Through wafer 3D Vertical Micro-Coaxial Probe for high frequency material characterization and millimeter wave packaging systems

This work presents the development of an in-plane vertical micro-coaxial probe using bulk micromachining technique for high frequency material characterization. The coaxial probe was fabricated in a silicon substrate by standard photolithography and a deep reactive ion etching (DRIE) technique. The through-hole structure in the form of a coaxial probe was etched and metalized with a diluted silver paste. A co-planar waveguide configuration was integrated with the design to characterize the probe. The electrical and RF characteristics of the coaxial probe were determined by simulating the probe design in Ansoft's High Frequency Structure Simulator (HFSS). The reflection coefficient and transducer gain performance of the probe was measured up to 65 GHz using a vector network analyzer (VNA). The probe demonstrated excellent results over a wide frequency band, indicating its ability to integrate with millimeter wave packaging systems as well as characterize unknown materials at high frequencies. The probe was then placed in contact with 3 materials where their unknown permittivities were determined. To accomplish this, the coaxial probe was placed in contact with the material under test and electromagnetic waves were directed to the surface using the VNA, where its reflection coefficient was then determined over a wide frequency band from dc-to -65GHz. Next, the permittivity of each material was deduced from its measured reflection coefficients using a cross ratio invariance coding technique. The permittivity results obtained when measuring the reflection coefficient data were compared to simulated permittivity results and agreed well. These results validate the use of the micro-coaxial probe to characterize the permittivity of unknown materials at high frequencies up to 65GHz.

Through Wafer 3D Vertical Micro-Coaxial Probe for High Frequency Material Characterization and Millimeter Wave Packaging Systems

This work presents the development of an in-plane vertical micro-coaxial probe using bulk micromachining technique for high frequency material characterization. The coaxial probe was fabricated in a silicon substrate by standard photolithography and a deep reactive ion etching (DRIE) technique. The through-hole structure in the form of a coaxial probe was etched and metalized with a diluted silver paste. A co-planar waveguide configuration was integrated with the design to characterize the probe. The electrical and RF characteristics of the coaxial probe were determined by simulating the probe design in Ansoft’s High Frequency Structure Simulator (HFSS). The reflection coefficient and transducer gain performance of the probe was measured up to 65 GHz using a vector network analyzer (VNA). The probe demonstrated excellent results over a wide frequency band, indicating its ability to integrate with millimeter wave packaging systems as well as characterize unknown materials at high frequencies. The probe was then placed in contact with 3 materials where their unknown permittivities were determined. To accomplish this, the coaxial probe was placed in contact with the material under test and electromagnetic waves were directed to the surface using the VNA, where its reflection coefficient was then determined over a wide frequency band from dc-to -65GHz. Next, the permittivity of each material was deduced from its measured reflection coefficients using a cross ratio invariance coding technique. The permittivity results obtained when measuring the reflection coefficient data were compared to simulated permittivity results and agreed well. These results validate the use of the micro-coaxial probe to characterize the permittivity of unknown materials at high frequencies up to 65GHz.

Multi-channel micro neural probe fabricated with SOI

Silicon-on-insulator (SOI) substrate is widely used in micro-electro-mechanical systems (MEMS). With the buried oxide layer of SOI acting as an etching stop, silicon based micro neural probe can be fabricated with improved uniformity and manufacturability. A seven-record-site neural probe was formed by inductive-coupled plasma (ICP) dry etching of an SOI substrate. The thickness of the probe is 15 mu m. The shaft of the probe has dimensions of 3 mmx100 mu mx15 mu m with typical area of the record site of 78.5 mu m(2). The impedance of the record site was measured in-vitro. The typical impedance characteristics of the record sites are around 2 M Omega at 1 kHz. The performance of the neural probe in-vivo was tested on anesthetic rat. The recorded neural spike was typically around 140 mu V. Spike from individual site could exceed 700 mu V. The average signal noise ratio was 7 or more.

Multi channel micro neural probe fabricated with SOI

Extracellular neural recording requires neural probes having more recording sites as well as limited volumes. With its mechanical characteristic and abundant process method, Silicon is a kind of material fit for producing neural probe. Silicon on insulator (SOI) is adopted in this paper to fabricate neural probes. The uniformity and manufacturability are improved. The fabricating process and testing results of a series of Multi channel micro neural probes were reported. The thickness of the probe is 15 mu m-30 mu m. The typical impedance characteristics of the record sites are around 2M Omega at 1k Hz. The performance of the neural probe in-vivo was tested on anesthetic rat. The recorded neural spike was typically around 140 mu V. Spike recorded from individual site could exceed 700 mu V. The average signal noise ratio was 7 or more.

General effective medium model for the complex permittivity extraction with an open-ended coaxial probe in presence of a multilayer material under test

The work presented in this thesis is focused on the open-ended coaxial-probe frequency-domain reflectometry technique for complex permittivity measurement at microwave frequencies of dispersive dielectric multilayer materials. An effective dielectric model is introduced and validated to extend the applicability of this technique to multilayer materials in on-line system context. In addition, the thesis presents: 1) a numerical study regarding the imperfectness of the contact at the probe-material interface, 2) a review of the available models and techniques, 3) a new classification of the extraction schemes with guidelines on how they can be used to improve the overall performance of the probe according to the problem requirements.

Coplanar Capacitively Coupled Probe Fed Microstrip Antennas for Wideband Applications

The design and analysis of a coplanar capacitive fed microstrip antenna suspended above the ground plane is presented. It is demonstrated that the proposed approach can be used for designing antennas with impedance bandwidth of about 50% and a good gain to operate in various microwave bands. The model of the antenna incorporates the capacitive feed strip which is fed by a coaxial probe using equivalent circuit approach, and matches simulation and experimental results. The capacitive feed strip used here is basically a rectangular microstrip capacitor formed from a truncated microstrip transmission line and all its open ends are represented by terminal or edge capacitances. The error analysis was carried out for validity of the model for different design parameters. The antenna configuration can be used where unidirectional radiation patterns are required over a wide bandwidth.

Concept design of a novel tactile probe tip for down scaled 3D CMMs

Although coordinate metrology has reached a very high state of development concerning versatility and accuracy for common engineering parts, a high precision capability with nano scale resolution and accuracy is often hard to achieve when it is required to measure very small parts and features. The limiting component is the bulky probing system of traditional CMMs (coordinate measuring machines). In order to satisfy increasing demand for highly accurate geometrical measurements on small parts and small structures, a new measuring probe of high sensitivity and small geometrical dimension with low contact forces needs to be developed. In this paper, a novel probing system, which combines a FBG (Fibre Bragg Grating) embedded optical fibre tactile probe with an optical sensing technique, has been proposed. With the sensor elements integrated into the probe tip directly, the system sensitivity can be increased significantly. A preliminary theoretical analysis of the sensitivity of the FBG fibre sensor under axial and lateral end point loading has been presented and the results show that this micro scale probe has great potential to realize a resolution of 1nanometer on geometrical measurement of small parts.

Development of a contact probe incorporating a bragg grating strain sensor for nano coordinate measuring machines

This paper presents a novel optical fibre based micro contact probe system with high sensitivity and repeatability. In this optical fibre probe with a fused spherical tip, a fibre Bragg grating has been utilized as a strain sensor in the probe stem. When the probe tip contacts the surface of the part, a strain will be induced along the probe stem and will produce a Bragg wavelength shift. The contact signal can be issued once the wavelength shift signal is produced and demodulated. With the fibre grating sensor element integrated into the probe directly, the probe system shows a high sensitivity. In this work, the strain distributions along the probe stem with the probe under axial and lateral load are analysed. A simulation of the strain distribution was performed using the finite element package ANSYS 11. Performance tests using a piezoelectric transducer stage with a displacement resolution of 1.5 nm yielded a measurement resolution of 60 nm under axial loading.

Behavior of bulk melt-textured YBCO single domains subjected to crossed magnetic fields

We have experimentally investigated the crossed magnetic field effects on bulk melt-processed YBCO single domains. The samples were first permanently magnetized along their c-axis and then subjected to several cycles of a transverse magnetic field parallel to the ab planes. The magnetic properties along the c and ab directions were simultaneously measured using a couple of orthogonal pick-up coils as well as a Hall probe placed against the sample surface. The effects of both sweep amplitude and polarity were investigated. Field sweeps of alternate polarities are shown to affect the decay of the c-axis magnetization much more strongly than field sweeps of unique polarity do. However, the c-axis magnetization does not show any saturation even after a large number of field sweeps. Next, a micro-Hall probe scanning system was used to measure the distribution of magnetic induction over the top surface of the single domain subjected to the same combination of magnetic fields. The results are shown to be consistent with those determined with the sensing coils and bring out the role played by geometric effects.

Compact Wideband Antenna for 2.4 GHz WLAN Applications

A novel compact wideband antenna for wireless local area network (WLAN) applications in the 2.4 GHz band are presented. The proposed low profile antenna of dimensions 15 x 14.5 x 1.6 mm offers 18.6% bandwidth and an average gain of~5 dBi. The antenna can be excited directly using a 50 coaxial probe

Compact Planar Multiband Antenna for GPS, DCS, 2.4/5.8 GHz WLAN Applications

A compact single –feed multiband planar antenna configuration Suitable for GPS, DCS. 2.4/5.8 GHz WLAN applications are presented. The antenna has dimensions 38 x 3 x 1.6 mm and offers good radiation and reflection characteristics in the above frequency bands. The antenna has a simple geometry and can be easily fed using a 50 coaxial probe

Compact Planar Multiband Antenna for GPS,DCS 2.4/5.8 GHz WLAN Applications

A compact single - feed muttiband planar antenna configuration suitable for GPS, DCS. 2.4/5.8 GHz WLAN applications is presented. The antenna has dimensions 38 x 3 x 1.6 mm and offers good radiation and reflection characteristics in the above frequency bands. The antenna has a simple geometry and can be easily fed using a 50 coaxial probe.

Compact Wideband Antenna for 2.4 GHz WLAN Applications

A novel compact wideband antenna for wireless local area network (WLAN) applications in the 2.4 GHz band is presented. The proposed low profile antenna of dimensions 15 x 14.5 x 1.6 mm offers 18.6% bandwidth and an average gain of -5 dBi. The antenna can be excited directly using a 50 coaxial probe

Uma nova proposta de antena planar multibanda para comunicações móveis

The great interest observed in wireless communication systems has required the development of new configurations of microstrip antennas, because they are easily built and integrated to other microwave circuit components, which is suitable for the construction and development of planar antenna arrays and microwave integrated circuits. This work presents a new configuration of tapered microstrip antenna, which is obtained by impressing U-slots on the conducting patch combined with a transmission line matching circuit that uses an inset length. It is shown that the use of U-slots in the microstrip antenna conducting patch excites new resonating modes, that gives a multiband characteristic for the slotted microstrip antenna, that is suitable for applications in communication systems that operates several frequencies simultaneously. Up to this date, the works reported in the literature deals with the use of Uslotted microstrip rectangular antennas fed by a coaxial probe. The properties of a linear array of microstrip patch tapered antennas are also investigated. The main parameters of the U slotted tapered microstrip antennas are investigated for different sizes and locations of the slots impressed on the conducting patch. The analysis of the proposed antenna is performed by using the resonant cavity and equivalent transmission line methods, in combination with a parametric study, that is conducted by the use of the Ansoft Designer, a commercial computer aided microwave software well known by its accuracy and efficiency. The mentioned methods are used to evaluate the effect in the antennas parameters, like resonant frequency and return loss, produced by variations of the antenna structural parameters, accomplished separately or simultaneously. An experimental investigation is also developed, that consists of the design, construction and measurement of several U slotted microstrip antenna prototypes. Finally, theoretical and simulated results are presented that are in agreement with the measured ones. These results are related to the resonating modes identification and to the determination of the main characteristics of the investigated antennas, such as resonant frequency, return loss, and radiation pattern

Análise ultrassonográfica qualitativa e quantitativa da deglutição orofaríngea

Coordenação de Aperfeiçoamento de Pessoal de Nível Superior (CAPES)