Fracture Properties of LPCVD Silicon Nitride and Thermally Grown Silicon Oxide Thin Films From the Load-Deflection of Long Si3N4 and SiO2/Si3N4 Diaphragms

The bulge test is successfully extended to the determination of the fracture properties of silicon nitride and oxide thin films. This is achieved by using long diaphragms made of silicon nitride single layers and oxide/nitride bilayers, and applying comprehensive mechanical model that describes the mechanical response of the diaphragms under uniform differential pressure. The model is valid for thin films with arbitrary z-dependent plane-strain modulus and prestress, where z denotes the coordinate perpendicular to the diaphragm. It takes into account the bending rigidity and stretching stiffness of the layered materials and the compliance of the supporting edges. This enables the accurate computation of the load-deflection response and stress distribution throughout the composite diaphragm as a function of the load, in particular at the critical pressure leading to the fracture of the diaphragms. The method is applied to diaphragms made of single layers of 300-nm-thick silicon nitride deposited by low-pressure chemical vapor deposition and composite diaphragms of silicon nitride grown on top of thermal silicon oxide films produced by wet thermal oxidation at 950 degrees C and 1050 degrees C with target thicknesses of 500, 750, and 1000 mn. All films characterized have an amorphous structure. Plane-strain moduli E-ps and prestress levels sigma(0) of 304.8 +/- 12.2 GPa and 1132.3 +/- 34.4 MPa, respectively, are extracted for Si3N4, whereas E-ps = 49.1 +/- 7.4 GPa and sigma(0) = -258.6 +/- 23.1 MPa are obtained for SiO2 films. The fracture data are analyzed using the standardized form of the Weibull distribution. The Si3N4 films present relatively high values of maximum stress at fracture and Weibull moduli, i.e., sigma(max) = 7.89 +/- 0.23 GPa and m = 50.0 +/- 3.6, respectively, when compared to the thermal oxides (sigma(max) = 0.89 +/- 0.07 GPa and m = 12.1 +/- 0.5 for 507-nm-thick 950 degrees C layers). A marginal decrease of sigma(max) with thickness is observed for SiO2, with no significant differences between the films grown at 950 degrees C and 1050 degrees C. Weibull moduli of oxide thin films are found to lie between 4.5 +/- 1.2 and 19.8 +/- 4.2, depending on the oxidation temperature and film thickness.

反式1，4-聚丁二烯的形态和结构研究

高分子材料一般都具有某种特定的结构，这种结构将直接决定着材料的性能。当高聚物从一种结构变为另一种结构时，其材料的性能将发生改变。近来，M.Hikosaka根据聚乙烯结晶的特点，提出了“链滑移扩散理论”，认为对聚合物热处理时，其晶体片层增厚快慢与分子链的滑移扩散能力有关。反式1,4-聚丁二烯(TPBD)在常压下能以六方相稳定存在，是少有的几种具有六方相结构的聚合物。因为其六方相分子链具有较高的构象数，而各个构象之间由于能垒相差不大，构象之间很容易发生转变；因而分子链运动时相对容易，决定了六方相分子链之间的滑移扩散能力较强。为了验证M.Hikosaka的理论，特对样品在六方相温度范围进行热处理。另外由于TPBD在不同的温度下能以两种晶型稳定存在，这两种晶型之间是怎样转变的也是我们关心的问题，而且通过电镜第一次摄得了单斜相和六方相共存的电子衍射。针对上述问题我们进行了下列研究。(1)以三氯化钒体系，稀土催化剂体系合成了两种分子量的反式1,4-聚丁二烯，用IR，NMR分析高分子量样品的反式1,4结构含量为96.2%，低分子量样品反式l,4结构含量为91.2%。对两种分子量样品进行DSC研究，结果表明低分子量样品的转变温度。熔融温度均比高分子量样品低；用Thomoson-Gibbs方程计算了该样品的片层厚度，并与样品的SAXS实验结果对照，认为这种转变温度和熔点的差异除了与1,2-结构的含量有关外，也与不同分子量具有不同的片层厚度有很大关系。(2)对不同分子量的TPBD进行WAXD实验，研究了其在不同温度下的相行为及单斜相向六方相的相转变过程。以PLM为手段跟踪观察了低分子量样品的相态转变，发现许多晶粒在相转变时从视场中消失。用电镜观察到了单斜相电子衍射，六方相电子衍射及单斜相和六方相共存的电子衍射， 并发现两相结构的形貌没有大的差别。(3)用Cerius~2软件模拟了单斜相结构和六方相结构的分子链堆砌，认为单斜相向六方相发生转变时，六方相分子链构象与单斜相分子链构象相比，有序度较低，从而使其堆砌结构变得松散。同时也模拟了单斜相和六方相在晶带轴为[001]方向的电子衍射，实验观察只能得到计算机模拟所得的单斜相和六方相内层的几个电子衍射点。(4)对低分子量样品在64 ℃热处理1小时后进行的DSC，WAXD，SAXS研究表明，样品的片层厚度显著增大，结晶度也相应提高。(5)研究了高分子量样品在85 ℃和低分子量样品在53 ℃热处理不同时间后，所得的DSC曲线。结果表明随时间增加，TPBD的转变峰温度值明显增加；而且发现在前5分钟内处理样品时，结晶度都有明显增加，处理样品5分钟以后结晶度增长缓慢。对高分子量样品四次升降温时，发现降温曲线有肩峰出现，但升温曲线没有肩峰出现，把肩峰的出现归结于有小尺寸亚稳定晶体的形成。(6)对高分子量样品的六方相等温结晶数据及对由熔体快速冷却到一定温度生成单斜相的等温结晶数据进行处理，得到平衡熔点为476K，比文献值高。并利用Thomoson-Gibbs方程，得到了单斜相和六方相的温度对尺寸倒数的相图，确定了在一定尺寸下单斜相和六方相稳定存在的温度范围。(7)用电镜观察了在70 ℃热处理不同时间后所得形貌图，并讨论了样品在六方相中热处理时，样品聚集体的聚集方式。(8)研究了两种分子量样品溶液结晶时所得的球晶形貌，发现其结晶形貌与分子量有关，而且发现摄得的电子衍射是六方相电子衍射，而不是室温下稳定存在的单斜相电子衍射，认为是由于电子辐照使样品升温而发生了晶型转变。(9)用修饰后的Avrami方程，Ozawa，方程分别处理了TPBD非等温结晶数据，由Jeziorny修饰的Avrami方程分析显示TPBD的非等温结晶明显地分为一次结晶和二次结晶两个阶段，指数值n意味着一次结晶和二次结晶的成核种类，Ozawa方程分析不能很好地适用于TPBD的六方相非等温结晶数据，主要是由于Ozawa理论的不精确假定，如二次结晶，结晶温度对片层厚度相关性及整个结晶过程中恒定的冷却函数等。并由Kissinger方程得到六方相的结晶活化能为167.9kJ/mol。

含反-1,4聚丁二烯链段的顺-1,4聚丁二烯橡胶的合成、（金+监）认和性能

顺-1,4聚丁二烯橡胶是合成橡胶中的第二大品种，具有耐磨、生热低等的优点，一贯是轮胎胎面胶的重要组成部分。但随着子午线轮胎的出现和大量使用，对母胶强度和轮胎的耐湿滑性提出了更高的要求，而利用应力下结晶有可能提高母胶强度，为此我们开展了合成含少量反-1，4聚丁二烯链烯链段的顺-1，4-聚丁二烯橡胶的研究。本文报导了它的合成、（金+监）认及生胶、母胶和硫化胶的性能。合成中我们试探了既能使丁二烯反-1，4聚合和顺-1，4聚合，又能使内双键打开的钒和钴的络合催化体系，采用以钒催化剂先使丁二烯反-1，4聚合，在达到转化率10-20%时，以钴催化剂将剩余的丁二烯进行顺-1，4聚合的步骤，再寄于同时发生催化接枝的想法来实现反-1，4-聚丁二烯链段和顺-1，4聚丁二烯链段的共聚合。实验中考查了合成的条件，对得到的产物用溶解度法、扭摆测定动态力学行为，X射线衍射分析、电镜分析以及线膨胀等手段和以等量的反-1，4聚丁二烯和顺-1，4聚丁二烯的共混胶进行了对比，证明我们得到的产物是反-1，4聚丁二烯链段和顺-1，4聚丁二烯的接枝共聚物，不是无规共聚物，也不是两种均聚物的共混胶。文中讨论了聚合反应机理。对含有不同反-1，4链段和分子量的共聚胶的生胶性能，混炼胶性能进行了初步考察，结果表明，特性粘数（[η]）_(甲苯）~（30℃）在2（分升/克）左右，含反-1，4链段9-20%的顺丁共聚胶，不含凝胶，其生胶强度和混炼胶强度较镍顺丁橡胶高一倍以上，挤出行为特好。看来这种共聚胶将为子午线轮胎所欢迎的新顺丁品种。对这种胶的硫化配方和硫化条件条件尚待进一步研究。初步结果表明，可与一般顺丁橡胶接近，而抗撕性能又比一般顺丁高。利用本工作的实验方法制备不同结构链段的共聚胶还不多见。因此，除了工作本身研制成了一种新的顺丁品种外，对利用本方法，改善其他橡胶品种，设计研制新的高分子和研究反应机理走出了一条新路。

1,2,4-三氯苯胁迫对大豆下胚轴膜脂过氧化的影响

以盆栽法研究了不同浓度1,2,4-三氯苯(TCB)胁迫对大豆下胚轴膜脂过氧化作用的影响。结果表明,100—300μg·g-1TCB胁迫初期(1—3d)促使萌发大豆下胚轴内过氧化氢(H2O2)的积累显著增加,同时伴随质膜电解质渗漏率和组织自动氧化速率升高,显示发生膜脂质过氧化作用。TCB胁迫1—6d使活性氧清除酶功能紊乱,其中过氧化物酶(POD)活性升高,过氧化氢酶(CAT)活性开始上升后转为下降。推测大豆下胚轴受TCB胁迫伤害过程中,活性氧代谢失衡造成的膜脂质过氧化起着重要作用。

水、土壤及植物样品中1,2,4-三氯苯的提取和GC测定

<正> 1 引言三氯苯(1,2,4-TCB)是化学工业和合成农药的重要原料,但同时也是环境中广泛存在的污染物。早在1979年,1,2,4-TCB就被美国环保局列入129种优先控制的污染物之一。在我国1,2,4-TCB也是常见的一种有机污染物。水体和土壤中1,2,4-TCB的分析方法国内已见报道。但这些方法大多步骤复杂、操作困难,而且费时、试剂消耗量大。另外,目前尚没有植物样品中1,2,4-TCB分析方法的报道。本文建立了步骤简单、易操作、节约试剂的水、土壤、植物和作物籽实中1,2,4-TCB的提取和分析方法。

Synthesis and properties of novel organosoluble polyimides derived from 1,4-bis[4-(3,4-dicarboxylphenoxy)]triptycene dianhydride and various aromatic diamines

A novel triptycene-based dianhydride, 1,4-bis[4-(3,4-dicarboxylphenoxy)]triptycene dianhydride, was prepared from 4-nitro-N-methylphthalimide and potassium phenolate of 1,4-dihydroxytriptycene (1). The aromatic nucleophilic substitution reaction between 4-nitro-N-methylphthalimide and I afforded triptycene-based bis(N-methylphthalimide) (2), which hydrolyzed and subsequently dehydrated to give the corresponding dianhydride (3). A series of new polyimides containing triptycene moieties were prepared from the dianhydride monomer (3) and various diamines in in-cresol via conventional one-step polycondensation method. Most of the resulting polyimides were soluble in common organic solvents, such as chloroform, THF, DMAc and DMSO. The polyimides exhibited excellent thermal and thermo-oxidative stabilities with the onset decomposition temperature and 10% weight loss temperature ranging from 448 to 486 degrees C and 526 to 565 degrees C in nitrogen atmosphere, respectively. The glass transition temperatures of the polyimides were in the range of 221-296 degrees C. The polyimide films were found to be transparent, flexible, and tough. The films had tensile strengths, elongations at break, and tensile moduli in the ranges 95-118 MPa, 5.3-16.2%, and 1.03-1.38 GPa, respectively. Wide-angle X-ray diffraction measurements revealed that these polyimides were amorphous.

1-苯基-3-甲基-4-苯甲酰基-吡唑酮-5与中性磷(膦)萃取剂协同萃取镧B

研究了 1 苯基 3 甲基 4 苯甲酰基 -吡唑酮 5 (HPMBP)和中性有机磷 (膦 )类萃取剂Cyanex 4 71X(TIBPS ,B)在硝酸介质中对稀土元素La 的萃取 ,用斜率法和恒摩尔法探讨了萃取机理 ,确定了萃合物的组成为La(NO3 ) 2 ·PMBP·B ,计算了萃取平衡常数。比较了HPMBP与Cyanex 4 71X、Cyanex 92 1、Cyanex 92 3、Cyanex 92 5、DEH/EHP、P35 0及TBP的单独及混合体系萃取La 的性能 ,结果表明 :所有混合体系对La 均有协同效应 ,其中HPMBP与Cyanex 92 3、Cyanex 92 1、Cyanex 92 5的混合体系是萃取La 的有效体系。

Synthesis, structure, electrochemistry, photophysics and electroluminescence of 1,3,4-oxadiazole-based ortho-metalated iridium(III) complexes

Four new iridium(III) complexes 1-4, with 1,3,4-oxadiazole derivative as cyclometalated ligand for the first time, have been synthesized and structurally characterized by NMR, EA, MS and X-ray diffraction analysis (except 1). The stronger ligand field strength of the dithiolate ancillary ligands results in higher oxidation potentials and lower HOMO energy levels of complexes than acetylacetone. The absorption spectra of these complexes display low-energy metal-to-ligand charge transfer transition ranging from 350 to 500 nm. Complexes with dithiolate ancillary ligand emit at maximum wavelengths of ca. 500 nm, blue shifting 17 and 11 nm with respect to their counterpart with acetylacetone ligand. The electrophosphorescent devices with 2-4 as phosphorescent dopant in emitting layer have been fabricated. All devices have a low turn-on voltage in the range of 4.5 and 4.9 V. A high-efficiency green emission with maximum luminous efficiency of 5.28 cd/A at current density of 1.37 mA/cm(2) and a maximum brightness of 2592 cd/m(2) at 15.2 V has been achieved in device using 2 as emitter.

Novel highly selective anion chemosensors based on 2,5-bis(2-hydroxyphenyl)-1,3,4-oxadiazole

2-(2-Hydroxyphenyl)-5-phenyl-1,3,4-oxadiazole 1 and 2,5-bis(2-hydroxyphenyl)-1,3,4-oxadiazole 2 were used as anion fluorescent and colorimetric chemosensors with high selectivity for H2PO4- and F- over Cl-, while 2 can even distinguish H2PO4- from F-. (C) 2002 Elsevier Science Ltd. All rights reserved.

Two new coordination polymers of Co(II) with 1,1 '-(1,4-butanediyl)bis(benzimidazole)

Two new compounds, [CoL2(H2O)(2)](NO3)(2). 8H(2)O (1) and [CoL(H2O)(2)(CH3CO2)(2)]. H2O (2), were obtained from self-assembly of the corresponding metal salts with 1,1'-(1,4-butanediyl)bis(benzimidazole) (L). In 1, each cobalt ion is coordinated to four nitrogen atoms from four molecules of L, and to two water molecules. Metal ions are bridged by L ligands to form infinite (4, 4) networks that contain 44-membered rings. The (4, 4) networks of 1 stack in a parallel fashion, resulting in the formation of large channels in the material. In 2, each cobalt ion is coordinated to two N atoms from two L molecules, two water molecules and two carboxylate O atoms from two acetate anions. Each L molecule is coordinated to two cobalt ions, acting as a bridging ligand as in 1. The bridged cobalt ions form an infinite zigzag chain structure.

三苯基锡-2-(1,2-亚乙二硫)亚甲基-3-羰基-5-芳基-4-戊烯酸酯的合成及晶体结构

由2-(1,2-亚乙二硫)亚甲基-3-羰基-5-芳基-4-戊烯酸与三苯基氢氧化锡反应,合成了九个标题化合物3.用X射线衍射法测定了3b的晶体结构.该晶体属三斜晶系,空间群Pl,α=0.9074(2)nm,b=1.6809(3)nm,c=2.1834(4)nm,α=77.57(3)°,β=88.04(3)°,γ=89.47(3)°,V=3.2503nm~3,Z=2;R=0.0592.由锡氧原子间距离可推测,该晶体中羧酸根作为双齿配体与锡原子形成了分子内五配位结构.

西洋参多糖PPQI-1～4的分离和表征

为研究生物活性西洋参多糖的性质 ,采取热水提取乙醇分级沉淀、葡聚糖凝胶分离等手段从西洋参根中分得 4个纯多糖 (PPQI- 1～ 4)。基质辅助激光解吸电离质谱 (MAL DI- MS)测定分子量 ,乙酰化衍生结合GC分析测定糖组成。甲基化结合 GC- MS分析测定糖苷键连接位点。结果表明 ,这 4个多糖化合物都是杂多糖 ,分别由不同比例的阿拉伯糖、半乳糖、葡萄糖、糖醛酸组成 ,糖醛酸含量为 30 %～ 6 0 % ,分子量范围 2～ 7万

~(57)Fe,~(119)Sn掺杂Bi_2Sr_2Ca_(n-1)Cu_nO_(2n+4)的化学键性质和Mssbauer谱位移研究

利用电介质的平均能带模型计算了Bi2 Sr2 Can- 1CunO2n +4 (n =1,2 ,3)的化学键参数 .应用由共价性和极化率定义的化学环境因子计算了57Fe和119Sn在Bi2 Sr2 Can - 1CunO2n +4 中的M ssbauer同质异能位移 ,确定了57Fe和119Sn在Bi2 Sr2 Can- 1CunO2n +4 中的价态和占位情况 .

三环己基锡-2-(1,2-亚乙二硫)亚甲基-3-羰基-5-芳基-4-戊烯酸酯的结构研究

合成了 3个三环己基锡 -2 -( 1 ,2 -亚乙二硫 )亚甲基 -3-羰基 -5 -芳基 -4 -戊烯酸酯化合物 .用 IR,1 H NMR,1 3 C NMR和 1 1 9Sn NMR光谱及 X射线衍射对所合成的化合物进行了表征 .结果表明标题化合物为四配位、具有畸变四面体结构的锡酯类化合物

1,4-二丙氧基-2,3二氰基萘的晶体结构

用 Siemens P4四圆衍射仪,测得了1,4-二丙氧基-2,3-二氰基萘的晶体结构。晶体属单斜晶系,空间群为 C2/C。晶格参数 a=14.987(3)A,b=10.527(2),c=11.755(2),β=118.98°(3),晶胞体积 V=1622.4(6)3,Z=4,Dc=1.205Kg/m~3,μ(MoK_α)=0.079mm~(-1),F(000)=624,T=293(2)K_o晶体结构应用直接法,解出最后的偏离因子 R=0.0554[1425个Ⅰ≥2σ(Ⅰ)衍射点]。结构分析表明,萘环的1,4和2,3位碳原子上的氢原子分别被丙氧基和氰基所取代,由于取代基的引入使萘环的结构有所改变。