Parametrically excited MEMS vibration energy harvesters with design approaches to overcome the initiation threshold amplitude

Resonant-based vibration harvesters have conventionally relied upon accessing the fundamental mode of directly excited resonance to maximize the conversion efficiency of mechanical-to-electrical power transduction. This paper explores the use of parametric resonance, which unlike the former, the resonant-induced amplitude growth, is not limited by linear damping and wherein can potentially offer higher and broader nonlinear peaks. A numerical model has been constructed to demonstrate the potential improvements over the convention. Despite the promising potential, a damping-dependent initiation threshold amplitude has to be attained prior to accessing this alternative resonant phenomenon. Design approaches have been explored to passively reduce this initiation threshold. Furthermore, three representative MEMS designs were fabricated with both 25 and 10 μm thick device silicon. The devices include electrostatic cantilever-based harvesters, with and without the additional design modification to overcome initiation threshold amplitude. The optimum performance was recorded for the 25 μm thick threshold-aided MEMS prototype with device volume ∼0.147 mm3. When driven at 4.2 ms -2, this prototype demonstrated a peak power output of 10.7 nW at the fundamental mode of resonance and 156 nW at the principal parametric resonance, as well as a 23-fold decrease in initiation threshold over the purely parametric prototype. An approximate doubling of the half-power bandwidth was also observed for the parametrically excited scenario. © 2013 IOP Publishing Ltd.

Frequency adjustable MEMS vibration energy harvester

Ambient mechanical vibrations offer an attractive solution for powering the wireless sensor nodes of the emerging "Internet-of-Things". However, the wide-ranging variability of the ambient vibration frequencies pose a significant challenge to the efficient transduction of vibration into usable electrical energy. This work reports the development of a MEMS electromagnetic vibration energy harvester where the resonance frequency of the oscillator can be adjusted or tuned to adapt to the ambient vibrational frequency. Micro-fabricated silicon spring and double layer planar micro-coils along with sintered NdFeB micro-magnets are used to construct the electromagnetic transduction mechanism. Furthermore, another NdFeB magnet is adjustably assembled to induce variable magnetic interaction with the transducing magnet, leading to significant change in the spring stiffness and resonance frequency. Finite element analysis and numerical simulations exhibit substantial frequency tuning range (25% of natural resonance frequency) by appropriate adjustment of the repulsive magnetic interaction between the tuning and transducing magnet pair. This demonstrated method of frequency adjustment or tuning have potential applications in other MEMS vibration energy harvesters and micromechanical oscillators.

Bistable Vibration Energy Harvesters: a review

Powering electronics without depending on batteries is an open research field. Mechanical vibrations prove to be a reliable energy source, but low-frequency broadband vibrations cannot be harvested effectively using linear oscillators. This article discusses an alternative for harvesting such vibrations, with energy harvesters with two stable configurations. The challenges related to nonlinear dynamics are briefly discussed. Different existing designs of bistable energy harvesters are presented and classified, according to their feasibility for miniaturization. A general dynamic model for those designs is described. Finally, an extensive discussion on quantitative measures of evaluating the effectiveness of energy harvesters is accomplished, resulting in the proposition of a new dimensionless metric suited for a broadband analysis.

Multi-frequency operation of a mems vibration energy harvester by accessing five orders of parametric resonance

The mechanical amplification effect of parametric resonance has the potential to outperform direct resonance by over an order of magnitude in terms of power output. However, the excitation must first overcome the damping-dependent initiation threshold amplitude prior to accessing this more profitable region. In addition to activating the principal (1st order) parametric resonance at twice the natural frequency ω0, higher orders of parametric resonance may be accessed when the excitation frequency is in the vicinity of 2ω0/n for integer n. Together with the passive design approaches previously developed to reduce the initiation threshold to access the principal parametric resonance, vacuum packaging (< 10 torr) is employed to further reduce the threshold and unveil the higher orders. A vacuum packaged MEMS electrostatic harvester (0.278 mm3) exhibited 4 and 5 parametric resonance peaks at room pressure and vacuum respectively when scanned up to 10 g. At 5.1 ms-2, a peak power output of 20.8 nW and 166 nW is recorded for direct and principal parametric resonance respectively at atmospheric pressure; while a peak power output of 60.9 nW and 324 nW is observed for the respective resonant peaks in vacuum. Additionally, unlike direct resonance, the operational frequency bandwidth of parametric resonance broadens with lower damping. © Published under licence by IOP Publishing Ltd.

Influence of combined fundamental potentials in a nonlinear vibration energy harvester

Ambient mechanical vibrations have emerged as a viable energy source for low-power wireless sensor nodes aiming the upcoming era of the ‘Internet of Things’. Recently, purposefully induced dynamical nonlinearities have been exploited to widen the frequency spectrum of vibration energy harvesters. Here we investigate some critical inconsistencies between the theoretical formulation and applications of the bistable Duffing nonlinearity in vibration energy harvesting. A novel nonlinear vibration energy harvesting device with the capability to switch amidst individually tunable bistable-quadratic, monostable-quartic and bistable-quartic potentials has been designed and characterized. Our study highlights the fundamentally different large deflection behaviors of the theoretical bistable-quartic Duffing oscillator and the experimentally adapted bistable-quadratic systems, and underlines their implications in the respective spectral responses. The results suggest enhanced performance in the bistable-quartic potential in comparison to others, primarily due to lower potential barrier and higher restoring forces facilitating large amplitude inter-well motion at relatively lower accelerations.

Directly and parametrically excited bi-stable vibration energy harvester for broadband operation

Despite many recent advances, the wide-spread adoption of vibrational energy harvesting has been limited by the low levels of generated output power and confined operational frequency band. Recent work by the authors on parametrically excited harvesters has demonstrated over an order of magnitude power improvement. This paper presents an investigation into the simultaneous employment of both direct and parametric resonance, as well as the incorporation of bi-stability, in an attempt to further improve the mechanical-to-electrical energy conversion efficiency by broadening the output power spectrum. Multiple direct and parametric resonant peaks from a multi-degree-of-freedom system were observed and an accumulative ∼10 Hz half-power bandwidth was recorded for the first 40 Hz. Real vibration data was also employed to analysis the rms power response effectiveness of the proposed system. © 2013 IEEE.

Parametric resonance for vibration energy harvesting with design techniques to passively reduce the initiation threshold amplitude

A vibration energy harvester designed to access parametric resonance can potentially outperform the conventional direct resonant approach in terms of power output achievable given the same drive acceleration. Although linear damping does not limit the resonant growth of parametric resonance, a damping dependent initiation threshold amplitude exists and limits its onset. Design approaches have been explored in this paper to passively overcome this limitation in order to practically realize and exploit the potential advantages. Two distinct design routes have been explored, namely an intrinsically lower threshold through a pendulum-lever configuration and amplification of base excitation fed into the parametric resonator through a cantilever-initial-spring configuration. Experimental results of the parametric resonant harvesters with these additional enabling designs demonstrated an initiation threshold up to an order of magnitude lower than otherwise, while attaining a much higher power peak than direct resonance. © 2014 IOP Publishing Ltd.

Wind-Induced Vibration Energy Harvesting Using Piezoelectric Transducers Coupled with Dynamic Magnification

Flexible cylindrical structures subjected to wind loading experience vibrations from periodic shedding of vortices in their wake. Vibrations become excessive when the natural frequencies of the cylinder coincide with the vortex shedding frequency. In this study, cylinder vibrations are transmitted to a beam inside the structure via dynamic magnifier system. This system amplifies the strain experienced by piezoelectric patches bonded to the beam to maximize the conversion from vibrational energy into electrical energy. Realworld applicability is tested using a wind tunnel to create vortex shedding and comparing the results to finite element modeling that shows the structural vibrational modes. A crucial part of this study is conditioning and storing the harvested energy, focusing on theoretical modeling, design parameter optimization, and experimental validation. The developed system is helpful in designing wind-induced energy harvesters to meet the necessity for novel energy resources.

Integrated CoPtP permanent magnets for MEMS electromagnetic energy harvesting applications

This work reports the development of integrated Co rich CoPtP hard magnetic material for MEMS applications such as Electromagnetic Vibration Energy Harvesting. We report a new method of electrodeposition compared to the conventional DC plating, involving a combination of forward and reverse pulses for optimized deposition of Co rich CoPtP hard magnetic material. This results in significant improvements in the microstructure of the developed films as the pulse reverse plated films are smooth, stress free and uniform. Such improvements in the structural properties are reflected in the hard magnetic properties of the material as well. The intrinsic coercivities of the pulse reverse deposited film are more than 6 times higher for both in-plane and out-of-plane measurement directions and the squareness of the hysteresis loops also improve due to the similar reasons.

Segmented Electrodes for Piezoelectric Energy Harvesters

This letter studies the impact of electrode segmentation on energy harvesting with piezoelectrics. For cases where the load can be distributed, it is concluded that segmentation of electrodes helps to improve energy content by minimizing surface currents. Using a ribbon of polyvinylidene fluoride under tension as an example, we show that using a six segmented electrode improves energy content by a factor of 2.5. Power delivery remains almost constant except for an anomalous increase when the number of segments is made large. Models are developed to predict improvements in energy content and power delivery.

Fabrication and Experimentation of a Cantilever Beam Based Piezoelectric Actuator and Sensor for Vibration Energy Harvesting

In the immediate surroundings of our daily life, we can find a lot of places where the energy in the form of vibration is being wasted. Therefore, we have enormous opportunities to utilize the same. Piezoelectric character of matter enables us to convert this mechanical vibration energy into electrical energy which can be stored and used to power other device, instead of being wasted. This work is done to realize both actuator and sensor in a cantilever beam based on piezoelectricity. The sensor part is called vibration energy harvester. The numerical analyses were performed for the cantilever beam using the commercial package ANSYS and MATLAB. The cantilever beam is realized by taking a plate and fixing its one end between two massive plates. Two PZT patches were glued to the beam on its two faces. Experiments were performed using data acquisition system (DAQ) and LABVIEW software for actuating and sensing the vibration of the cantilever beam.

Performance Enhancement of Piezoelectric Energy Harvesters Using Multilayer and Multistep Beam Configurations

Low-power requirements of contemporary sensing technology attract research on alternate power sources that can replace batteries. Energy harvesters absorb ambient energy and function as power sources for sensors and other low-power devices. Piezoelectric bimorphs have been demonstrating the preeminence in converting the mechanical energy in ambient vibrations into electrical energy. Improving the performance of these harvesters is pivotal as the energy in ambient vibrations is innately low. In this paper, we focus on enhancing the performance of piezoelectric harvesters through a multilayer and, in particular, a multistep configuration. Partial coverage of piezoelectric material in steps along the length of a cantilever beam results in a multistep piezoelectric energy harvester. We also discuss obtaining an approximate deformation curve for the beam with multiple steps in a computationally efficient manner. We find that the power generated by a multistep beam is almost 90% more than that by a multilayer harvester made out of the same volume of polyvinylidinefluoride ( PVDF), further corroborated experimentally. Improvements observed in the power generated prove to be a boon for weakly coupled low profile piezoelectric materials. Thus, in spite of the weak piezoelectric coupling observed in PVDF, its energy harvesting capability can be improved significantly using it in a multistep piezoelectric beam configuration.

A parametrically excited vibration energy harvester

In the arena of vibration energy harvesting, the key technical challenges continue to be low power density and narrow operational frequency bandwidth. While the convention has relied upon the activation of the fundamental mode of resonance through direct excitation, this article explores a new paradigm through the employment of parametric resonance. Unlike the former, oscillatory amplitude growth is not limited due to linear damping. Therefore, the power output can potentially build up to higher levels. Additionally, it is the onset of non-linearity that eventually limits parametric resonance; hence, this approach can also potentially broaden the operating frequency range. Theoretical prediction and numerical modelling have suggested an order higher in oscillatory amplitude growth. An experimental macro-sized electromagnetic prototype (practical volume of ∼1800 cm3) when driven into parametric resonance, has demonstrated around 50% increase in half power band and an order of magnitude higher peak power density normalised against input acceleration squared (293 μW cm-3 m-2 s4 with 171.5 mW at 0.57 m s-2) in contrast to the same prototype directly driven at fundamental resonance (36.5 μW cm-3 m-2 s4 with 27.75 mW at 0.65 m s-2). This figure suggests promising potentials while comparing with current state-of-the-art macro-sized counterparts, such as Perpetuum's PMG-17 (119 μW cm-3 m-2 s4). © The Author(s) 2013.