Coma measurement of projection optics in lithographic tools based on relative image displacements at multiple illumination settings

In this paper, we propose a novel method for measuring the coma aberrations of lithographic projection optics based on relative image displacements at multiple illumination settings. The measurement accuracy of coma can be improved because the phase-shifting gratings are more sensitive to the aberrations than the binary gratings used in the TAMIS technique, and the impact of distortion on displacements of aerial image can be eliminated when the relative image displacements are measured. The PROLITH simulation results show that, the measurement accuracy of coma increases by more than 25% under conventional illumination, and the measurement accuracy of primary coma increases by more than 20% under annular illumination, compared with the TAMIS technique. (c) 2007 Optical Society of America.

Analysis of dispersion compensation by chirped fiber grating in directly and externally modulated CATV systems

The dispersion compensation effect of the chirped fiber grating (CFG) is analyzed theoretically, and analytic expressions are derived for composite second-order (CSO) distortion in analog modulated sub-carrier multiplexed (AM-SCM) cable television (CATV) systems with externally and directly modulated transmitters. Simulations are given for the two kinds of modulations and for standard single mode fiber and non-zero dispersion shift fiber (NZDSF) systems. The results show that CFG could be used as a dispersion compensator in directly modulated systems, but its dispersion coefficient should be adjusted much more precisely than the externally modulated system. The requirements for the NZDSF system could be loosened much. It is proposed that directly modulated source may be used as a transmitter in CATV systems combined with tunable CFG dispersion compensator being adjusted precisely, which may be more cost-effective than externally modulation technology. (c) 2006 Elsevier GmbH. All rights reserved.

Finite element analysis on a circular wedge prism with 400 mm diameter

The paper comprehensively analyzes the distortions of a circular wedge prism with 400 mm diameter in a scanner by method of optical-mechanical-thermal integrating analysis. The structure and intensity of the prism assembly is verified and checked, and the surface deformations of the prism under gravity load, as well as the thermo-elastic distortions of the prism, are analyzed in detail and evaluated, which is finally contrasted with the measured values of Zygo Mark interferometer. The results show: the maximal distortion of the prism assembly is 10 nm magnitude and the maximal stress is 0.441 Mpa, which has much tolerance to the precision requirement of structure and the admissible stress of material; the influence of heat effect on the surface deformations of prism is proved to be far greater than the influence of gravity load, so some strict temperature-controlled measures are to be considered when the scanner is used. (c) 2006 Elsevier GmbH. All rights reserved.

超短光脉冲感应级联五阶非线性相移分析

由于群速度失配的影响,飞秒光脉冲在感应到FONPS（级联五阶非线性相移）的同时,将不可避免地发生脉冲畸变.通过理论分析及数值模拟,提出了使级联五阶非线性过程运行在较大相位失配条件下的解决方案,成功地消除了脉冲畸变.并且借助于该过程中倍频效率的提高,有效地补偿由于相位失配量的增大所造成的FONPS的下降,实现飞秒基频光脉冲在感应到大的FONPS的同时无脉冲畸变发生.

掺镱双包层光纤放大器高功率脉冲放大特性

从放大器速率方程出发，分析了掺镱双包层光纤放大器的放大特性。模拟计算了无信号输入时放大器上能级粒子数、泵浦功率和放大自发辐射（ASE）在放大器中的稳态分布。分析了前向和后向泵浦时，高功率高斯脉冲放大时的脉冲波形畸变、上能级粒子数的时间特性、放大器存储能量和脉冲能量演化等动态特性。讨论了掺镱双包层光纤放大器输出脉冲能量随不同输入脉冲峰值功率和泵浦功率的关系。该模型和结论对高功率脉冲放大器的设计和优化具有一定的理论指导意义。

变栅距光栅实现啁啾脉冲光谱整形

为了充分利用放大介质的增益带宽，获得脉宽更短，功率更高的输出脉冲，需要将输入到主放大链的种子脉冲进行光谱整形来补偿放大过程中的增益窄化效应。提出了利用变栅距反射光栅实现中心波长1053nm，谱宽6nm啁啾脉冲的光谱整形。运用严格的光栅衍射耦合波理论分析光栅的衍射特性，发现该方案不会引入相位畸变。分别计算和分析了刻槽深度、入射角大小、光栅周期以及入射光波长的变化对衍射效率的影响，通过选取适当的光栅参量可获得0．5％～84％的光谱调制深度。

神光Ⅱ装置中空间滤波器系统的稳定性设计与分析

考虑到空间滤波器系统在激光装置中的稳定性要求，分析了影响稳定性的各种因素。对现行装置中的SF4空间滤波器系统进行振动模态测试，初步确定系统的工作状况，并结合振动理论明确系统稳定性的设计参数。利用有限元软件ANSYS对空间滤波器系统及相关的设计进行仿真验证计算。结果表明：SF4系统的一阶固有频率达到83Hz，与实验结果相符合，满足系统稳定性的要求；在系统中引入支撑不但能有效增加系统的刚度，同时能转移系统的振型；系统基础支撑平台的选择要求平台独立，并且选择较低的高度以便于控制上层光学元件的变形；在系统中的引入

大口径八边形钕玻璃片支撑系统的光机集成分析

控制由机械装夹方式所引入的波前畸变以提高惯性约束聚变(ICF)输出光束的质量，是在大口径钕玻璃片主放大器结构设计中必须考虑的。提出了一种新的有限元变形结果与光学元件面形畸变之间的数据处理方式，并与传统方式进行了对比。基于新的数据处理接口，利用光机集成分析方法对大口径八边形钕玻璃片的支撑系统结构设计参数进行优化。优化的结果保证了由支撑系统引起的透过波前畸变小于十分之一波长，同时波前畸变与设计参数变动的相关性最小。

激光二极管端面抽运Nd∶YVO4固体激光器热致光束畸变非对称的平衡

由于a轴切割Nd∶YVO4晶体的非对称性,使得激光二极管(LD)端面抽运Nd∶YVO4固体激光器不同于Nd∶YAG激光器,输出的激光经常产生非对称结果。用有限元法分析激光二极管端面抽运a轴切割Nd∶YVO4固体激光器的晶体热效应,包括温度分布、内部应力和产生的形变。分析结果表明端面抽运a轴切割Nd∶YVO4晶体产生了椭球热透镜效应。从结构方面和抽运方面提出了热透镜非对称性的平衡方法,实验验证了方法的可行性。

高稳定激光二极管抽运Nd∶YLF再生放大器

设计并实现了一种放大纳秒激光脉冲的高稳定的激光二极管(LD)抽运Nd∶YLF再生放大器。为了获得高稳定的输出,再生放大器工作在饱和状态。此时,再生放大器输出稳定性最好,而且注入激光脉冲能量波动引起的输出激光脉冲波动被抑制。由于增益饱和效应,再生放大器输出脉冲出现时域波形失真,附加后缀脉冲能够减弱时域波形失真。放大器工作波长1053nm,工作频率1Hz。输入240pJ的3ns方波激光脉冲,输出激光脉冲能量4.2mJ,总增益大于107,不稳定度小于1%(均方根),方波扭曲1.33。为3ns方波激光脉冲引入其本身幅度0.75倍的后缀脉冲,输出激光脉冲方波扭曲由1.33降至1.17。

热容型板条激光器的感应折射率计算

高平均功率固体激光器的增益介质由于受热而容易发生畸变,如常用材料YAG,波前畸变和去偏振现象会同时发生,高热负载固体激光介质的热效应已成为制约激光器输出功率进一步提高的严重障碍。给出一种计算热容型板条激光器热感生折射率的方法。把YAG晶体的四阶压光张量从晶胞坐标系转换到实验室坐标系,采用经过坐标转换后的新的张量,可以分析在YAG激光器中任意应力分布引起的热感应双折射。进一步的计算表明,在zigzag板条激光器中,应力双折射率与板条从晶体毛胚上切割成材的角度有关。同时也对热容板条激光器的热效应和应力特性进行了二维的理论性概述。

Highly stable, diode-pumped Nd : YLF regenerative amplifier

We present the design and experimental results for a diode pumped Nd:YLF regenerative amplifier applied to amplify a nanosecond laser pulse. Numerical simulation shows that the maximum output energy and the best stability can be obtained when the regenerative amplifier operates in a saturated mode for all pulse duration and temporal profiles. Using extra post-pulse is a good method to decrease the square-pulse distortion caused by gain saturation effect. The amplifier shows output energy of 4.2mJ with a total energy gain of more than 107 and output energy stability of better than 1% rms. When extra post-pulse is added, square-pulse distortion is decreased from 1.33 to 1.17 for the amplifier that is seeded with an optical pulse of 3 ns.

Ultrafast non-linear optical properties of Ge20As25Se55 chalcogenide films

The non-resonant third-order non-linear optical properties of amorphous Ge20As25Se55 films were studied experimentally by the method of the femtosecond optical heterodyne detection of optical Kerr effect. The real and imaginary parts of complex third-order optical non-linearity could be effectively separated and their values and signs could be also determined, which were 6.6 x 10(-12) and -2.4 x 10(-12) esu, respectively. Amorphous Ge20As25Se55 films showed a very fast response in the range of 200 fs under ultrafast excitation. The ultrafast response and large third-order non-linearity are attributed to the ultrafast distortion of the electron orbitals surrounding the average positions of the nucleus of Ge, As and Se atoms. The high third-order susceptibility and a fast response time of amorphous Ge20As25Se55 films makes it a promising material for application in advanced techniques especially in optical switching. (c) 2005 Elsevier B.V. All rights reserved.

Femtosecond optical Kerr effect study of Ge(10)AS(40)S(30)Se(20) film

The results of the femtosecond optical heterodyne detection of optical Kerr effect at 805 nm with the 80 fs ultrafast pulses in amorphous Ge10As40S30Se20 film is reported in this paper. The film shows an optical non-linear response of: 200 fs under ultrafast 80 fs-pulse excitation and the values of real and imaginary parts of non-linear susceptibility chi((3)) were 9.0 X 10(-12) and -4.0 X 10(-12) esu, respectively. The large third-order non-linearity and ultrafast response are attributed to the ultrafast distortion of the electron orbits surrounding the average positions of the nucleus of Ge, As, S and Se atoms. This Ge10As40S30Se20 chalcogenide glass would be expected as a promising material for optical switching technique. (c) 2005 Elsevier Ltd. All rights reserved.