Impact of polarized illumination on high NA imaging in ArF immersion lithography at 45 nm node

Immersion lithography has been considered as the mainstream technology to extend the feasibility of optical lithography to further technology nodes. Using proper polarized illumination in an immersion lithographic tool is a powerful means to enhance the image quality and process capability for high numerical aperture (NA) imaging. In this paper, the impact of polarized illumination on high NA imaging in ArF immersion lithography for 45 nm dense lines and semi-dense lines is studied by PROLITH simulation. The normalized image log slope (NILS) and exposure defocus (ED) window are simulated under various polarized illumination modes, and the impact of polarized illumination on image quality and process latitude is analyzed. (C) 2007 Elsevier GmbH. All rights reserved.

火成岩储层裂缝识别、预测理论与方法研究－以济阳坳陷火成岩油藏为例

Since 1970s, igneous reservoirs such as Shang741, Bin674 and Luol51 have been found in Jiyang depression, which are enrichment and heavy-producing. Showing good prospect of exploration and development, igneous reservoirs have been the main part of increasing reserves and production in Shengli oilfield. As fracture igneous reservoir being an extraordinary complex concealed reservoir and showing heavy heterogeneity in spatial distribution, the study of recognition, prediction, formation mechanism and the law of distribution of fracture is essential to develop the reservoir. Guided by multiple discipline theory such as sedimentology, geophysics, mineralogy, petroleum geology, structural geology and reservoir engineering, a set of theories and methods of recognition and prediction of fractured igneous rock reservoir are formed in this paper. Rock data, three-dimensional seismic data, log data, borehole log data, testing data and production data are combined in these methods by the means of computer. Based on the research of igneous rock petrography and reservoir formation mechanism, emphasized on the assessment and forecast of igneous rock reservoir, aimed at establishing a nonhomogeneity quantification model of fractured igneous rock reservoir, the creativity on the fracture recognition, prediction and formation mechanism are achieved. The research result is applied to Jiyang depression, suggestion of exploration and development for fractured igneous rock reservoir is supplied and some great achievement and favourable economic effect are achieved. The main achievements are gained as follows: 1. The main facies models of igneous rock reservoir in JiYang depression are summarized. Based on data and techniques of seism, well log and logging,started from the research of single well rock facies, proceeded by seismic and log facies research, from point to line and line to face, the regional igneous facies models are established. And hypabyssal intrusion allgovite facies model, explosion volcaniclastic rock facies model and overfall basaltic rocks facies model are the main facies models of igneous rock reservoir in JiYang depression. 2. Four nonhomogenous reservoir models of igneous reservoirs are established, which is the base of fracture prediction and recognition. According to characteristics of igneous petrology and spatial types of reservoir, igneous reservoirs of Jiyang depression are divided into four categories: fractured irruptive rock reservoir, fracture-pore thermocontact metamorphic rock and irruptive rock compound reservoir, pore volcanic debris cone reservoir and fracture-pore overfall basaltic rock reservoir. The spatial distribution of each model's reservoir has its features. And reservoirs can be divided into primary ones and secondary ones, whose mechanism of formation and laws of distribution are studied in this paper. 3. Eight geologic factors which dominate igneous reservoirs are presented. The eight geologic factors which dominates igneous reservoirs are igneous facies, epigenetic tectonics deformation, fracture motion, intensity of intrusive effect and adjoining-rock characters, thermo-contact metamorphic rock facies, specific volcano-tectonic position, magmatic cyclicity and epigenetic diagenetic evolution. The interaction of the eight factors forms the four types nonhomogenous reservoir models of igneous reservoirs in Jiyang depression. And igneous facies and fracture motion are the most important and primary factors. 4. Identification patterns of seismic, well log and logging facies of igneous rocks are established. Igneous rocks of Jiyang depression show typical reflecting features on seismic profile. Tabular reflection seismic facies, arc reflection seismic facies and hummocky or mushroom reflection seismic facies are the three main facies. Logging response features of basic basalt and diabase are shown as typical "three low and two high", which means low natural gamma value, low interval transit-time, low neutron porosity, high resistivity and high density. Volcaniclastic rocks show "two high and three low"-high neutron porosity, high interval transit-time, low density, low-resistance and low natural gamma value. Thermo-contact metamorphic rocks surrounding to diabase show "four high and two low" on log data, which is high natural gamma value, high self-potential anomaly, high neutron porosity, high interval transit-time and low density and low-resistance. Based on seismic, well log and logging data, spatial shape of Shang 741 igneous rock is described. 5. The methods of fracture prediction and recognition for fractured igneous reservoir are summarized. Adopting FMI image log and nuclear magnetic resonance log to quantitative analysis of fractured igneous reservoir and according to formation mechanism and shape of fracture, various fractures are recognized, such as high-angle fracture, low-angle fracture, vertical fracture, reticulated fracture, induced fracture, infilling fracture and corrosion vug. Shang 741 intrusive rock reservoir can be divided into pore-vug compound type, pore fracture type, micro-pore and micro-fracture type. Physical properties parameters of the reservoir are computed and single-well fracture model and reservoir parameters model are established. 6. Various comprehensive methods of fracture prediction and recognition for fractured igneous reservoir are put forward. Adopting three-element (igneous facies, fracture motion and rock bending) geologic comprehensive reservoir evaluation technique and deep-shallow unconventional laterolog constrained inversion technique, lateral prediction of fractured reservoir such as Shang 741 is taken and nonhomogeneity quantification models of reservoirs are established.

A realistic validation study of a new nitrogen multiple-breath washout system

Background For reliable assessment of ventilation inhomogeneity, multiple-breath washout (MBW) systems should be realistically validated. We describe a new lung model for in vitro validation under physiological conditions and the assessment of a new nitrogen (N2)MBW system. Methods The N2MBW setup indirectly measures the N2 fraction (FN2) from main-stream carbon dioxide (CO2) and side-stream oxygen (O2) signals: FN2 = 1−FO2−FCO2−FArgon. For in vitro N2MBW, a double chamber plastic lung model was filled with water, heated to 37°C, and ventilated at various lung volumes, respiratory rates, and FCO2. In vivo N2MBW was undertaken in triplets on two occasions in 30 healthy adults. Primary N2MBW outcome was functional residual capacity (FRC). We assessed in vitro error (√[difference]2) between measured and model FRC (100–4174 mL), and error between tests of in vivo FRC, lung clearance index (LCI), and normalized phase III slope indices (Sacin and Scond). Results The model generated 145 FRCs under BTPS conditions and various breathing patterns. Mean (SD) error was 2.3 (1.7)%. In 500 to 4174 mL FRCs, 121 (98%) of FRCs were within 5%. In 100 to 400 mL FRCs, the error was better than 7%. In vivo FRC error between tests was 10.1 (8.2)%. LCI was the most reproducible ventilation inhomogeneity index. Conclusion The lung model generates lung volumes under the conditions encountered during clinical MBW testing and enables realistic validation of MBW systems. The new N2MBW system reliably measures lung volumes and delivers reproducible LCI values.

Binocular contrast interactions:Dichoptic masking is not a single process

To decouple interocular suppression and binocular summation we varied the relative phase of mask and target in a 2IFC contrast-masking paradigm. In Experiment I, dichoptic mask gratings had the same orientation and spatial frequency as the target. For in-phase masking, suppression was strong (a log-log slope of ∼1) and there was weak facilitation at low mask contrasts. Anti-phase masking was weaker (a log-log slope of ∼0.7) and there was no facilitation. A two-stage model of contrast gain control [Meese, T.S., Georgeson, M.A. and Baker, D.H. (2006). Binocular contrast vision at and above threshold. Journal of Vision, 6: 1224-1243] provided a good fit to the in-phase results and fixed its free parameters. It made successful predictions (with no free parameters) for the anti-phase results when (A) interocular suppression was phase-indifferent but (B) binocular summation was phase sensitive. Experiments II and III showed that interocular suppression comprised two components: (i) a tuned effect with an orientation bandwidth of ∼±33° and a spatial frequency bandwidth of >3 octaves, and (ii) an untuned effect that elevated threshold by a factor of between 2 and 4. Operationally, binocular summation was more tightly tuned, having an orientation bandwidth of ∼±8°, and a spatial frequency bandwidth of ∼0.5 octaves. Our results replicate the unusual shapes of the in-phase dichoptic tuning functions reported by Legge [Legge, G.E. (1979). Spatial frequency masking in human vision: Binocular interactions. Journal of the Optical Society of America, 69: 838-847]. These can now be seen as the envelope of the direct effects from interocular suppression and the indirect effect from binocular summation, which contaminates the signal channel with a mask that has been suppressed by the target. © 2007 Elsevier Ltd. All rights reserved.

Size matters, but not for everyone:Individual differences for contrast discrimination

It is very well known that contrast detection thresholds improve with the size of a grating-type stimulus, but it is thought that the benefit of size is abolished for contrast discriminations well above threshold (e.g., Legge, G. E., & Foley, J. M. (1980)]. Here we challenge the generality of this view. We performed contrast detection and contrast discrimination for circular patches of sine wave grating as a function of stimulus size. We confirm that sensitivity improves with approximately the fourth-root of stimulus area at detection threshold (a log-log slope of -0.25) but find individual differences (IDs) for the suprathreshold discrimination task. For several observers, performance was largely unaffected by area, but for others performance first improved (by as much as a log-log slope of -0.5) and then reached a plateau. We replicated these different results several times on the same observers. All of these results were described in the context of a recent gain control model of area summation [Meese, T. S. (2004)], extended to accommodate the multiple stimulus sizes used here. In this model, (i) excitation increased with the fourth-root of stimulus area for all observers, and (ii) IDs in the discrimination data were described by IDs in the relation between suppression and area. This means that empirical summation in the contrast discrimination task can be attributed to growth in suppression with stimulus size that does not keep pace with the growth in excitation. © 2005 ARVO.

Análise estratigráfica de subsuperfície do Devoniano Inferior da Bacia do Rio do Peixe, Nordeste do Brasil

Subsurface stratigraphic analysis of Devonian strata from the Rio do Peixe Basin, newly recognized by palynological studies, has resulted in the identification of two new lithostratigraphic units assembled in the Santa Helena Group. The Pilões Formation, the lower unit, is composed mainly of dark mudstones and medium-tovery fine-grained sandstones, with minor conglomerates and breccias. The Triunfo Formation, the upper unit, comprises whitish grey, kaolinitic, coarse-grained to conglomeratic, cross stratified sandstones and conglomerates, with interbedded mudstones and fine-grained sandstones. These units were characterized using cores, sidewall and cuttings samples, conventional logs and image log, from three wells drilled by PETROBRAS, and 3D seismic data. The Pilões Formation is interpreted as prodeltaic facies, with lesser associated subaqueous talus, debrite and sandy turbidite lobe facies, distal part of fandelta and braided fluviodeltaic facies of Triunfo Formation. The Santa Helena Group corresponds to the Lower Devonian tectono-sequence deposited in a NW-SE-trending graben during a transgressiveregressive cycle. With 343 meters of thickness (isochore) in well 1-PIL-1-PB (Pilões 1), this sequence has a non-conformity at the lower boundary and its upper boundary is an unconformity with the Lower Cretaceous tectono-sequence (Rio do Peixe Group), that represents a hiatus of about 265 million years. Ignimbrites and coignimbrite breccias (Poço da Jurema volcanic breccia), related to an unknown pyroclastic volcanic event, were recognized at the northern margin of the Sousa halfgraben. Evidence from well data suggests that this event is coeval with the Devonian graben filling. The present study indicates a polyhistorical tectono-volcanosedimentary evolution of the basin. This lithostratigraphic update brings new perspectives for geological research in the Rio do Peixe Basin, as well as in other inland basins of the Northeastern of Brazil. The results of the research also contribute to the kwnoledge of the Borborema Province and western Gondwana paleogeography during the Early Devonian.

Automatic Road Extraction using High Resolution Satellite Image Based on Texture Progressive Analysis and Normalized Cut Method

In this paper the approach for automatic road extraction for an urban region using structural, spectral and geometric characteristics of roads has been presented. Roads have been extracted based on two levels: Pre-processing and road extraction methods. Initially, the image is pre-processed to improve the tolerance by reducing the clutter (that mostly represents the buildings, parking lots, vegetation regions and other open spaces). The road segments are then extracted using Texture Progressive Analysis (TPA) and Normalized cut algorithm. The TPA technique uses binary segmentation based on three levels of texture statistical evaluation to extract road segments where as, Normalizedcut method for road extraction is a graph based method that generates optimal partition of road segments. The performance evaluation (quality measures) for road extraction using TPA and normalized cut method is compared. Thus the experimental result show that normalized cut method is efficient in extracting road segments in urban region from high resolution satellite image.

Image segmentation through combined methods: watershed transform, unsupervised distance learning and normalized cut

Research on image processing has shown that combining segmentation methods may lead to a solid approach to extract semantic information from different sort of images. Within this context, the Normalized Cut (NCut) is usually used as a final partitioning tool for graphs modeled in some chosen method. This work explores the Watershed Transform as a modeling tool, using different criteria of the hierarchical Watershed to convert an image into an adjacency graph. The Watershed is combined with an unsupervised distance learning step that redistributes the graph weights and redefines the Similarity matrix, before the final segmentation step using NCut. Adopting the Berkeley Segmentation Data Set and Benchmark as a background, our goal is to compare the results obtained for this method with previous work to validate its performance.

Geometry-Aware Multiscale Image Registration via OBBTree-Based Polyaffine Log-Demons

Non-linear image registration is an important tool in many areas of image analysis. For instance, in morphometric studies of a population of brains, free-form deformations between images are analyzed to describe the structural anatomical variability. Such a simple deformation model is justified by the absence of an easy expressible prior about the shape changes. Applying the same algorithms used in brain imaging to orthopedic images might not be optimal due to the difference in the underlying prior on the inter-subject deformations. In particular, using an un-informed deformation prior often leads to local minima far from the expected solution. To improve robustness and promote anatomically meaningful deformations, we propose a locally affine and geometry-aware registration algorithm that automatically adapts to the data. We build upon the log-domain demons algorithm and introduce a new type of OBBTree-based regularization in the registration with a natural multiscale structure. The regularization model is composed of a hierarchy of locally affine transformations via their logarithms. Experiments on mandibles show improved accuracy and robustness when used to initialize the demons, and even similar performance by direct comparison to the demons, with a significantly lower degree of freedom. This closes the gap between polyaffine and non-rigid registration and opens new ways to statistically analyze the registration results.

Resistivity image beneath an area of active methane seeps in the west Svalbard continental slope

The Arctic continental margin contains large amounts of methane in the form of methane hydrates. The west Svalbard continental slope is an area where active methane seeps have been reported near the landward limit of the hydrate stability zone. The presence of bottom simulating reflectors (BSR) on seismic reflection data in water depths greater than 600 m suggests the presence of free gas beneath gas hydrates in the area. Resistivity obtained from marine controlled source electromagnetic (CSEM) data provides a useful complement to seismic methods for detecting shallow hydrate and gas as they are more resistive than surrounding water saturated sediments. We acquired two CSEM lines in the west Svalbard continental slope, extending from the edge of the continental shelf (250 m water depth) to water depths of around 800 m. High resistivities (5-12 Ωm) observed above the BSR support the presence of gas hydrate in water depths greater than 600 m. High resistivities (3-4 Ωm) at 390-600 m water depth also suggest possible hydrate occurrence within the gas hydrate stability zone (GHSZ) of the continental slope. In addition, high resistivities (4-8 Ωm) landward of the GHSZ are coincident with high-amplitude reflectors and low velocities reported in seismic data that indicate the likely presence of free gas. Pore space saturation estimates using a connectivity equation suggest 20-50% hydrate within the lower slope sediments and less than 12% within the upper slope sediments. A free gas zone beneath the GHSZ (10-20% gas saturation) is connected to the high free gas saturated (10-45%) area at the edge of the continental shelf, where most of the seeps are observed. This evidence supports the presence of lateral free gas migration beneath the GHSZ towards the continental shelf.

Zernike radial slope polynomials for wavefront reconstruction and refraction

Ophthalmic wavefront sensors typically measure wavefront slope, from which wavefront phase is reconstructed. We show that ophthalmic prescriptions (in power-vector format) can be obtained directly from slope measurements without wavefront reconstruction. This is achieved by fitting the measurement data with a new set of orthonormal basis functions called Zernike radial slope polynomials. Coefficients of this expansion can be used to specify the ophthalmic power vector using explicit formulas derived by a variety of methods. Zernike coefficients for wavefront error can be recovered from the coefficients of radial slope polynomials, thereby offering an alternative way to perform wavefront reconstruction.

Modelling users' contextual querying behaviour for web image searching

The rapid growth of visual information on Web has led to immense interest in multimedia information retrieval (MIR). While advancement in MIR systems has achieved some success in specific domains, particularly the content-based approaches, general Web users still struggle to find the images they want. Despite the success in content-based object recognition or concept extraction, the major problem in current Web image searching remains in the querying process. Since most online users only express their needs in semantic terms or objects, systems that utilize visual features (e.g., color or texture) to search images create a semantic gap which hinders general users from fully expressing their needs. In addition, query-by-example (QBE) retrieval imposes extra obstacles for exploratory search because users may not always have the representative image at hand or in mind when starting a search (i.e. the page zero problem). As a result, the majority of current online image search engines (e.g., Google, Yahoo, and Flickr) still primarily use textual queries to search. The problem with query-based retrieval systems is that they only capture users’ information need in terms of formal queries;; the implicit and abstract parts of users’ information needs are inevitably overlooked. Hence, users often struggle to formulate queries that best represent their needs, and some compromises have to be made. Studies of Web search logs suggest that multimedia searches are more difficult than textual Web searches, and Web image searching is the most difficult compared to video or audio searches. Hence, online users need to put in more effort when searching multimedia contents, especially for image searches. Most interactions in Web image searching occur during query reformulation. While log analysis provides intriguing views on how the majority of users search, their search needs or motivations are ultimately neglected. User studies on image searching have attempted to understand users’ search contexts in terms of users’ background (e.g., knowledge, profession, motivation for search and task types) and the search outcomes (e.g., use of retrieved images, search performance). However, these studies typically focused on particular domains with a selective group of professional users. General users’ Web image searching contexts and behaviors are little understood although they represent the majority of online image searching activities nowadays. We argue that only by understanding Web image users’ contexts can the current Web search engines further improve their usefulness and provide more efficient searches. In order to understand users’ search contexts, a user study was conducted based on university students’ Web image searching in News, Travel, and commercial Product domains. The three search domains were deliberately chosen to reflect image users’ interests in people, time, event, location, and objects. We investigated participants’ Web image searching behavior, with the focus on query reformulation and search strategies. Participants’ search contexts such as their search background, motivation for search, and search outcomes were gathered by questionnaires. The searching activity was recorded with participants’ think aloud data for analyzing significant search patterns. The relationships between participants’ search contexts and corresponding search strategies were discovered by Grounded Theory approach. Our key findings include the following aspects: - Effects of users' interactive intents on query reformulation patterns and search strategies - Effects of task domain on task specificity and task difficulty, as well as on some specific searching behaviors - Effects of searching experience on result expansion strategies A contextual image searching model was constructed based on these findings. The model helped us understand Web image searching from user perspective, and introduced a context-aware searching paradigm for current retrieval systems. A query recommendation tool was also developed to demonstrate how users’ query reformulation contexts can potentially contribute to more efficient searching.

Influence of spatial variability of permeability property on steady state seepage flow and slope stability analysis

In recent years, spatial variability modeling of soil parameters using random field theory has gained distinct importance in geotechnical analysis. In the present Study, commercially available finite difference numerical code FLAC 5.0 is used for modeling the permeability parameter as spatially correlated log-normally distributed random variable and its influence on the steady state seepage flow and on the slope stability analysis are studied. Considering the case of a 5.0 m high cohesive-frictional soil slope of 30 degrees, a range of coefficients of variation (CoV%) from 60 to 90% in the permeability Values, and taking different values of correlation distance in the range of 0.5-15 m, parametric studies, using Monte Carlo simulations, are performed to study the following three aspects, i.e., (i) effect ostochastic soil permeability on the statistics of seepage flow in comparison to the analytic (Dupuit's) solution available for the uniformly constant permeability property; (ii) strain and deformation pattern, and (iii) stability of the given slope assessed in terms of factor of safety (FS). The results obtained in this study are useful to understand the role of permeability variations in slope stability analysis under different slope conditions and material properties. (C) 2009 Elsevier B.V. All rights reserved.

Image reconstruction by inhomogeneous diffusion for positron emission tomography

In positron emission tomography (PET), image reconstruction is a demanding problem. Since, PET image reconstruction is an ill-posed inverse problem, new methodologies need to be developed. Although previous studies show that incorporation of spatial and median priors improves the image quality, the image artifacts such as over-smoothing and streaking are evident in the reconstructed image. In this work, we use a simple, yet powerful technique to tackle the PET image reconstruction problem. Proposed technique is based on the integration of Bayesian approach with that of finite impulse response (FIR) filter. A FIR filter is designed whose coefficients are determined based on the surface diffusion model. The resulting reconstructed image is iteratively filtered and fed back to obtain the new estimate. Experiments are performed on a simulated PET system. The results show that the proposed approach is better than recently proposed MRP algorithm in terms of image quality and normalized mean square error.