Phase-step calibration technique based on a two-run-times-two-frame phase-shift method

A novel phase-step calibration technique is presented on the basis of a two-run-times-two-frame phase-shift method. First the symmetry factor M is defined to describe the distribution property of the distorted phase due to phase-shifter miscalibration; then the phase-step calibration technique, in which two sets of two interferograms with a straight fringe pattern are recorded and the phase step is obtained by calculating M of the wrapped phase map, is developed. With this technique, a good mirror is required, but no uniform illumination is needed and no complex mathematical operation is involved. This technique can be carried out in situ and is applicable to any phase shifter, whether linear or nonlinear. (c) 2006 Optical Society of America.

Geometrical effects on the resonance absorption of neutrons

An investigation was conducted to estimate the error when the flat-flux approximation is used to compute the resonance integral for a single absorber element embedded in a neutron source.

The investigation was initiated by assuming a parabolic flux distribution in computing the flux-averaged escape probability which occurs in the collision density equation. Furthermore, also assumed were both wide resonance and narrow resonance expressions for the resonance integral. The fact that this simple model demonstrated a decrease in the resonance integral motivated the more detailed investigation of the thesis.

An integral equation describing the collision density as a function of energy, position and angle is constructed and is subsequently specialized to the case of energy and spatial dependence. This equation is further simplified by expanding the spatial dependence in a series of Legendre polynomials (since a one-dimensional case is considered). In this form, the effects of slowing-down and flux depression may be accounted for to any degree of accuracy desired. The resulting integral equation for the energy dependence is thus solved numerically, considering the slowing down model and the infinite mass model as separate cases.

From the solution obtained by the above method, the error ascribable to the flat-flux approximation is obtained. In addition to this, the error introduced in the resonance integral in assuming no slowing down in the absorber is deduced. Results by Chernick for bismuth rods, and by Corngold for uranium slabs, are compared to the latter case, and these agree to within the approximations made.

基于光纤环形镜的偏振无关的掺镧锆钛酸铅电光开关

利用掺镧锆钛酸铅（PLZT）陶瓷二次电光效应结合光纤环形镜结构的优势构成偏振无关高速电光开关。采用琼斯矩阵方法分析了光纤环形镜的输出特性，给出了开关消光比同器件结构参量之间的关系。测量掺镧锆钛酸铅电光开关具有输入偏振无关特性，光开关消光比达到25dB，响应时间小于3μs。此外利用此开关装置测量获得了实验用掺镧锆钛酸铅陶瓷的克尔系数为k～1．1×10^-16m^2／V^2。理论分析和实验结果表明，利用环形镜结构稳定优势和掺镧锆钛酸铅优良的电光特性结合设计的高速光开关具有良好的应前景。本工作对掺镧锆钛酸铅电光

基于镜像焦面检测对准标记的套刻性能原位测量技术

套刻性能是现代高精度步进扫描投影光刻机的重要性能指标之一。提出了一种基于镜像焦面检测对准标记（简称“镜像焦面检测对准标记”）的光刻机套刻性能原位测量技术。该技术通过对曝光在硅片上的镜像焦面检测对准标记图形进行光学对准，利用标记图形对准位置与理想位置偏差实现套刻性能的原位检测。实验结果表明该技术在进行套刻误差的精确测量的同时还可以全面、定量地计算影响光刻机单机套刻误差的场内参量及场间参量。与目前套刻性能原位测量技术相比，该技术有效地避免了测量精度对轴向像质限制的依赖，简化了光刻机整机性能检测的过程。

Sociedade de Geografia do Rio de Janeiro : espelho das tradições progressistas (1910-1945)

Esta tese examina a trajetória da Sociedade de Geografia do Rio de Janeiro entre 1910 e 1945, quando foi extinta para dar lugar a uma outra instituição, de âmbito nacional, a Sociedade Brasileira de Geografia. Criada nos anos oitocentos, a associação foi um dos redutos culturais que desfrutaram do patrocínio do imperador D. Pedro II. Com o advento do regime republicano, a SGRJ sofreu contratempos políticos, mas continuou a desenvolver atividades e projetos pedagógicos, que buscavam descortinar o Brasil aos brasileiros, consoante o movimento nacionalista das primeiras décadas do século XX. Em 1930, a Sociedade mostrou -se favorável ao golpe de estado que alçou Getúlio Vargas ao poder. Durante a chamada era Vargas colaborou com o governo e foi integrada ao sistema geográfico oficial do IBGE. Além disso, foi pioneira n a promoção dos congressos brasileiros de geografia entre 1909 e 1940. A SGRJ desde a sua fundação até a sua extinção atuou como um lugar privilegiado para o debate e a reunião de estudiosos da matéria. Embora carecessem de sistematização e de continuidade, é inquestionável que as práticas científicas desenvolvidas pela SGRJ colaboraram para a formação do campo da disciplina.

大型干涉仪镜子的支承设计与温度变形分析

在星间激光通信中，涉及对大口径衍射极限激光波面的检测，为保证测量精度，必须严格控制波面十涉仪镜子的自重和温度变形。采用有限元方法对大型干涉仪镜子在不同支承方式下的表面变形进行了分析，结果表明，接触角为180°的钢带支承是较好的支承方式，反射镜表面变形峰-谷(P-V)值仅为1．35nm，均方根(RMS)值为0．363nm根据这一结论，设计了一个同定支承点与浮动支承相结合的超静定钢带支承结构。在该结构下，分析了镜子轴向、径向、周向的温度梯度效应，分析数据表明，镜子的热弹性变形远大于自重变形，建议采取一定的温控

An Optically recombined laser interferometer for gravitational wave detection

Kilometer scale interferometers for the detection of gravitational waves are currently under construction by the LIGO (Laser Interferometer Gravitational-wave Observatory) and VIRGO projects. These interferometers will consist of two Fabry-Perot cavities illuminated by a laser beam which is split in half by a beam splitter. A recycling mirror between the laser and the beam splitter will reflect the light returning from the beam splitter towards the laser back into the interferometer. The positions of the optical components in these interferometers must be controlled to a small fraction of a wavelength of the laser light. Schemes to extract signals necessary to control these optical components have been developed and demonstrated on the tabletop. In the large scale gravitational wave detectors the optical components must be suspended from vibration isolation platforms to achieve the necessary isolation from seismic motion. These suspended components present a new class of problems in controlling the interferometer, but also provide more exacting test of interferometer signal and noise models.

This thesis discusses the first operation of a suspended-mass Fabry-Perot-Michelson interferometer, in which signals carried by the optically recombined beams are used to detect and control all important mirror displacements. This interferometer uses an optical configuration and signal extraction scheme that is planned for the full scale LIGO interferometers with the simplification of the removal of the recycling mirror. A theoretical analysis of the performance that is expected from such an interferometer is presented and the experimental results are shown to be in generally good agreement.

一种新的光刻机像质参数热漂移检测技术

提出了一种新的光刻机像质参数热漂移原位检测技术（TDFM）。详细分析了该技术利用镜像测试标记检测投影物镜最佳焦面热漂移与放大倍率热漂移的基本原理。实验结果表明TDFM技术可同时实现最佳焦面热漂移（FFT）与放大倍率热漂移（MFT）的精确测量。与现有的放大倍率热漂移检测技术相比，该技术有效地解决了放大倍率热漂移技术中放大倍率热漂移受最佳焦面热漂移影响的问题，简化了光刻机像质参数前馈校正的测试过程，测试成本与耗时均减少50％。

一种基于PSD器件的改进型角度测量方法

提出一种基于平行平板干涉仪的改进型角度测量方法。为了实现较大的偏转角度测量，该平行平板干涉仪引入了一位置探测系统。平面反射镜的引入提高了角度测量的分辨率。实验验证了可在近3度的范围内实现被测偏转角度的高精度测量。并且作为一位相调制型干涉仪，其小角位移测量实验的重复精度可达5.5×10^(-8)rad。

Full-range parallel Fourier-domain optical coherence tomography using sinusoidal phase-modulating interferometry

We demonstrate a full-range parallel Fourier-domain optical coherence tomography (FD-OCT) in which a tomogram free of mirror images as well as DC and autocorrelation terms is obtained in parallel. The phase and amplitude of two-dimensional spectral interferograms are accurately detected by using sinusoidal phase-modulating interferometry and a two-dimensional CCD camera, which allows for the reconstruction of two-dimensional complex spectral interferograms. By line-by-line inverse Fourier transformation of the two-dimensional complex spectral interferogram, a full-range parallel FD-OCT is realized. Tomographic images of two separated glass coverslips obtained with our method are presented as a proof-of-principle experiment.

基于法布里-珀罗干涉仪的毫米波副载波光学产生方法

在光纤无线电系统(ROF)中，提出了一种利用法布里-珀罗干涉仪来实现将一个光学脉冲转换为毫米波频率调制的光学脉冲的方法。在这种方法中，毫米波调制的频率是由法布里-珀罗干涉仪的腔长来决定的，而脉冲序列振幅衰减和能量转移效率则是由法布里-珀罗干涉仪的腔镜反射率决定的。同时，文中对输出脉冲宽度的扩展所导致的脉冲间的干涉问题也进行了详细阐述。

正弦相位调制的频域光学相干层析成像

提出一种基于正弦相位调制的频域光学相干层析成像,利用正弦相位调制干涉术探测复频域干涉条纹的实部和虚部,重建复频域干涉条纹。对该复频域干涉条纹作逆傅里叶变换后,消除了频域光学相干层析成像中存在的复共轭镜像以及直流背景和自相干噪声。对玻璃片样品进行了层析成像实验。实验结果表明,采用正弦相位调制的频域光学相干层析成像,将可利用的成像深度范围扩大到原来的2倍,实现了全深度探测的频域光学相干层析成像。

基于双面反射镜的N×N光开关的特性分析和实验研究

报道了基于双面反射镜的N×N光开关器件。介绍了使用双面反射镜的2×2, 4×4光开关的集成光路设计和工作原理; 采用Benes网络, 以2×2和4×4光开关为基本单元的N×N光开关器件的整体结构, 并根据“一笔画”原理, 分析了4×4, 8×8和16×16光开关矩阵的可重排无阻塞特性和光开关矩阵的光路选择算法。最后, 基于2×2, 4×4光开关技术制备了16×16光开关矩阵。测试表明, 该器件具有良好的插入损耗、回波损耗、串扰和开关时间等性能, 从而验证了设计思想和工艺的可行性。在基于双面反射镜的光开关矩

平行平板角位移干涉测量仪的优化设计

提出一种可提高平行平板角位移干涉测量仪测量精度的优化设计方法。对角位移干涉测量系统进行了误差分析，讨论了影响角位移测量精度的主要因素。分析了在干涉仪光路中入射到平行平板上的初始入射角度、平行平板的折射率以及厚度等参数的选取对角位移测量精度的影响。结果表明，优化选取最佳的初始入射角度以及元件参数，并在干涉光路中附加引入一平面反射镜形成光程差放大系统，可实现的角位移测量精度达10-8 rad数量级。

一种测量光刻机工件台方镜不平度的新方法

提出一种新的步进扫描投影光刻机工件台方镜不平度测量方法。以方镜平移补偿量与旋转补偿量为测量目标,使用两个双频激光干涉仪分别测量工件台在x和y方向的位置和旋转量；将方镜不平度的测量按照一定的偏移量分成若干个序列,每一个序列包括对方镜有效区域的若干次往返测量；根据所有序列的测量结果计算出方镜的旋转补偿量；为每一个序列建立临时边界条件,并据此计算出每一序列所测得的方镜粗略平移补偿量；采用三次样条插值与最小二乘法建立每一个序列间的关系,以平滑连接所有测量序列得到精确的方镜平移补偿量。结果表明,该方法用于测量方镜平