The microstructure and properties of energetically deposited carbon nitride films
Data(s) |
01/01/2014
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Resumo |
The intrinsic stress, film density and nitrogen content of carbon nitride (CNx) films deposited from a filtered cathodic vacuum arc were determined as a function of substrate bias, substrate temperature and nitrogen process pressure. Contour plots of the measurements show the deposition conditions required to produce the main structural forms of CNx including N-doped tetrahedral amorphous carbon (ta-C:N) and a variety of nitrogen containing graphitic carbons. The film with maximum nitrogen content (~ 30%) was deposited at room temperature with 1.0 mTorr N2 pressure and using an intermediate bias of - 400 V. Higher nitrogen pressure, higher bias and/or higher temperature promoted layering with substitutional nitrogen bonded into graphite-like sheets. As the deposition temperature exceeded 500 °C, the nitrogen content diminished regardless of nitrogen pressure, showing the meta-stability of the carbon-nitrogen bonding in the films. Hardness and ductility measurements revealed a diverse range of mechanical properties in the films, varying from hard ta-C:N (~ 50 GPa) to softer and highly ductile CN x which contained tangled graphite-like sheets. Through-film current-voltage characteristics showed that the conductance of the carbon nitride films increased with nitrogen content and substrate bias, consistent with the transition to more graphite-like films. © 2014 Elsevier B.V. |
Identificador | |
Idioma(s) |
eng |
Publicador |
Elsevier |
Relação |
http://dro.deakin.edu.au/eserv/DU:30071941/t064648-2014-diamond-related-mat-2014.pdf http://www.dx.doi.org/10.1016/j.diamond.2014.03.006 |
Direitos |
2014, Elsevier |
Palavras-Chave | #Carbon nitride #Cathodic arc #Energetic deposition #N-doped carbon #Science & Technology #Technology #Materials Science, Multidisciplinary #Materials Science #CNx #ABSORPTION FINE-STRUCTURE #X-RAY SPECTROSCOPY #TA-C FILMS #AMORPHOUS-CARBON #THIN-FILMS #NEAR-EDGE #OPTICAL-PROPERTIES #ARC DEPOSITION #BEAM SOURCE #NITROGEN |
Tipo |
Journal Article |