113 resultados para nichtlineare Optik, Vierwellenmischen, Hohlfaser, licht-induzierte Drift, Antiwasserstoff


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Immersion lithography has been considered as the mainstream technology to extend the feasibility of optical lithography to further technology nodes. Using proper polarized illumination in an immersion lithographic tool is a powerful means to enhance the image quality and process capability for high numerical aperture (NA) imaging. In this paper, the impact of polarized illumination on high NA imaging in ArF immersion lithography for 45 nm dense lines and semi-dense lines is studied by PROLITH simulation. The normalized image log slope (NILS) and exposure defocus (ED) window are simulated under various polarized illumination modes, and the impact of polarized illumination on image quality and process latitude is analyzed. (C) 2007 Elsevier GmbH. All rights reserved.

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A closed-form propagation equation of Hermite-cosh-Gaussian beams passing through an unapertured thin lens is derived. Focal shifts are analyzed by means of two different methods according to the facts that the axial intensity of some focused Hermite-cosh-Gaussian beams are null and that of some others are not null but the principal maximum intensity may be located on the axis or off the axis. Optimal focusing for the beams is studied, and the condition of optimal focusing ensuring the smallest beam width is also given. (c) 2005 Elsevier GmbH. All rights reserved.

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Starting from the Huygens-Fresnel diffraction integral and the Fourier transform, the propagation expression of a chirped pulse passing through a hard-edged aperture is derived. Using the obtained expression, the intensity distributions of the pulse with different chirp in the near and far fields are analyzed in detail. Due to the modulation of the aperture, many intensity peaks emerge in the intensity distributions of the chirped pulse in the near field. However, the amplitudes of the intensity peaks decrease on increasing the chirp, which results in the smoothing effect in the intensity distributions. The beam smoothing brought by increasing the chirp is explained physically. Also, it is found that the radius of the intensity distribution of the chirped pulse decreases when the chirp increases in the far field. (c) 2005 Elsevier GmbH. All rights reserved.

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In the process of interferometric testing, the measurement result is influenced by the system structure, which reduces the measurement accuracy. To obtain an accurate test result, it is necessary to analyze the test system, and build the relationship between the measurement error and the system parameters. In this paper, the influences of the system elements which include the collimated lens and the standard surface on the interferometric testing are analyzed, the expressions of phase distribution and wavefront error on the detector are obtained, the method to remove some element errors is introduced, and the optimization structure relationships are given. (C) 2006 Elsevier GmbH. All rights reserved.

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Starting from the Huygens-Fresnel diffraction integral, the propagation equations of a broadband laser passing through a dispersive lens and a dispersive wedge are derived. Smoothing effect on the side lobes of the focused pattern is achieved as the broadband laser passes through the lens because of the spectral dispersion of the lens. By inserting a dispersive wedge behind the lens, better smoothing effect is realized because a relative position shift between focused patterns of different frequency components is generated due to the spectral dispersion of the wedge. Smoothing effect on the side lobe is obtained even with small bandwidth of the broadband laser as the wedge is used. (c) 2006 Elsevier GmbH. All rights reserved.

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This paper describes a path-following phase unwrapping algorithm and a phase unwrapping algorithm based on discrete cosine transform (DCT) which accelerates the Computation and suppresses the propagation of noise. Through analysis of fringe pattern with serious noises simulated in mathematic model, we make a contrast between path-following algorithm and DCT algorithm. The advantages and disadvantages or analytical fringe pattern are also given through comparison of two algorithms. Three-dimensional experimental results have been given to prove the validity of these algorithms. Despite DCT phase unwrapping technique robustness and speed in some cases, it cannot be unwrapping inconsistencies phase. The path-following algorithm can be used in automation analysis of fringe patterns with little influence of noise. (c) 2007 Elsevier GmbH. All rights reserved.

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We present a destructive method for detecting and measuring subsurface damage of Nd-doped phosphate glasses. An instrument based on the dimple method - a destructive method - was developed. Subsurface damage depth produced in each fabrication procedure was obtained. We extend the surface roughness-subsurface damage relation to Nd-doped phosphate glasses. The constant ratio of subsurface damage and surface roughness was obtained as well. We also analyse the relation of abrasive size and subsurface damage experimentally. From a measurement of the surface roughness or abrasive size, one can obtain an accurate estimate of the damage layer thickness that must be eliminated by polishing or subsequent grinding operations. (C) 2007 Elsevier GmbH. All rights reserved.