Extreme ultraviolet (EUV) degradation of poly(olefin sulfone)s : towards applications as EUV photoresists

Poly(olefin sulfone)s, formed by the reaction of sulfur dioxide (SO2) and an olefin, are known to be highly susceptible to degradation by radiation and thus have been identified as candidate materials for chain scission-based extreme ultraviolet lithography (EUVL) resist materials. In order to investigate this further, the synthesis and characterisation of two poly(olefin sulfone)s namely poly(1-pentene sulfone) (PPS) and poly(2-methyl-1-pentene sulfone) (PMPS), was achieved and the two materials were evaluated for possible chain scission EUVL resist applications. It was found that both materials possess high sensitivities to EUV photons; however; the rates of outgassing were extremely high. The only observed degradation products were found to be SO2 and the respective olefin suggesting that depolymerisation takes place under irradiation in a vacuum environment. In addition to depolymerisation, a concurrent conversion of SO2 moieties to a sulfide phase was observed using XPS.

Development of polymers for Non-CAR resists for EUV lithography

Three strategies for approaching the design and synthesis of non-chemically amplified resists (non-CARs) are presented. These are linear polycarbonates, star polyester-blk-poly(methyl methacrylate) and comb polymers with polysulfone backbones. The linear polycarbonates were designed to cleave when irradiated with 92 eV photons and high Tg alicyclic groups were incorporated into the backbone to increase Tg and etch resistance. The star block copolymers were designed to have a core that is sensitive to 92 eV photons and arms that have the potential to provide properties such as high Tg and etch resistance. Similarly the polysulfone comb polymers were designed to have an easily degradable polymer backbone and comb-arms that impart favorable physical properties. Initial patterning results are presented for a number of the systems.

用于光刻的EUV光源

对国际上普遍采用的两种EUV光源:放电等离子体源(DPP)和激光等离子体源(LPP)进行了多方面比较。给出了两种等离子体源各自优点及难以克服的困难。基于目前的测量结果,指出了ECR等离子体有潜力成为一种新型的极紫外辐射源。

高电离态Ti原子EUV光谱的实验研究

在中国原子能研究院HI-13串列加速器上用束-箔技术完成了80MeVTi离子和C箔相互作用产生的高电离态离子谱观测,与用激光等离子体技术的实验结果做了比较,大多数谱线与激光等离子体技术的实验结果有较好的符合,有3条谱线是未观测到的.这几条谱线为ⅩⅧ13·406,ⅩⅧ14·987,X17·439nm,属于2s2p24P3/2—2p32D3/2,2s2p21S0—2sp31P1,4p1P0—5d1P1跃迁.

Production of EUV power with SECRAL

The high power EUV source is one of key issues in the development of EUV lithography which is considered to be the most promising technology among the next generation lithography. However neither DPP nor LPP seems to meet the requirements of the commercial high-volume product. Insufficiency of DPP and LPP motivate the investigation of other means to produce the EUV radiation required in lithography. ECR plasma seems to be one of the alternatives. In order to investigate the feasibility of ECR plasma as a EUV light source, the EUV power emitted by SECRAL was measured. A EUV power of 1.03W in 4 pi sr solid angle was obtained when 2000W 18GHz rf power was launched, and the corresponding CE was 0.5%. Considering that SECRAL is designed to produce very high charge state ions, this very preliminary result is inspiring. Room-temperature ECR plasma and Sn plasma are both in the planned schedule.

Research on EUV spectra of highly ionized titanium

The spectrum of highly ionized titanium was studied by means of the beam-foil technique. Titanium ions were provided by the HI-13 tandem accelerator at China Institute of Atomic Energy. The experimental results are compared with those of laser-produced plasmas. Numerous lines attributed to Ti XVI to XVIII ransitions have been identified, and three of them were newly measured, which were attributed to 2s2p(24)P(3/2)-2p(32)D(3/2), 2s2p(21)S(0)-2sp(31)P(1) and 4p(1)P(0)-5d(1)P(1) transitions.

SiIX emission lines in spectra obtained with the Solar EUV Research Telescope and Spectrograph (SERTS)

Theoretical electron-density-sensitive emission line ratios involving 2s(2)2p(2)-2s2p(3) transitions in Si IX between 223 and 350 Angstrom are presented. A comparison of these with an extensive dataset of solar-active-region, quiet-Sun, subflare and off-limb observations, obtained during rocket flights by the Solar EUV Research Telescope and Spectrograph (SERTS), reveals generally very good agreement between theory and experiment. This provides support for the accuracy of the line- ratio diagnostics, and hence the atomic data on which they are based. In particular, the density-sensitive intensity ratio I (258.10 Angstrom)/ I (349.87 Angstrom) offers an especially promising diagnostic for studies of coronal plasmas, as it involves two reasonably strong emission lines and varies by more than an order of magnitude over the useful density range of 10(9)-10(11) cm(-3). The 2s(2)2p(2) S-1(0) - 2s2p(3) P-1(1) transition at 259.77 Angstrom is very marginally identified for the first time in the SERTS database, although it has previously been detected in solar flare observations.

Emission lines of Na-like ions in spectra obtained with the Solar EUV Research Telescope and Spectrograph (SERTS)

Theoretical emission-line ratios involving transitions in the 236-412 Angstrom wavelength range are presented for the Na-like ions Ar viii, Cr xiv, Mn xv, Fe xvi, Co xvii, Ni xviii and Zn xx. A comparison of these with an extensive data set of the solar active region, quiet-Sun, subflare and off-limb observations, obtained during rocket flights by the Solar EUV Research Telescope and Spectrograph (SERTS), reveals generally very good agreement between theory and experiment. This indicates that most of the Na-like ion lines are reliably detected in the SERTS observations, and hence may be employed with confidence in solar spectral analyses. However, the features in the SERTS spectra at 236.34 and 300.25 Angstrom, originally identified as the Ni xviii 3p (2) P-3/2 -3d (2) D- 3/2 and Cr xiv 3p (2) P-3/2 -3d (2) D-5/2 transitions, respectively, are found to be due to emission lines of Ar xiii (236.34 Angstrom) and possibly S v or Ni vi (300.25 Angstrom). The Co xvii 3s (2) S-3p (2) P-3/2 line at 312.55 Angstrom is always badly blended with an Fe xv feature at the same wavelength, but Mn xv 3s (2) S-3p (2) P-1/2 at 384.75 Angstrom may not always be as affected by second-order emission from Fe xii 192.37 Angstrom as previously thought. On the other hand, we find that the Zn xx 3s (2) S-3p (2) P-3/2 transition can sometimes make a significant contribution to the Zn xx/Fe xiii 256.43- Angstrom blend, and hence care must be taken when using this feature as an Fe xiii electron density diagnostic. A line in the SERTS-89 active region spectrum at 265.00 Angstrom has been re-assessed, and we confirm its identification as the Fe xvi 3p (2) P-3/2 -3d (2) D-3/2 transition.

S XI emission lines in active region spectra obtained with the Solar EUV Rocket Telescope and Spectrograph (SERTS)

Theoretical electron density sensitive emission line ratios involving a total of eleven 2s(2)2p(2)-2s2p(3) transitions in S XI between 187 and 292 Angstrom are presented. A comparison of these with solar active region observations obtained during rocket flights by the Solar EUV Rocket Telescope and Spectrograph (SERTS) reveals generally good agreement between theory and experiment. However, the 186.87 Angstrom line is masked by fairly strong Fe XII emission at the same wavelength, while 239.83 Angstrom is blended with an unknown feature, and 285.58 Angstrom is blended with possibly N IV 285.56 Angstrom. In addition, the 191.23 Angstrom line appears to be more seriously blended with an Fe XIII feature than previously believed. The presence of several new S XI lines is confirmed in the SERTS spectra, at wavelengths of 188.66, 247.14 and 291.59 Angstrom, in excellent agreement with laboratory measurements. In particular, the detection of the 2s(2)2p(2) P- 3(1) -2s2p(3) P-3(0,1) transitions at 242.91 Angstrom is the first time (to our knowledge) that this feature has been identified in the solar spectrum. The potential usefulness of the S XI line ratios as electron density diagnostics for the solar transition region and corona is briefly discussed.