一种高性能硅片曝光场分布优化算法

以提高光刻机应用性能为目的，提出了一种高性能硅片曝光场分布优化算法。由芯片尺寸计算得到最佳曝光场尺寸，使其最接近于光刻机提供的曝光场最大尺寸，提高了曝光系统的利用率；引入曝光场交错分布，减少了硅片边缘曝光场的交叠，提高了光刻产率；建立产率优先和良率优先两种优化方案，实现了产率和良率的共优。以实际芯片产品的参量为例，将本算法用于曝光过程，采用产率优先标准，曝光场数量减少了10％，而内场数量基本不变，提高了光刻的产率也确保了良率；采用良率优先标准，内场数量增长了10％，总的场数也有所减少，提高了光刻良率的可靠

The next-generation sequencing technology: A technology review and future perspective

As one of the most powerful tools in biomedical research, DNA sequencing not only has been improving its productivity in an exponential growth rate but also been evolving into a new layout of technological territories toward engineering and physical disciplines over the past three decades. In this technical review, we look into technical characteristics of the next-gen sequencers and provide prospective insights into their future development and applications. We envisage that some of the emerging platforms are capable of supporting the $1000 genome and $100 genome goals if given a few years for technical maturation. We also suggest that scientists from China should play an active role in this campaign that will have profound impact on both scientific research and societal healthcare systems.

Influence of heated catalyzer on thermal distribution of substrate in HWCVD system

Based on Stefan-Boltzman and Lambert theorems, the radiation energy distribution on substrate (REDS) from catalyzer with parallel filament geometry has been simulated by variation of filament and system layout in hot-wire chemical vapor deposition. The REDS uniformity is sensitive to the distance between filament and substrate d(f-s) when d(f-s) less than or equal to 4 cm. As d(f-s) > 4 cm, the REDS uniformity is independent of d(f-s) and is mainly determined by filament number and filament separation. Two-dimensional calculation shows that the REDS uniformity is limited by temperature decay at filament edges. The simulation data are in good agreement with experiments. (C) 2003 Elsevier Science B.V. All rights reserved.

A Low Power Baseband Chain for CMMB Application

This paper presents experimental results of an analog baseband circuit for China Multimedia Mobile Broadcasting (CMMB) direct conversion receiver in 0.35um SiGe BiCMOS process. It is the first baseband of CMMB RFIC reported so far. A 8(th)-order chebyshev low pass filter (LPF) with calibration system is used in the analog baseband circuit, the filter provides 0.5 dB passband ripple and -35 dB attenuation at 6MHz with the cutoff frequency at 4MHz, the calibration of filter is reported to achieve the bandwidth accuracy of 3%. The baseband variable gain amplifier (VGA) achieves more than 40 dB gain tuning with temperature compensation. In addition, A DC offset cancellation circuit is also introduced to remove the offset from layout and self-mixing, and the remaining offset voltage and current consumption are only 6mV and 412uA respectively. Implemented in a 0.35um SiGe technology with 1.1 mm(2) die size, this tuner baseband achieves OIP3 of 25.5 dBm and dissipate 16.4 mA under 2.8-V supply.

Design and Verification of the Programming Circuit in an Application-Specific FPGA

In this paper we present a methodology and its implementation for the design and verification of programming circuit used in a family of application-specific FPGAs that share a common architecture. Each member of the family is different either in the types of functional blocks contained or in the number of blocks of each type. The parametrized design methodology is presented here to achieve this goal. Even though our focus is on the programming circuitry that provides the interface between the FPGA core circuit and the external programming hardware, the parametrized design method can be generalized to the design of entire chip for all members in the FPGA family. The method presented here covers the generation of the design RTL files and the support files for synthesis, place-and-route layout and simulations. The proposed method is proven to work smoothly within the complete chip design methodology. We will describe the implementation of this method to the design of the programming circuit in details including the design flow from the behavioral-level design to the final layout as well as the verification. Different package options and different programming modes are included in the description of the design. The circuit design implementation is based on SMIC 0.13-micron CMOS technology.

基于约束语义的双手交互场景布局系统

以家居布局为应用背景,采用双手交互的分工协作,结合2种不同维度的输入设备的特性改进3D地图技术和遥取技术,实现地图和场景的无缝融合以及远处物体的直接操作;增添场景约束语义,实现物体的成组移动.通过语义识别和反馈来实现场景布局的精确定位.

在ICU中实现少数民族文字的处理

基于ISO/ IEC 10646和UNICODE国际标准,用传统的字体技术(如TrueType)来实现少数民族文字处理所面临的一个"瓶颈"问题是:"变形显现字符"不存在确定的码位.这也是多年来民文系统重复开发、互不兼容的根本原因.本文基于ICU的文字处理体系结构,阐述了完全支持Unicode标准的少数民族文字(本文主要指蒙古文字、维文、藏文等)的实现方法.文中首先介绍了少数民族文字的特点,分析其与拉丁文字、汉字在计算机输入、输出过程中的不同之处,并指出少数民族文字处理的难点.其次介绍了一种能满足少数民族文字处理需求的字体技术--OpenType.最后,阐述了文字处理引擎的工作原理,以及ICU中如何实现对少数民族文字的支持.

基于OpenType的复杂文本语言处理的研究与实现

某些书写系统的文字(如蒙古文、维文、藏文等)具有比拉丁文字复杂的特性,当计算机在处理这类文字时,运用传统的字体技术(如TrueType)几乎不可能在显现出规范的书写形式的同时,实现对Unicode标准编码的支持.就这个问题介绍一种基于OpenType字体的处理模型.事实证明,这是一种可行的方案.

一种基于谓词规则的复杂文字处理模型

复杂文字在显示输出的过程中,表现出极为复杂的语言特征.为此提出了一种基于谓词规则的复杂文字处理模型,模型以谓词规则的方法给出了复杂文字字形布局特征的形式化描述,按照复杂文字处理的过程,设计了实现该模型的软件体系结构,将复杂文字的语言特征从程序控制逻辑中隔离出来,提高了系统的灵活性,便于增加新的复杂文字的支持.在研制蒙古文、藏文、维吾尔文办公套件的应用中表明,该模型是实用有效的.

一种支持多语言文本布局方向的文档处理模型

文档处理是文字处理的关键组成部分，针对多语言混合排版的需求，本文提出了基于“框”的支持不同方向的多语言文本布局的文档处理模型。该模型把时文本布局方向的处理封装在文档格式化模块中，将多文本布局方向的问题规约为文本布局方向为从左向右（水平）的文档格式化的问题，并设计了多文本布局方向文档格式化的递归算法。该模型可以很好支持包括我国民族文字蒙古文、维吾尔文、藏文在内的各种不同书写方向文字的文本布局。

蒙古文显示在OpenOffice.org办公套件中的实现

蒙古文是一种复杂文字,目前操作系统和办公套件都还不支持蒙古文的显示.OpenOffice.org是可以运行在Linux和Windows上跨平台的办公套件,它分别使用ICU LayoutEngine和Uniscribe进行复杂文字处理.本文以支持蒙古文处理的Linux版本OpenOiffice.org为基础,详细分析了OpenOffice.org在Linux和Windows系统上的复杂文本处理过程,采用Uniscribe与ICU相结合的方案,实现了OpenOffice.org在Windows平台上对蒙古文的显示.

Research on micro-optical lenses fabrication technology

We present a detail investigation on the development of a series of gradient index (GRIN) optical glass microlens and polymer microlens and microlens arrays in our laboratory in recent years. The special glass material GRIN lenses have been fabricated mainly by using ion-exchange technology, which are applied to construct micro-optic devices and other applications. On one hand, we demonstrated the light propagation and imaging properties of GRIN lenses and the results analyzed. On the other hand, we have explored a drop-on-demand ink-jet printing method to produce microlens array using nano-scale polymer droplets involved with a uniform ultraviolet light and heat solidifying process. The experimental setup for manufacturing polymer microlens array and the performance of refractive microlens elements are also given in this paper. (C) 2006 Elsevier GmbH. All rights reserved.

Design for an IO block array in a tile-based FPGA

A design for an IO block array in a tile-based FPGA is presented.Corresponding with the characteristics of the FPGA, each IO cell is composed of a signal path, local routing pool and configurable input/output buffers.Shared programmable registers in the signal path can be configured for the function of JTAG, without specific boundary scan registers/latches, saving layout area.The local routing pool increases the flexibility of routing and the routability of the whole FPGA.An auxiliary power supply is adopted to increase the performance of the IO buffers at different configured IO standards.The organization of the IO block array is described in an architecture description file, from which the array layout can be accomplished through use of an automated layout assembly tool.This design strategy facilitates the design of FPGAs with different capacities or architectures in an FPGA family series.The bond-out schemes of the same FPGA chip in different packages are also considered.The layout is based on SMIC 0.13μm logic 1P8M salicide 1.2/2.5 V CMOS technology.Our performance is comparable with commercial SRAM-based FPGAs which use a similar process.

A Multi-Finger Si_(1-x)Ge_x/Si Heterojunction Bipolar Transistor for Wireless Power Amplifier Applications

A large area multi-finger configuration power SiGe HBT device(with an emitter area of about 880μm~2)was fabricated with 2μm double-mesa technology.The maximum DC current gain β is 214.The BV_(CEO) is up to 10V,and the BV_(CBO) is up to 16V with a collector doping concentration of 1×10~(17)cm~(-3) and collector thickness of 400nm.The device exhibits a maximum oscillation frequency f_(max) of 19.3GHz and a cut-off frequency f_T of 18.0GHz at a DC bias point of I_C=30mA and V_(CE)=3V.MSG(maximum stable gain)is 24.5dB,and U(Mason unilateral gain)is 26.6dB at 1GHz.Due to the novel distribution layout,no notable current gain fall-off or thermal effects are observed in the I-V characteristics at high collector current.

Influence of heated catalyzer on thermal distribution of substrate in HWCVD system

Based on Stefan-Boltzman and Lambert theorems, the radiation energy distribution on substrate (REDS) from catalyzer with parallel filament geometry has been simulated by variation of filament and system layout in hot-wire chemical vapor deposition. The REDS uniformity is sensitive to the distance between filament and substrate d(f-s) when d(f-s) less than or equal to 4 cm. As d(f-s) > 4 cm, the REDS uniformity is independent of d(f-s) and is mainly determined by filament number and filament separation. Two-dimensional calculation shows that the REDS uniformity is limited by temperature decay at filament edges. The simulation data are in good agreement with experiments. (C) 2003 Elsevier Science B.V. All rights reserved.