平行平板角位移干涉测量仪的优化设计

提出一种可提高平行平板角位移干涉测量仪测量精度的优化设计方法。对角位移干涉测量系统进行了误差分析，讨论了影响角位移测量精度的主要因素。分析了在干涉仪光路中入射到平行平板上的初始入射角度、平行平板的折射率以及厚度等参数的选取对角位移测量精度的影响。结果表明，优化选取最佳的初始入射角度以及元件参数，并在干涉光路中附加引入一平面反射镜形成光程差放大系统，可实现的角位移测量精度达10-8 rad数量级。

An optimal design method of parallel plate interferometer is proposed in order to increase the measurement accuracy of angular displacement. The main factors determining the measurement accuracy are respectively discussed based on the analyses of the measurement error of angular displacement. It is noted that the initial angle of incidence on the plane-parallel plate, the index of refraction of the plane-parallel plate and its thickness all have great influences on the measurement accuracy. The research results show that the angular displacement measurement can be realized with higher accuracy by choosing optimal initial angle and component parameters as well as using of a reflecting mirror to amplify the optical path difference.