Plasma parameter characterization of a reflex plasma source operating in oxygen

A reflex discharge plasma, obtained as a hybrid between a Penning discharge plasma (PDP) and a hollow-cathode discharge (HCD) plasma, is analysed as a possible direction-current, high-density plasma source. The experiment is run in oxygen at pressures of 10 mTorr and 1 mTorr, and for discharge currents of 100 to 200 mA. Although the gas pressure is considerably lower than those used in HCDs, the hollow-cathode effect (HCE) occurs for current levels higher than 100 mA and leads to plasma densities comparable with those obtained using inductive plasma sources. The presence of a constant magnetic field leads to the enhancement of electron emission from cathodes under ion bombardment, and to the decreasing of the ion loss by diffusion to the wall.

Role of low-energy electrons in Ar emission from low-pressure radio frequency discharge plasma

Optical emission spectra from a low-pressure Ar plasma were studied with high spatial resolution. It has been shown that the intensity ratios of Ar lines excited through metastable levels to those excited directly from the ground state are sensitive to the shape of electron energy distribution function. From these measurements, important information on the spatial variation of plasma parameters can be obtained. (C) 1999 American Institute of Physics. [S0003-6951(99)01629-0].

Sheath dynamics observed in a 13.56 MHz-driven plasma

We have established, through time correlated plasma emission and electrode and plasma potential measurements, that the near electrode emission observed in asymmetric capacitively coupled 13.56 MHz-driven hydrogen plasmas is caused by field reversal that leads to sheath collapse. Near-electrode emission has now been observed in Ar and He. The field reversal appears to be due to collision-induced electron drag. (C) 1997 American Institute of Physics.

Growth of SrS thin films by pulsed-laser deposition

High-quality luminescent thin films of strontium sulphide (SrS) with excellent stoichiometry have been grown by pulsed-laser deposition. The crystallinity, stoichiometry and cathodoluminescence (CL) have been investigated for the films deposited onto two differently coated glass substrates. Furthermore the importance of post-deposition annealing has been studied. SrS thin films grown at 450 degrees C onto glass substrates coated with tin-doped indium oxide show good crystallinity, with a preferred orientation along the (200) axis. Cerium-doped SrS (SrS:Ce) gives a strong blue CL output at 400 nm. Energy-dispersive X-ray spectroscopy shows that the films are stoichiometric and that the stoichiometry is controllable by varying deposition parameters.

Langmuir probe measurements of plasma parameters in the late stages of a laser ablated plume

A simple Langmuir probe technique has been used to measure the electron density, electron temperature, and plasma potential in the late stages (>5 mu s) of a laser ablated plasma plume. In the plasma, formed following 248 nm laser irradiation of a copper target, in vacuum at a laser fluence of 2.5 J cm(-2), electron densities of similar to 10(18) m(-3) and temperatures of similar to 0.5 eV were measured. These values are comparable with those reported previously using Faraday cup detectors and optical emission spectroscopy, respectively. (C) 1997 American Institute of Physics.

Comparison of plasma transport theory with measurements in a H- discharge

This paper and its companion paper describe the comparison between a one-dimensional theoretical model of a hydrogen discharge in a magnetic multipole plasma source and experimental measurements of the plasma parameters. The discharge chamber, described here, has been designed to produce significant densities of H- ions by incorporating a weak transverse field through the discharge to obtain electron cooling so as to maximize H- production. Langmuir probes are used to monitor the plasma, determining the ion density, the electron density and temperature and the plasma potential. The negative density is measured by photo-detachment of the extra electron using an intense laser beam. The model, described in the companion paper, uses the presented source geometry to calculate these plasma quantities as a function of the major are parameters; namely the are current and voltage and gas pressure. Good agreement is obtained between theory and experiment as a function of position and arc parameters.

TEMPORALLY AND SPATIALLY-RESOLVED PLASMA PARAMETERS AND EEDF MEASUREMENTS IN A LOW-FREQUENCY DISCHARGE

A time-resolved Langmuir probe technique is used to measure the dependence of the electron density, electron temperature, plasma potential and electron energy distribution function (EEDF) on the phase of the driving voltage in a RF driven parallel plate discharge. The measurements were made in a low-frequency (100-500 kHz), symmetrically driven, radio frequency discharge operating in H-2, D-2 and Ar at gas pressures of a few hundred millitorr. The EEDFs could not be represented by a single Maxwellian distribution and resembled the time averaged EEDFs reported in 13.56 MHz discharges. The measured parameters showed structure in their spatial and temporal dependence, generally consistent with a simple oscillating sheath model. Electron temperatures of less than 0.1 eV were measured during the phase of the RF cycle when both electrodes are negative with respect to the plasma.