LPCVD Growth of 3C-SiC on Si Mesas and SiO2/Si Substrates for MEMS Applications

This paper presents the development of LPCVD growth of 3C-SiC thin films grown on Si mesas and thermally oxidized SiO2 masks over Si with an area of 150 × 100μm^2 and SiO2/Si substrates. The growth has been performed via chemical vapor deposition using SiH4 and C2H4 precursor gases with carrier gas of H2. 3C-SiC films on these substrates were characterized by optical microscopy, X-ray diffraction （ XRD ）, X-ray photoelectron spectroscopy （ XPS ）, scanning electron microscopy （SEM） and room temperature Hall effect measurements. It is shown that there were no voids at the interface between 3C-SiC and SiO2.

镜面起伏对1.55 μm Si基MEMS光滤波器的影响

用传输矩阵方法，在简化的光学模型基础上，分别讨论了分布式Bragg反射镜DBR（Distributed Bragg Reflector）的生长精度及镜面起伏对1.55 μm Si基MEMS（Micro-Electro-Mechanical-System）可调谐光滤波器透射谱的影响。计算表明

Fabrication of 1.3 mu m Si-based MEMS tunable optical filter

In this paper we report the fabrication of 1.3 mum Si-based MEMS tunable optical filter, by surface micromaching. Through wet etching of polyimide sacrificial layer, a tunable Fabry-Perot filter was successfully fabricated. We make the capacitance measurement of the prototype device, compare the experimental curve with the theoretical one, and explain the difference between them.

Peeling behavior of a bio-inspired nano-film on a substrate

A peeling model is proposed to analyze the peeling properties of bio-mimetic nano-films using the finite element method (FEM) and theoretical approach. The influences of the nano-film's adhesion length, thickness, elastic modulus, roughness and peeling angle on the peeling force were considered as well as the effect of the viscoelastic behavior. It has been found that the effective adhesion length, at which the peeling force attained maximum, was much smaller than the real length of nano-films; and the shear force dominated in the case of smaller peeling angles, whereas, the normal force dominated at larger peeling angles. The total peeling force decreased with an increasing peeling angle. Two limiting values of the peeling-off force can be found in the viscoelastic model, which corresponds to the smaller and larger loading rate cases. The effects of nano-film thickness and Young's modulus on peeling behaviors were also discussed. The results obtained are helpful for understanding the micro-adhesion mechanisms of biological systems, such as geckos. (C) 2010 Elsevier Ltd. All rights reserved.

高温MEMS剪应力传感器残余应力分析

采用理论分析与数值模拟相结合的方法, 研究了残余应力对静电反馈式MEMS高温剪应力传感器的结构设计的影响.研究表明:在电极宽度和间距不变的情况下, 增加电极数和减小电极长度可有效地减小由静电力引起的应力和变形;残余应力对结构应力和变形的影响远大于静电力

Evaluation of the pyrolytic and kinetic characteristics of Enteromorpha prolifera as a source of renewable bio-fuel from the Yellow Sea of China

The pyrolytic and kinetic characteristics of Enteromorpha prolifera from the Yellow Sea were evaluated at heating rates of 10, 20 and 50 degrees C min(-1), respectively. The results indicated that three stages appeared during pyrolysis; dehydration, primary devolatilization and residual decomposition. Differences in the heating rates resulted in considerable differences in the pyrolysis of E. prolifera. Specifically, the increase of heating rates resulted in shifting of the initial temperature, peak temperature and the maximum weight loss to a higher value. The average activation energy of E. prolifera was 228.1 kJ mol(-1), the pre-exponential factors ranged from 49.93 to 63.29 and the reaction orders ranged from 2.2 to 3.7. In addition, there were kinetic compensation effects between the pre-exponential factors and the activation energy. Finally, the minimum activation energy was obtained when a heating rate of 20 degrees C min(-1) was used. (C) 2009 The Institution of Chemical Engineers. Published by Elsevier B.V. All rights reserved.

A preliminary discussion on the bio-metallogenesis of Tl deposits in the low-temperature minerogenetic province of southwestern China

Starting with the research status of bio-metallogenesis of Tl deposits and their geology, this work deals with the geological background of Tl enrichment and mineralization and the mechanism of bio- metal-logenesis of Tl deposits, as exemplified by Tl deposits in the low-temperature minerogenetic province. This research on the bio-metallogenesis of Tl deposits is focused on the correlations between bio-enrichment and Tl, the enrichment of Tl in micro-paleo-animals in rocks and ores, bio-fossil casts in Tl-rich ores, the involvement of bio-sulfur in minerogenesis and the enrichment of bio-genetic organic carbon in Tl ores. Thallium deposits have experienced two ore-forming stages: syngenetic bio- en-richment and epigenetic hydrothermal reworking (or transformation). Owing to the intense epigenetic hydrothermal reworking, almost no bio-residues remain in syngenetically bio-enriched Tl ores, thereby the Tl deposits display the characteristics of hydrothermally reoworked deposits.