305 resultados para plasma sputtering


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A variational principle is applied to the problem of magnetohydrodynamics (MHD) equilibrium of a self-contained elliptical plasma ball, such as elliptical ball lightning. The principle is appropriate for an approximate solution of partial differential equations with arbitrary boundary shape. The method reduces the partial differential equation to a series of ordinary differential equations and is especially valuable for treating boundaries with nonlinear deformations. The calculations conclude that the pressure distribution and the poloidal current are more uniform in an oblate self-confined plasma ball than that of an elongated plasma ball. The ellipticity of the plasma ball is obviously restricted by its internal pressure, magnetic field, and ambient pressure. Qualitative evidence is presented for the absence of sighting of elongated ball lightning.

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A mathematical model is presented for the numerical simulation of the flow, temperature, and concentration fields in an rf plasma chemical reactor. The simulation is performed assuming chemical equilibrium. The extent of validity of this assumption is discussed. The system considered is the reaction of SiCl4 and NH3 for the production of Si3N4.

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A kinetic model has been developed for the prediction of the concentration gelds in an rf plasma reactor. A sample calculation for a SiCl4/H2 system is then performed. The model considers the mixing processes along with the kinetics of seven reactions involving the decomposition of these reactants. The results obtained are compared to those assuming chemical equilibrium. The predictions indicate that an equilibrium assumption will result in lower predicted temperature fields in the reactor. Furthermore, for the chemical system considered here, while differences exist between the concentration fields obtained by the two models, the differences are not substantial.

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Thin foil observations using transmission electron microscopy reveal that the density of dislocations within the band is extremely high and the tangled arrangement of dislocations tends to align along the length of the shear band. The grains in the band were also elongated along the shear band and clearly exhibited a crystallographic nature.

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A variational method is developed to find approximate solutions to the generalized Grad-Shafranov equations for an adiabatic compression of the plasma with toroidal rotation, via the expansion in Fourier series in poloidal angle of the flux surface coordinates. The numerical results, which are carried out by the present method and by the usual two-dimensional method for a static equilibrium state, agree well.

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A variational method is developed for adiabatic compression of plasma with both poloidal and toroidal rotation.

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The T. E. wave in cylindrical wavegulde filled with inhomogeneous plasma immersed in the external uniform longitudinal magnetic field is investigated. The analytic solution expressed in polynomial formed by cutting the confluent hypergeometric function is obtained. Furthermore the eigenfrequency of T. E. wave is obtained.

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The stationary two-dimensional (x, z) near wakes behind a flat-based projectile which moves at a constant mesothermal speed (V∞) along a z-axis in a rarefied, fully ionized, plasma is studied using the wave model previously proposed by one of the authors (VCL). One-fluid theory is used to depict the free expansion of ambient plasma into the vacuum produced behind a fast-moving projectile. This nonstationary, one-dimensional (x, t) flow which is approximated by the K-dV equation can be transformed, through substitution, t=z/V∞, into a stationary two-dimensional (x, z) near wake flow seen by an observer moving with the body velocity (V∞). The initial value problem of the K-dV equation in (x, t) variables is solved by a specially devised numerical method. Comparisons of the present numerical solution for the asymptotically small and large times with available analytical solutions are made and found in satisfactory agreements.

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The influence of non-equilibrium plasma layer pressure and thickness on the transmission of microwave is considered when the incidence of wave is at an arbitrary angle. The plasma is cold, weakly ionized, and steady-state. It is assumed that it is a layered media with a kind of distribution of electron number density and the microwave is a plane wave. The results show that the pressure of plasma affects the absorption of microwave deeply, and the thickness relatively weakly in a non-equilibrium plasma slab.

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Experimentally observed, results are presented for the DCarcplasmajets and theirarc-rootbehaviors generated atreduced gas pressure and without or with an' applied magnetic field. Pure argon, argon -hydrogen or argon-nitrogen mixture is used as the plasma-forming gas. A specially designed copper mirror is constructed and used for better observing the arc-root behavior on the anode surface of the DC non-transferred arcplasma torch. It is shown that for the cases without applied magnetic field, the laminar plasmajets are stable and approximately axisymmetrical. The arc-root attachment on the anode surface is completely diffusive when argon is used as the plasma-forming gas, while the arc-root attachment often becomes constrictive when hydrogen or nitrogen is added into the argon. When an external magnetic field is applied, the arcroot tends to rotate along the anode surface of the non-transferred arcplasma torch.