique for characterizing the aberrations of projection optics by using an alternating phase-shifting mask. The even aberrations, such as spherical aberration and astigmatism, and the odd aberrations, such as coma, are extracted from focus shifts and image displacements of the phase-shifted pattern, respectively. The focus shifts and the image displacements are measured by a transmission image sensor. The simulation results show that, compared with the accuracy of the previous straightforward measurement technique, the accuracy of the coma measurement increases by more than 30% and the accuracy of the spherical-aberration measurement increases by approximately 20%. (c) 2006 Optical Society of America.

Measurement technique for in situ characterizing aberrations of projection optics in lithographic tools

As the feature size decreases, degradation of image quality caused by wavefront aberrations of projection optics in lithographic tools has become a serious problem in the low-k1 process. We propose a novel measurement technique for in situ characterizing aberrations of projection optics in lithographic tools. Considering the impact of the partial coherence illumination, we introduce a novel algorithm that accurately describes the pattern displacement and focus shift induced by aberrations. Employing the algorithm, the measurement condition is extended from three-beam interference to two-, three-, and hybrid-beam interferences. The experiments are performed to measure the aberrations of projection optics in an ArF scanner. (C) 2006 Optical Society of America.

Coma measurement of projection optics in lithographic tools based on relative image displacements at multiple illumination settings

In this paper, we propose a novel method for measuring the coma aberrations of lithographic projection optics based on relative image displacements at multiple illumination settings. The measurement accuracy of coma can be improved because the phase-shifting gratings are more sensitive to the aberrations than the binary gratings used in the TAMIS technique, and the impact of distortion on displacements of aerial image can be eliminated when the relative image displacements are measured. The PROLITH simulation results show that, the measurement accuracy of coma increases by more than 25% under conventional illumination, and the measurement accuracy of primary coma increases by more than 20% under annular illumination, compared with the TAMIS technique. (c) 2007 Optical Society of America.

Reciprocal chromosome painting illuminates the history of genome evolution of the domestic cat, dog and human

Domestic cats and dogs are important companion animals and model animals in biomedical research. The cat has a highly conserved karyotype, closely resembling the ancestral karyotype of mammals, while the dog has one of the most extensively rearranged mammalian karyotypes investigated so far. We have constructed the first detailed comparative chromosome map of the domestic dog and cat by reciprocal chromosome painting. Dog paints specific for the 38 autosomes and the X chromosomes delineated 68 conserved chromosomal segments in the cat, while reverse painting of cat probes onto red fox and dog chromosomes revealed 65 conserved segments. Most conserved segments on cat chromosomes also show a high degree of conservation in G-banding patterns compared with their canine counterparts. At least 47 chromosomal fissions (breaks), 25 fusions and one inversion are needed to convert the cat karyotype to that of the dog, confirming that extensive chromosome rearrangements differentiate the karyotypes of the cat and dog. Comparative analysis of the distribution patterns of conserved segments defined by dog paints on cat and human chromosomes has refined the human/cat comparative genome map and, most importantly, has revealed 15 cryptic inversions in seven large chromosomal regions of conserved synteny between humans and cats.

beta gamma-CAT, a non-lens beta gamma-crystallin and trefoil factor complex from amphibian skin secretions, caused endothelium-dependent myocardial depression in isolated rabbit hearts

Previous in vivo study demonstrated that beta gamma-CAT, a newly identified non-lens beta gamma-crystallin and trefoil factor complex from frog Bombina maxima skin secretions, possessed potent lethal toxicity on mammals resulted from hypotension and cardi

Melanoma cell growth inhibition by beta gamma-CAT, which is a novel non-lens betagamma-crystallin and trefoil factor complex from frog Bombina maxima skin

In vertebrates, non-lens beta gamma-crystallins are widely expressed in various tissues but their functions are unknown. The molecular mechanisms of trefoil factors, initiators of mucosal healing and being greatly involved in tumorigenesis, have remained

Acute toxicity of beta gamma-CAT, a naturally existing non-lens beta gamma-crystallin and trefoil factor complex from frog Bombina maxima skin secretions

In vertebrates, non-lens beta gamma-crystallins are widely expressed in various tissues, but their functions are unknown. The molecular mechanisms of trefoil factors, initiators of mucosal healing and being greatly involved in tumorigenesis, have remained

The application of in vitro sperm competition test to evaluate the impact of ZP-derived peptides on fertilization capacity of cat sperm

The present study aimed to establish a sensitive in vitro assay to assess the binding capacity of cat spermatozoa. Cat oocytes and epididymal sperm cells were isolated from gonads and cultured for in vitro fertilization. Before fertilization, the sperm ce

An algorithm of analysis tools on points distribution in high dimension space: The distance of a point and an infinite sub-space

This paper discusses the algorithm on the distance from a point and an infinite sub-space in high dimensional space With the development of Information Geometry([1]), the analysis tools of points distribution in high dimension space, as a measure of calculability, draw more attention of experts of pattern recognition. By the assistance of these tools, Geometrical properties of sets of samples in high-dimensional structures are studied, under guidance of the established properties and theorems in high-dimensional geometry.

不同pH缓冲液处理下蚕豆幼苗叶片SOD、POD和CAT活性的变化

利用不同pH值的酸碱溶液处理蚕豆或者离体蚕豆叶片,研究酸碱胁迫下蚕豆叶片保护酶活性的变化。结果表明,离体蚕豆叶片处理10 min和30 min的SOD活性相差不大,整株处理5 h的蚕豆叶片SOD活性远大于处理12 h的SOD活性;离体蚕豆叶片和整株蚕豆处理,较长时间处理下的CAT活性基本上高于短时间处理的CAT活性,短时间处理下(10 min、5 h)POD活性均显著低于对照值,较长时间处理(30 min、12h)下POD活性变化的规律性不强,且变化幅度较小。

大蹼铃蟾皮肤分泌物中βγ-CAT对血液和心血管系统作用及机制研究

非晶状体βγ-晶状体蛋白(non-lens βγ-crystallin, α-亚基)和三叶因子(trefoil factor, β-亚基) 复合物（non-lens βγ-crystallin and trefoil factor complex, 缩写为βγ-CAT）是从大蹼铃蟾皮肤中分离、纯化的一种新型蛋白, 具有促进细胞迁移、伤口愈合功能，同时还可通过核定位、调节转录因子和炎症相关蛋白诱导细胞脱落、凋亡。βγ-CAT对心血管和血液系统的作用和机制还不清楚。本研究的目的在于深入研究这些问题，为人类重大疾病的研究提供新思路。 首先，我们利用各种整体动物模型，研究了βγ-CAT对心血管系统和血液系统的影响。结果发现βγ-CAT可对白细胞、红细胞、血小板、肝细胞、肾细胞和心血管系统产生毒理作用。βγ-CAT可导致白细胞计数、红细胞计数和血小板计数减少、低血压、心律失常、心肌细胞轻度水肿、部分肺泡淤血、炎症细胞浸润肺泡壁、肝细胞水样变性、肾小管水肿、肾小球淤血和脾脏淤血、高钾血症、血糖升高、转氨酶和乳酸脱氢酶升高。我们推测βγ-CAT造成实验动物死亡的主要原因是心功能衰竭、高钾血症和白细胞毒素效应。 其次，为研究βγ-CAT对血管的效应，我们用兔胸主动脉进行了一系列的实验。结果表明，βγ-CAT可引起兔胸主动脉环剂量依赖性收缩，半数有效浓度为（EC50）10 nM; α-肾上腺素能受体阻断剂（酚妥拉明）和5-羟色胺受体阻断剂（S006）不能抑制βγ-CAT的血管收缩效应。因此，我们认为，整体实验观察到的低血压不是由于血管舒张造成的，而是由于βγ-CAT对心肌了产生了抑制效应，并且，βγ-CAT产生的血管收缩效应是通过新的途径引起的。 最后，我们把βγ-CAT导致兔死亡的原因归结为心血管系统衰竭，因为，一方面βγ-CAT抑制心肌使每搏量减少，另一方面它可收缩动脉使心脏的后负荷增加，从而导致重要器官、组织灌注不良而死亡。但导致心功能衰竭的机制还不清楚，于是，我们进行了离体心脏灌流、内皮细胞培养、细胞因子测定、免疫组化、凋亡实验，试图阐明导致动物心力衰竭的机制。首先，我们在离体心脏灌流装置上以恒压和恒流的灌流模式来研究βγ-CAT的心肌变力效应。接下来，我们用高钾去除冠脉血管内皮细胞，以评估内皮细胞在βγ-CAT对心肌的直接效应。最后，我们用βγ-CAT刺激培养的心内皮细胞和主动脉内皮细胞，之后检测细胞因子的释放；并用免疫组化的方法定位冠脉内皮和心肌细胞细胞因子的释放和对这些细胞的凋亡效应。实验一的结果表明，βγ-CAT导致心力衰竭的部分原因是由于βγ-CAT引起的冠脉血管收缩造成；实验二的结果表明，βγ-CAT引起的心力衰竭是内皮依赖的。实验三检测到心内皮、主动脉内皮和冠脉内皮释放TNF-α（TNF-α），高浓度的βγ-CAT还可诱导冠脉内皮凋亡，但不引起心肌细胞凋亡。综上所述，我们认为，冠脉内皮在βγ-CAT引起的心力衰竭中具有较大的贡献，通过冠脉内皮释放细胞因子（如TNF-α）作用于心肌细胞，从而导致收缩能力降低，引起心力衰竭。