Sinusoidal phase-modulating laser diode interferometer for measuring angular displacement


Autoria(s): Zhang C; Wang XZ
Data(s)

2004

Resumo

We propose a sinusoidal phase-modulating laser diode interferometer for measuring small angular displacement. The interferometer is based on a Fabry-Perot plate. It has a simple structure and is insensitive to external disturbance. Sinusoidal phase-modulating interferometry is used for improving the measurement accuracy. A charge-coupled device (CCD) image sensor is used for measuring the distance between the reflected beams from two faces of the Fabry-Perot plate. From the distance, the initial angle of incidence is calculated. Compared with Michelson interferometers and autocollimators, this interferometer has the advantage of compact size and simple structure. The numerical calculation and experimental results verify the usefulness of this novel interferometer. (C) 2004 Society of Photo-Optical Instrumentation Engineers.

Identificador

http://ir.siom.ac.cn/handle/181231/1622

http://www.irgrid.ac.cn/handle/1471x/10336

Idioma(s)

英语

Fonte

Zhang C;Wang XZ.,Opt. Eng.,2004,43(12):3008-3013

Palavras-Chave #angular displacement measurement #Fabry-Perot plate #sinusoidal phase-modulating interferometry #charge-coupled device image sensor
Tipo

期刊论文