Aberration measurement of projection optics in lithographic tools by use of an alternating phase-shifting mask

As a critical dimension shrinks, the degradation in image quality caused by wavefront aberrations of projection optics in lithographic tools becomes a serious problem. It is necessary to establish a technique for a fast and accurate in situ aberration measurement. We introduce what we believe to be a novel technique for characterizing the aberrations of projection optics by using an alternating phase-shifting mask. The even aberrations, such as spherical aberration and astigmatism, and the odd aberrations, such as coma, are extracted from focus shifts and image displacements of the phase-shifted pattern, respectively. The focus shifts and the image displacements are measured by a transmission image sensor. The simulation results show that, compared with the accuracy of the previous straightforward measurement technique, the accuracy of the coma measurement increases by more than 30% and the accuracy of the spherical-aberration measurement increases by approximately 20%. (c) 2006 Optical Society of America.

Use of Freely-Available Weebly in Creating Quick and Easy Web Pages: poster presentation

Weebly is a freely-available software for creating Web pages without having to know HTML. It is easy to use, with its drag and drop editor, and offers the ability to add documents, Web links, videos, slideshows, audio, forms, polls, etc. It is hosted by Weebly and has no limits on storage space. Many templates are available for Web page design. One can publish and update almost immediately. Combined with usage of the freely-available Google Analytics, for example, it is possible to gather usage statistics. The site can be password protected, if need be. Weebly for Education is a special version for teachers and schools.

Use of social networks and the Internet 2.0 in marketing management by SMEs

Nowadays, enterprises, and especially SMEs, are immersed in a very difficult economic situation. Therefore, they need new and innovative tools to compete in that environment. Integration of the internet 2.0 and social networks in marketing strategies of companies could be the key to success. If social networks are well managed, they can bring a lot to enterprise plans. Moreover, social networks are very attractive from an economic point of view as companies can find most of their customers on it.

Characterization of birefringence dispersion in polarization-maintaining fibers by use of white-light interferometry

A new method for measuring the birefringence dispersion in polarization-maintaining fibers (PMFs) with high sensitivity and accuracy is presented. The method employs white-light interferences between two orthogonally polarized modes of PMFs. The group birefringence of the fiber is calibrated first. Then the birefringence dispersion and its variation along different fiber sections are acquired by analyzing the broadening of interferograms at different fiber lengths. The main sources of error are investigated. Bireffingence dispersions of two PANDA fibers at their operation wavelength are measured to be 0.011 ps/(km nm) and 0.018 ps/(km nm). A measurement repeatability of 0.001 ps/(km nm) is achieved. (C) 2007 Optical Society of America.

A novel method for measuring the coma of a lithographic projection system by use of mirror-symmetry marks

A novel method for measuring the coma of a lithographic projection system is proposed and the principle of the method is described. By utilizing mirror-symmetry marks, the adverse effects of axial aberrations on the coma measurement are avoided. Experimental results demonstrated that the method has high accuracy. Compared with TAMIS, the conventional technique used for coma measurement, the method is more reliable because the influences of the process factors on the lateral displacements have been considered. (c) 2006 Elsevier Ltd. All rights reserved.

Coma measurement by use of an alternating phase-shifting mask mark with a specific phase width

The correlation between the coma sensitivity of the alternating phase-shifting mask (Alt-PSM) mark and the mark's structure is studied based on the Hopkins theory of partially coherent imaging and positive resist optical lithography (PROLITH) simulation. It is found that an optimized Alt-PSM mark with its phase width being two-thirds its pitch has a higher sensitivity to coma than Alt-PSM marks with the same pitch and the different phase widths. The pitch of the Alt-PSM mark is also optimized by PROLITH simulation, and the structure of p - 1.92 lambda/NA and pw = 2p/3 proves to be with the highest sensitivity. The optimized Alt-PSM mark is used as a measurement mark to retrieve coma aberration from the projection optics in lithographic tools. In comparison with an ordinary Alt-PSM mark with its phase width being a half its pitch, the measurement accuracies of Z(7) and Z(14) apparently increase. (C) 2009 Optical Society of America

Use of macroinvertebrate communities to detect environmental stress in running waters

This paper presents an account of some current uses of RIVPACS (River Invertebrate Prediction and Classification System), a software package developed by the Institute of Freshwater Ecology (UK). Background information is also given on the unique data-set on which the system is based. Before discussing RIVPACS, we consider the range of environmental stresses encountered in flowing-water systems and some of the ways in which stresses may affect macroinvertebrate communities. The wide application and relevance of the RIVPACS approach was recognised when it was chosen as the biological method for use throughout the UK in the 1990 River Quality Survey (RQS). In the concluding section we list some lessons learnt both from the 1990 survey and from our own testing exercise, and we outline current developments which will lead to a new version of RIVPACS for use in the 1995 RQS.