A study of Si1-xGex/Si quantum-well intermixing by photocurrent spectroscopy


Autoria(s): Li C; Yang QQ; Chen YH; Wang HJ; Wang JZ; Yu JZ; Wang QM
Data(s)

2000

Resumo

Photocurrent spectroscopy has been used to study quantum-well intermixing in this paper. The cut-off wavelength of the photodiodes based on the implanted and annealed materials is significantly reduced, compared with that measured in annealed-only photodetectors. The bandgap of SiGe quantum well in implanted and annealed samples is blue-shifted by up to 97 meV, relative to that in annealed-only samples. (C) 2000 Elsevier Science S.A. All rights reserved.

Identificador

http://ir.semi.ac.cn/handle/172111/12710

http://www.irgrid.ac.cn/handle/1471x/65325

Idioma(s)

英语

Fonte

Li C; Yang QQ; Chen YH; Wang HJ; Wang JZ; Yu JZ; Wang QM .A study of Si1-xGex/Si quantum-well intermixing by photocurrent spectroscopy ,THIN SOLID FILMS,2000,359(2):236-238

Palavras-Chave #半导体材料 #quantum well intermixing #photocurrent spectroscopy #photoelectronic devices #SiGe/Si MQW #blue shift energy #ION-IMPLANTATION
Tipo

期刊论文