Sheath dynamics observed in a 13.56 MHz-driven plasma
Data(s) |
1997
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Resumo |
We have established, through time correlated plasma emission and electrode and plasma potential measurements, that the near electrode emission observed in asymmetric capacitively coupled 13.56 MHz-driven hydrogen plasmas is caused by field reversal that leads to sheath collapse. Near-electrode emission has now been observed in Ar and He. The field reversal appears to be due to collision-induced electron drag. (C) 1997 American Institute of Physics. |
Identificador | |
Idioma(s) |
eng |
Direitos |
info:eu-repo/semantics/restrictedAccess |
Fonte |
Mahony , C M O , AlWazzan , R & Graham , B 1997 , ' Sheath dynamics observed in a 13.56 MHz-driven plasma ' Applied Physics Letters , vol 71 , pp. 608-610 . |
Tipo |
article |