A Multi-scale Model for Copper Dishing in Chemical-Mechanical Polishing

The present success in the manufacture of multi-layer interconnects in ultra-large-scale integration is largely due to the acceptable planarization capabilities of the chemical-mechanical polishing (CMP) process. In the past decade, copper has emerged as the preferred interconnect material. The greatest challenge in Cu CMP at present is the control of wafer surface non-uniformity at various scales. As the size of a wafer has increased to 300 mm, the wafer-level non-uniformity has assumed critical importance. Moreover, the pattern geometry in each die has become quite complex due to a wide range of feature sizes and multi-level structures. Therefore, it is important to develop a non-uniformity model that integrates wafer-, die- and feature-level variations into a unified, multi-scale dielectric erosion and Cu dishing model. In this paper, a systematic way of characterizing and modeling dishing in the single-step Cu CMP process is presented. The possible causes of dishing at each scale are identified in terms of several geometric and process parameters. The feature-scale pressure calculation based on the step-height at each polishing stage is introduced. The dishing model is based on pad elastic deformation and the evolving pattern geometry, and is integrated with the wafer- and die-level variations. Experimental and analytical means of determining the model parameters are outlined and the model is validated by polishing experiments on patterned wafers. Finally, practical approaches for minimizing Cu dishing are suggested.

A Multi-scale Model for Copper Dishing in Chemical-Mechanical Polishing

The present success in the manufacture of multi-layer interconnects in ultra-large-scale integration is largely due to the acceptable planarization capabilities of the chemical-mechanical polishing (CMP) process. In the past decade, copper has emerged as the preferred interconnect material. The greatest challenge in Cu CMP at present is the control of wafer surface non-uniformity at various scales. As the size of a wafer has increased to 300 mm, the wafer-level non-uniformity has assumed critical importance. Moreover, the pattern geometry in each die has become quite complex due to a wide range of feature sizes and multi-level structures. Therefore, it is important to develop a non-uniformity model that integrates wafer-, die- and feature-level variations into a unified, multi-scale dielectric erosion and Cu dishing model. In this paper, a systematic way of characterizing and modeling dishing in the single-step Cu CMP process is presented. The possible causes of dishing at each scale are identified in terms of several geometric and process parameters. The feature-scale pressure calculation based on the step-height at each polishing stage is introduced. The dishing model is based on pad elastic deformation and the evolving pattern geometry, and is integrated with the wafer- and die-level variations. Experimental and analytical means of determining the model parameters are outlined and the model is validated by polishing experiments on patterned wafers. Finally, practical approaches for minimizing Cu dishing are suggested.

Multi-isotopic and compositional exploration of factors controlling nitrate pollution

In Catalonia, according to the nitrate directive (91/676/EU), nine areas have been declared as vulnerable to nitrate pollution from agricultural sources (Decret 283/1998 and Decret 479/2004). Five of these areas have been studied coupling hydro chemical data with a multi-isotopic approach (Vitòria et al. 2005, Otero et al. 2007, Puig et al. 2007), in an ongoing research project looking for an integrated application of classical hydrochemistry data, with a comprehensive isotopic characterisation (δ15N and δ18O of dissolved nitrate, δ34S and δ18O of dissolved sulphate, δ13C of dissolved inorganic carbon, and δD and δ18O of water). Within this general frame, the contribution presented explores compositional ways of: (i) distinguish agrochemicals and manure N pollution, (ii) quantify natural attenuation of nitrate (denitrification), and identify possible controlling factors. To achieve this two-fold goal, the following techniques have been used. Separate biplots of each suite of data show that each studied region has a distinct δ34S and pH signatures, but they are homogeneous with regard to NO3- related variables. Also, the geochemical variables were projected onto the compositional directions associated with the possible denitrification reactions in each region. The resulting balances can be plot together with some isotopes, to assess their likelihood of occurrence

Implementation of training programs in self-regulated learning strategies in Moodle format : Results of a experience in higher education

Resumen tomado de la publicaci??n

Partial disjoint path for multi-layer protection in GMPLS networks

In this paper, different recovery methods applied at different network layers and time scales are used in order to enhance the network reliability. Each layer deploys its own fault management methods. However, current recovery methods are applied to only a specific layer. New protection schemes, based on the proposed partial disjoint path algorithm, are defined in order to avoid protection duplications in a multi-layer scenario. The new protection schemes also encompass shared segment backup computation and shared risk link group identification. A complete set of experiments proves the efficiency of the proposed methods in relation with previous ones, in terms of resources used to protect the network, the failure recovery time and the request rejection ratio

Enhanced multi-layer protection in multi-service GMPLS networks

This paper focuses on QoS routing with protection in an MPLS network over an optical layer. In this multi-layer scenario each layer deploys its own fault management methods. A partially protected optical layer is proposed and the rest of the network is protected at the MPLS layer. New protection schemes that avoid protection duplications are proposed. Moreover, this paper also introduces a new traffic classification based on the level of reliability. The failure impact is evaluated in terms of recovery time depending on the traffic class. The proposed schemes also include a novel variation of minimum interference routing and shared segment backup computation. A complete set of experiments proves that the proposed schemes are more efficient as compared to the previous ones, in terms of resources used to protect the network, failure impact and the request rejection ratio

Studies about the atomic capabilities concept for linear control systems in physical multi-agent environments

This paper shows the impact of the atomic capabilities concept to include control-oriented knowledge of linear control systems in the decisions making structure of physical agents. These agents operate in a real environment managing physical objects (e.g. their physical bodies) in coordinated tasks. This approach is presented using an introspective reasoning approach and control theory based on the specific tasks of passing a ball and executing the offside manoeuvre between physical agents in the robotic soccer testbed. Experimental results and conclusions are presented, emphasising the advantages of our approach that improve the multi-agent performance in cooperative systems

Harvard Referencing Format

A LexDis guide to the Harvard Referencing style.

INFO2009 Cwk - Reference List - Word Format - by 'Legal Issues'

A list of references in word format

WAIS Seminar:Secure Multi-Party Computation for the Masses

Speaker(s): Prof. David Evans Organiser: Dr Tim Chown Time: 22/05/2014 10:45-11:45 Location: B53/4025 Abstract Secure multi-party computation enables two (or more) participants to reliably compute a function that depends on both of their inputs, without revealing those inputs to the other party or needing to trust any other party. It could enable two people who meet at a conference to learn who they known in common without revealing any of their other contacts, or allow a pharmaceutical company to determine the correct dosage of a medication based on a patient’s genome without compromising the privacy of the patient. A general solution to this problem has been known since Yao's pioneering work in the 1980s, but only recently has it become conceivable to use this approach in practice. Over the past few years, my research group has worked towards making secure computation practical for real applications. In this talk, I'll provide a brief introduction to secure computation protocols, describe the techniques we have developed to design scalable and efficient protocols, and share some recent results on improving efficiency and how secure computing applications are developed.

Redes multi-niveles de derechos humanos y defensa de los pueblos indígenas colombianos en escenarios “internacionalizados”

Este artículo busca analizar uno de los múltiples aspectos de la dimensión internacional de las movilizaciones indígenas: la forma como los procesos reivindicativos de las organizaciones indígenas colombianas se insertan en la dinámica global del lobbying internacional de las redes de derechos humanos ante Naciones Unidas. Para ello, nos centraremos en el análisis de la lógica de funcionamiento de los circuitos de derechos humanos en un universo social específico: el medio asociativo francés. Esto nos permitirá llevar a cabo la reconstrucción de algunos perfiles sociales de militantes y juristas que hacen las veces de intermediarios entre organizaciones colombianas y ONG europeas.-----This article seeks to analyze one of the multiple aspects of the international dimension of indigenous congregations: how the claim processes of the Colombian indigenous organizations fit into the global dynamics of international lobbying by human rights networks before the United Nations. For this purpose we shall focus our argument around analyzing the rationale of the way human rights circuits work in a specific social universe: the French associative media. This will allow us to undertake the reconstruction of some of the social profiles of militants and lawyers who act as intermediaries between Colombian organizations and European NGO's.

Pulsioximetría de pacientes en hemodiálisis, de la unidad de terapia renal – fundación cardioinfantil, análisis para establecer recomendaciones

Introducción. En Colombia, el 80% de los pacientes con enfermedad renal crónica en hemodiálisis tienen fístula arteriovenosa periférica (FAV) que asegura el flujo de sangre durante la hemodiálisis (1), la variabilidad en el flujo de sangre en el brazo de la FAV hacia la parte distal, puede afectar la lectura de la oximetría de pulso (SpO2) (2), llevando a la toma de decisiones equivocadas por el personal de salud. El objetivo de este estudio es aclarar si existe diferencia entre la SpO2 del brazo de la FAV y el brazo contralateral. Materiales y métodos. Se realizó un estudio de correlación entre los valores de SpO2 del brazo con FAV contra el brazo sin FAV, de 40 pacientes que asistieron a hemodiálisis. La recolección de los datos se llevó a cabo, con un formato que incluyó el resultado de la pulsioximetria y variables asociadas, antes, durante y después de la hemodiálisis. Se comparó la mediana de los deltas de las diferencias con pruebas estadísticas T Student – Mann Whitney, aceptando un valor significativo de p < 0,05. Resultados. No se encontraron diferencias estadísticamente significativas de la SpO2 entre el brazo con FAV y el brazo sin FAV, antes, durante y después de la diálisis, sin embargo si se apreció una correlación positiva estadísticamente significativa. Conclusiones. Se encontró correlación positiva estadísticamente significativa, donde no hubo diferencias en el resultado la pulsioximetría entre el brazo con FAV y brazo sin FAV, por lo tanto es válido tomar la pulsioximetría en cualquiera de los brazos.

Un nou format per al treball de recerca a batxillerat : el documental. 'Un nuevo formato para el trabajo de investigación en bachillerato : el documental'.

Resumen basado en el del autor

Sistemas de creencias ambientales : un análisis multi-muestra de estructuras factoriales.

resumen literal de la revista

FACSIMI : Fomento de Aprendizajes Cooperativos con Soporte Informático para la Multi-Interculturalidad.

El objetivo del proyecto es utilizar recursos informáticos para realizar experiencias que complementen, amplíen y enriquezcan las usuales del centro. Está destinado a todos los alumnos, pero se prioriza para los de altas capacidades, alumnos con necesidades educativas especiales asociadas a déficit psíquico y alumnos con necesidad de compensación educativa. Otros objetivos son favorecer la comunicación mediante el uso de elementos verbales, visuales, plásticos sonoros y gestuales; desarrollar la autonomía de los alumnos mediante la iniciación al uso de instrumentos tecnológicos de uso cotidiano; desarrollar la creatividad a partir de las posibilidades estéticas que ofrecen los medios tecnológicos; potenciar la colaboración y la planificación en grupo y el trabajo en equipo; identificar y plantear interrogantes a partir de la experiencia diaria utilizando recursos materiales y colaboraciones de personas del entorno escolar; ampliar la competencia curricular; buscar nuevas soluciones artísticas, científicas y técnicas; y mostrar actitudes de respeto, tolerancia y aceptación positiva de la diversidad. En cuanto a la metodología, las actividades son distintas según el tipo de alumnos a los que se dirigen. Se realiza el Rincón del ordenador en Educación Infantil, Internet para alumnos con altas capacidades, Acercamiento a otras culturas mediante Internet, y Uso de la informática en logopedia. En cuanto a los materiales, se elabora un archivo de las actividades realizadas por el alumnado.