Dynamic full-range Fourier-domain optical coherence tomography using sinusoidal phase-modulating interferometry

We propose a technique for dynamic full-range Fourier-domain optical coherence tomography by using sinusoidal phase-modulating interferometry, where both the full-range structural information and depth-resolved dynamic information are obtained. A novel frequency-domain filtering algorithm is proposed to reconstruct a time-dependent complex spectral interferogram from the sinusoidally phase-modulated interferogram detected with a high-rate CCD camera. By taking the amplitude and phase of the inverse Fourier transform of the complex spectral interferogram, a time-dependent full-range cross-sectional image and depth-resolved displacement are obtained. Displacement of a sinusoidally vibrating glass cover slip behind a fixed glass cover slip is measured with subwavelength sensitivity to demonstrate the depth-resolved dynamic imaging capability of our system. (c) 2007 Society of Photo-Optical Instrumentation Engineers.

Full-range parallel Fourier-domain optical coherence tomography using sinusoidal phase-modulating interferometry

We demonstrate a full-range parallel Fourier-domain optical coherence tomography (FD-OCT) in which a tomogram free of mirror images as well as DC and autocorrelation terms is obtained in parallel. The phase and amplitude of two-dimensional spectral interferograms are accurately detected by using sinusoidal phase-modulating interferometry and a two-dimensional CCD camera, which allows for the reconstruction of two-dimensional complex spectral interferograms. By line-by-line inverse Fourier transformation of the two-dimensional complex spectral interferogram, a full-range parallel FD-OCT is realized. Tomographic images of two separated glass coverslips obtained with our method are presented as a proof-of-principle experiment.

Dynamic full-range Fourier-domain optical coherence tomography using sinusoidal phase-modulating interferometry

We propose a technique for dynamic full-range Fourier-domain optical coherence tomography by using sinusoidal phase-modulating interferometry, where both the full-range structural information and depth-resolved dynamic information are obtained. A novel frequency-domain filtering algorithm is proposed to reconstruct a time-dependent complex spectral interferogram from the sinusoidally phase-modulated interferogram detected with a high-rate CCD camera. By taking the amplitude and phase of the inverse Fourier transform of the complex spectral interferogram, a time-dependent full-range cross-sectional image and depth-resolved displacement are obtained. Displacement of a sinusoidally vibrating glass cover slip behind a fixed glass cover slip is measured with subwavelength sensitivity to demonstrate the depth-resolved dynamic imaging capability of our system. (c) 2007 Society of Photo-Optical Instrumentation Engineers.

A high accuracy image sensor for sinusoidal phase-modulating interferometry

We proposed a high accuracy image sensor technique for sinusoidal phase-modulating interferometer in the field of the surface profile measurements. It solved the problem of the CCD's pixel offset of the same column under two adjacent rows, eliminated the spectral leakage, and reduced the influence of external interference to the measurement accuracy. We measured the surface profile of a glass plate, and its repeatability precision was less than 8 nm and its relative error was 1.15 %. The results show that it can be used to measure surface profile with high accuracy and strong anti-interference ability. (C) 2007 Elsevier GmbH. All rights reserved.

Real-time micro-vibration measurement in sinusoidal phase-modulating interferometry

As there exist some problems with the previous laser diode (LD) real-time microvibration measurement interferometers, such as low accuracy, correction before every use, etc., in this paper, we propose a new technique to realize the real-time microvibration measurement by using the LD sinusoidal phase-modulating interferometer, analyze the measurement theory and error, and simulate the measurement accuracy. This interferometer utilizes a circuit to process the interference signal in order to obtain the vibration frequency and amplitude of the detective signal, and a computer is not necessary in it. The influence of the varying light intensity and light path difference on the measurement result can be eliminated. This technique is real-time, convenient, fast, and can enhance the measurement accuracy too. Experiments show that the repeatable measurement accuracy is less than 3.37 nm, and this interferometer can be applied to real-time microvibration measurement of the MEMS. (C) 2007 Elsevier GmbH. All rights reserved.

Sinusoidal phase-modulating laser diode interferometer for measuring angular displacement

We propose a sinusoidal phase-modulating laser diode interferometer for measuring small angular displacement. The interferometer is based on a Fabry-Perot plate. It has a simple structure and is insensitive to external disturbance. Sinusoidal phase-modulating interferometry is used for improving the measurement accuracy. A charge-coupled device (CCD) image sensor is used for measuring the distance between the reflected beams from two faces of the Fabry-Perot plate. From the distance, the initial angle of incidence is calculated. Compared with Michelson interferometers and autocollimators, this interferometer has the advantage of compact size and simple structure. The numerical calculation and experimental results verify the usefulness of this novel interferometer. (C) 2004 Society of Photo-Optical Instrumentation Engineers.

正弦相位调制位移干涉测量技术中调制频率的优化选择

针对正弦相位调制（SPM）干涉测量技术用于位移测量时，调制频率对干涉信号相位解调的影响，提出一种调制频率的优化选择依据。通过对干涉信号的频谱进行分析，发现当被测位移幅度较小时，较小的调制频率即可满足相位解调的要求；而当被测位移较大时，必须相应地增大调制频率，才能获得比较准确的测量结果。模拟计算以及实验结果表明，被测位移信号的幅度每增大四分之一测量光源波长，调制频率需要相应增大4倍于被测信号频率的大小，才能满足正弦相位调制位移干涉测量技术信号处理的需要。

正弦相位调制的频域光学相干层析成像

提出一种基于正弦相位调制的频域光学相干层析成像,利用正弦相位调制干涉术探测复频域干涉条纹的实部和虚部,重建复频域干涉条纹。对该复频域干涉条纹作逆傅里叶变换后,消除了频域光学相干层析成像中存在的复共轭镜像以及直流背景和自相干噪声。对玻璃片样品进行了层析成像实验。实验结果表明,采用正弦相位调制的频域光学相干层析成像,将可利用的成像深度范围扩大到原来的2倍,实现了全深度探测的频域光学相干层析成像。

物体表面形貌的正弦相位调制实时干涉测量技术研究

表面形貌干涉测量技术是一种高精度的非接触式测量技术,在工业生产和科学研究中具有广泛的应用。提出一种实时测量表面形貌的正弦相位调制干涉测量新技术。该技术用激光二极管作光源,用自制的高速图像传感器探测干涉信号,通过信号处理电路实时解相得到被测表面所对应的相位分布,实时分析相位获得物体表面形貌。该技术消除了光强和部分外界干扰的影响,提高了系统的测量精度。楔形光学平板表面形貌的测量结果表明,测量点为60×60个的情况下,测量时间小于8.2 ms,重复测量精度(RMS)为4.3 nm。

基于低速面阵CCD的正弦相位调制干涉测量

正弦相位调制(SPM)干涉测量技术用于表面形貌测量时, 需要帧速高于300 frame/s的图像传感器, 同时要求调制信号频率与图像传感器帧速成确定的整数倍关系。提出一种基于低速CCD(30 frame/s)的帧速可调的高速图像传感技术, 通过控制每帧像素总数提高CCD帧速, 研制出一种高帧速图像传感器, 帧速可达300～1600 frame/s, 且每帧大小连续可调。将该CCD传感器用于正弦相位调制干涉泰曼-格林干涉仪, 测量镀膜玻璃板表面形貌, 当CCD图像传感器的帧速与调制信号频率呈16, 8, 4

用于大范围高精度实时位移测量的半导体激光干涉仪

现有的半导体激光干涉仪存在测量精度与测量范围的矛盾。本文提出一种新的实时位移测量半导体激光干涉仪，并分析了干涉仪的测量原理。首先提出一种新的解相算法，它通过两路实时相位探测电路从干涉信号中得到待测量相位，消除了光强波动、初始光程差、电路放大倍数、调制深度、Bessel函数等参数对测量精度的影响，提高了测量精度。其次，提出一种扩大测量范围的技术，并用解包裹电路得到真实相位和待测量的位移, 将测量范围从半个波长提高到几个波长。在实验中，测得喇叭的峰峰值为2361.7nm，重复测量精度为2.56nm，测量时间为

Small-dynamic-angle measurement using tangent relationship and phase-modulating technique

A method using two prisms for measurement of small dynamic angles is proposed in which the measurement is based on a simple tangent equation and a phase-modulating interferometer with a laser diode to measure dynamic optical path differences with higher accuracy. Owing to the simple tangent equation, the symmetry requirement on the two prisms in the optical configuration is eliminated, and easy measurement of the separations between two parallel beams with a position-sensitive detector is achieved. Small-dynamic-angle measurements are experimentally demonstrated with high accuracy. (C) 2007 Society of Photo-Optical Instrumentation Engineers.