Multi channel micro neural probe fabricated with SOI
Data(s) |
2009
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Resumo |
Extracellular neural recording requires neural probes having more recording sites as well as limited volumes. With its mechanical characteristic and abundant process method, Silicon is a kind of material fit for producing neural probe. Silicon on insulator (SOI) is adopted in this paper to fabricate neural probes. The uniformity and manufacturability are improved. The fabricating process and testing results of a series of Multi channel micro neural probes were reported. The thickness of the probe is 15 mu m-30 mu m. The typical impedance characteristics of the record sites are around 2M Omega at 1k Hz. The performance of the neural probe in-vivo was tested on anesthetic rat. The recorded neural spike was typically around 140 mu V. Spike recorded from individual site could exceed 700 mu V. The average signal noise ratio was 7 or more. Extracellular neural recording requires neural probes having more recording sites as well as limited volumes. With its mechanical characteristic and abundant process method, Silicon is a kind of material fit for producing neural probe. Silicon on insulator (SOI) is adopted in this paper to fabricate neural probes. The uniformity and manufacturability are improved. The fabricating process and testing results of a series of Multi channel micro neural probes were reported. The thickness of the probe is 15 mu m-30 mu m. The typical impedance characteristics of the record sites are around 2M Omega at 1k Hz. The performance of the neural probe in-vivo was tested on anesthetic rat. The recorded neural spike was typically around 140 mu V. Spike recorded from individual site could exceed 700 mu V. The average signal noise ratio was 7 or more. zhangdi于2010-03-09批量导入 zhangdi于2010-03-09批量导入 ICME. [Wang, Shujing; Pei, Weihua; Guo, Kai; Gui, Qiang; Wang, Yu; Zhang, Xu; Tang, Jun; Chen, Hongda] Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China ICME. |
Identificador | |
Idioma(s) |
英语 |
Publicador |
IEEE 345 E 47TH ST, NEW YORK, NY 10017 USA |
Fonte |
Wang, SJ (Wang, Shujing); Pei, WH (Pei, Weihua); Guo, K (Guo, Kai); Gui, Q (Gui, Qiang); Wang, Y (Wang, Yu); Zhang, X (Zhang, Xu); Tang, J (Tang, Jun); Chen, HD (Chen, Hongda) .Multi channel micro neural probe fabricated with SOI .见:IEEE .2009 ICME INTERNATIONAL CONFERENCE ON COMPLEX MEDICAL ENGINEERING,345 E 47TH ST, NEW YORK, NY 10017 USA ,2009,161-164 |
Palavras-Chave | #人工智能 #MICROELECTRODE ARRAYS |
Tipo |
会议论文 |