Very low-pressure VLP-CVD growth of high quality gamma-Al2O3 films on silicon by multi-step process

gamma-Al2O3 films were grown on Si (10 0) substrates using the sources of TMA (AI(CH3)(3)) and O-2 by very low-pressure chemical vapor deposition. The effects of temperature control on the crystalline quality, surface morphology, uniformity and dielectricity were investigated. It has been found that the,gamma-Al2O3 film prepared at a temperature of 1000degreesC has a good crystalline quality, but the surface morphology, uniformity and dielectricity were poor due to the etching reaction between 0, and Si substrate in the initial growth stage. However, under a temperature-varied multi-step process the properties Of gamma-Al2O3 film were improved. The films have a mirror-like surface and the dielectricity was superior to that grown under a single-step process. The uniformity of gamma-Al2O3 films for 2-in epi-wafer was <5%, it is better than that disclosed elsewhere. In order to improve the crystalline quality, the gamma-Al2O3 films were annealed for I h in O-2 atmosphere. (C) 2002 Elsevier Science B.V. All rights reserved.

A study of Si1-xGex/Si quantum-well intermixing by photocurrent spectroscopy

Photocurrent spectroscopy has been used to study quantum-well intermixing in this paper. The cut-off wavelength of the photodiodes based on the implanted and annealed materials is significantly reduced, compared with that measured in annealed-only photodetectors. The bandgap of SiGe quantum well in implanted and annealed samples is blue-shifted by up to 97 meV, relative to that in annealed-only samples. (C) 2000 Elsevier Science S.A. All rights reserved.

“中介逻辑”与Woodruff三值逻辑系统

在《“中介逻辑”的特征问题》一文里,我们对近来朱梧梗、肖奚安等同志发表的称为“中介逻辑”的命题系统MP的三个联接词(对立否定),～(模糊否定)与→(蕴含)建立了如下的三值真值表:

波浪能海水淡化的应用研究

简要介绍了“十五”期问在广东省汕尾市研建的波浪能海水淡化系统的组成和工作原理。为了验证波浪能海水淡化装置运行的实用性和可靠性，在国内外波浪能海水淡化研究的基础上，对汕尾波浪能海水淡化装置进行了不同操作压力情况下的试验研究。研究结果表明，随着高压海水压力的升高，产出淡水量会明显增加，淡水质量提高，装置产出淡水的能耗较低。