神光Ⅱ装置中空间滤波器系统的稳定性设计与分析

考虑到空间滤波器系统在激光装置中的稳定性要求，分析了影响稳定性的各种因素。对现行装置中的SF4空间滤波器系统进行振动模态测试，初步确定系统的工作状况，并结合振动理论明确系统稳定性的设计参数。利用有限元软件ANSYS对空间滤波器系统及相关的设计进行仿真验证计算。结果表明：SF4系统的一阶固有频率达到83Hz，与实验结果相符合，满足系统稳定性的要求；在系统中引入支撑不但能有效增加系统的刚度，同时能转移系统的振型；系统基础支撑平台的选择要求平台独立，并且选择较低的高度以便于控制上层光学元件的变形；在系统中的引入

abstract {Considering the stability requirement of the spatial filter system in Shenguang II facility, a modal test was carried out to analysis the spatial filter system to check its working performance. The key parameters which control the stability system are indicated according to the theory of vibration. Numerical analysis results show that the natural frequency of SF4 system is 83 Hz, and it satisfies the whole facility stability working performance. The adding carriage in system can increase the rigidity and change the modal. For the support table, the tabletop should be separated and the height should be low to more easily control the distortion of the optical elements on top of the table. As a kind of elastic connection, the bellow in the system can absorb the vibration energy to control the system displacement, and the rigidity of connection can be changed by selecting different bellow thickness. All design can be used in other structure systems in Shenguang facility.}