In situ surface topography measurement method of granite base in scanning wafer stage with laser interferometer

Topography of a granite surface has an effect on the vertical positioning of a wafer stage in a lithographic tool, when the wafer stage moves on the granite. The inaccurate measurement of the topography results in a bad leveling and focusing performance. In this paper, an in situ method to measure the topography of a granite surface with high accuracy is present. In this method, a high-order polynomial is set up to express the topography of the granite surface. Two double-frequency laser interferometers are used to measure the tilts of the wafer stage in the X- and Y-directions. From the sampling tilts information, the coefficients of the high-order polynomial can be obtained by a special algorithm. Experiment results shows that the measurement reproducibility of the method is better than 10 nm. (c) 2006 Elsevier GmbH. All rights reserved.

1. Ultrasonic studies of binary liquid structure in the critical region. Theory and experiment for the 2,6-lutidine/water system. 2. Hartree-Fock calculations of electric polarizabilities of some simple atoms and molecules, and their practicality. 3. Calculation of vibrational transition probabilities in collinear atom-diatom and diatom-diatom collisions with Lennard-Jones interaction

Part 1. Many interesting visual and mechanical phenomena occur in the critical region of fluids, both for the gas-liquid and liquid-liquid transitions. The precise thermodynamic and transport behavior here has some broad consequences for the molecular theory of liquids. Previous studies in this laboratory on a liquid-liquid critical mixture via ultrasonics supported a basically classical analysis of fluid behavior by M. Fixman (e. g., the free energy is assumed analytic in intensive variables in the thermodynamics)--at least when the fluid is not too close to critical. A breakdown in classical concepts is evidenced close to critical, in some well-defined ways. We have studied herein a liquid-liquid critical system of complementary nature (possessing a lower critical mixing or consolute temperature) to all previous mixtures, to look for new qualitative critical behavior. We did not find such new behavior in the ultrasonic absorption ascribable to the critical fluctuations, but we did find extra absorption due to chemical processes (yet these are related to the mixing behavior generating the lower consolute point). We rederived, corrected, and extended Fixman's analysis to interpret our experimental results in these more complex circumstances. The entire account of theory and experiment is prefaced by an extensive introduction recounting the general status of liquid state theory. The introduction provides a context for our present work, and also points out problems deserving attention. Interest in these problems was stimulated by this work but also by work in Part 3.

Part 2. Among variational theories of electronic structure, the Hartree-Fock theory has proved particularly valuable for a practical understanding of such properties as chemical binding, electric multipole moments, and X-ray scattering intensity. It also provides the most tractable method of calculating first-order properties under external or internal one-electron perturbations, either developed explicitly in orders of perturbation theory or in the fully self-consistent method. The accuracy and consistency of first-order properties are poorer than those of zero-order properties, but this is most often due to the use of explicit approximations in solving the perturbed equations, or to inadequacy of the variational basis in size or composition. We have calculated the electric polarizabilities of H₂, He, Li, Be, LiH, and N₂ by Hartree-Fock theory, using exact perturbation theory or the fully self-consistent method, as dictated by convenience. By careful studies on total basis set composition, we obtained good approximations to limiting Hartree-Fock values of polarizabilities with bases of reasonable size. The values for all species, and for each direction in the molecular cases, are within 8% of experiment, or of best theoretical values in the absence of the former. Our results support the use of unadorned Hartree-Pock theory for static polarizabilities needed in interpreting electron-molecule scattering data, collision-induced light scattering experiments, and other phenomena involving experimentally inaccessible polarizabilities.

Part 3. Numerical integration of the close-coupled scattering equations has been carried out to obtain vibrational transition probabilities for some models of the electronically adiabatic H₂-H₂ collision. All the models use a Lennard-Jones interaction potential between nearest atoms in the collision partners. We have analyzed the results for some insight into the vibrational excitation process in its dependence on the energy of collision, the nature of the vibrational binding potential, and other factors. We conclude also that replacement of earlier, simpler models of the interaction potential by the Lennard-Jones form adds very little realism for all the complication it introduces. A brief introduction precedes the presentation of our work and places it in the context of attempts to understand the collisional activation process in chemical reactions as well as some other chemical dynamics.

Estudo de fluxos numéricos para modelos magneto-hidrodinâmicos utilizando o código Flash

A teoria magneto-hidrodinâmicos permite a estruturação de modelos computacionais, designados modelos MHDs, que são uma extensão da dinâmica dos fluidos para lidar com fluidos eletricamente carregados, tais como os plasmas, em que se precisa considerar os efeitos de forças eletromagnéticas. Tais modelos são especialmente úteis quando o movimento exato de uma partícula não é de interesse, sendo que as equações descrevem as evoluções de quantidades macroscópicas. Várias formas de modelos MHD têm sido amplamente utilizadas na Física Espacial para descrever muitos tipos diferentes de fenômenos de plasma, tais como reconexão magnética e interações de ventos estelares com diferentes objetos celestiais. Neste trabalho, o objetivo é analisar o comportamento de diversos fluxos numéricos em uma discretização de volumes finitos de um modelo numérico de MHD usando um esquema de malha entrelaçada sem separação direcional considerando alguns casos testes. Para as simulações, utiliza-se o código Flash, desenvolvido pela Universidade de Chicago, por ser um código de amplo interesse nas simulações astrofísicas e de fenômenos no espaço próximo à Terra. A metodologia consiste na inclusão de um fluxo numérico, permitindo melhoria com respeito ao esquema HLL.

Eigenmodes of lined flow ducts with rigid splices

This paper presents an analytic expression for the acoustic eigenmodes of a cylindrical lined duct with rigid axially running splices in the presence of flow. The cylindrical duct is considered to be uniformly lined except for two symmetrically positioned axially running rigid liner splices. An exact analytic expression for the acoustic pressure eigenmodes is given in terms of an azimuthal Fourier sum, with the Fourier coefficients given by a recurrence relation. Since this expression is derived using a Greens function method, the completeness of the expansion is guaranteed. A numerical procedure is described for solving this recurrence relation, which is found to converge exponentially with respect to number of Fourier terms used and is in practice quick to compute; this is then used to give several numerical examples for both uniform and sheared mean flow. An asymptotic expression is derived to directly calculate the pressure eigenmodes for thin splices. This asymptotic expression is shown to be quantitatively accurate for ducts with very thin splices of less than 1 % unlined area and qualitatively helpful for thicker splices of the order of 6 % unlined area. A thin splice is in some cases shown to increase the damping of certain acoustic modes. The influences of thin splices and thin boundary layers are compared and found to be of comparable magnitude for the parameters considered. Trapped modes at the splices are also identified and investigated. © 2011 Cambridge University Press.

Deformation measurement of a human chest experiencing global motion

Current state-of-the-art techniques for determination of the change in volume of human chests, used in lung-function measurement, calculate the volume bounded by a reconstructed chest surface and its projection on to an approximately parallel static plane over a series of time instants. This method works well so long as the subject does not move globally relative to the reconstructed surface's co-ordinate system. In practice this means the subject has to be braced, which restricts the technique's use. We present here a method to compensate for global motion of the subject, allowing accurate measurement while free-standing, and also while undergoing intentional motion. © 2012 Springer-Verlag.

Fluid-structure interaction of three-dimensional magnetic artificial cilia

A numerical model is developed to analyse the interaction of artificial cilia with the surrounding fluid in a three-dimensional setting in the limit of vanishing fluid inertia forces. The cilia are modelled using finite shell elements and the fluid is modelled using a boundary element approach. The coupling between both models is performed by imposing no-slip boundary conditions on the surface of the cilia. The performance of the model is verified using various reference problems available in the literature. The model is used to simulate the fluid flow due to magnetically actuated artificial cilia. The results show that narrow and closely spaced cilia create the largest flow, that metachronal waves along the width of the cilia create a significant flow in the direction of the cilia width and that the recovery stroke in the case of the out-of-plane actuation of the cilia strongly depends on the cilia width. © 2012 Cambridge University Press.

Geometry and interaction of structures in homogeneous isotropic turbulence

A strategy to extract turbulence structures from direct numerical simulation (DNS) data is described along with a systematic analysis of geometry and spatial distribution of the educed structures. A DNS dataset of decaying homogeneous isotropic turbulence at Reynolds number Reλ = 141 is considered. A bandpass filtering procedure is shown to be effective in extracting enstrophy and dissipation structures with their smallest scales matching the filter width, L. The geometry of these educed structures is characterized and classified through the use of two non-dimensional quantities, planarity' and filamentarity', obtained using the Minkowski functionals. The planarity increases gradually by a small amount as L is decreased, and its narrow variation suggests a nearly circular cross-section for the educed structures. The filamentarity increases significantly as L decreases demonstrating that the educed structures become progressively more tubular. An analysis of the preferential alignment between the filtered strain and vorticity fields reveals that vortical structures of a given scale L are most likely to align with the largest extensional strain at a scale 3-5 times larger than L. This is consistent with the classical energy cascade picture, in which vortices of a given scale are stretched by and absorb energy from structures of a somewhat larger scale. The spatial distribution of the educed structures shows that the enstrophy structures at the 5η scale (where η is the Kolmogorov scale) are more concentrated near the ones that are 3-5 times larger, which gives further support to the classical picture. Finally, it is shown by analysing the volume fraction of the educed enstrophy structures that there is a tendency for them to cluster around a larger structure or clusters of larger structures. Copyright © 2012 Cambridge University Press.

Design methodology of HTS bulk machine for direct-driven wind generation

This paper introduces the design methodology of HTS bulk generator for direct-driven wind turbine. The trap field capability of HTS bulks offer the potential of maintaining similar or even higher magnetic loading level without the iron circuit in the generator. This so-called air-cored design can reduce the weight and increase the power outing per volume of the machine. The detailed design method of the air-cored HTS bulk machine is presented; 3D modeling is applied to consider the total trapped field of bulk arrays; a case study is performed to demonstrate the advantages of air-cored HTS bulk machine over conventional permanent magnet machine. Our results show that the air-cored HTS bulk machine has the potential to maintain the same magnetic loading level as that of the conventional permanent magnet machine. More importantly, it can reduce the total machine weight by 30%. © 2002-2011 IEEE.

On the transition from finite-volume negatively buoyant releases to continuous fountains

An experimental investigation to identify the source conditions that distinguish finite-volume negatively buoyant fluid projectile behaviour from fountain behaviour in quiescent environments of uniform density is described. Finite-volume releases are governed by their source Froude number Fr D and the aspect ratio L/D of the release, where L denotes the length of the column of fluid dispensed vertically from the nozzle of diameter D. We establish the influence of L/D on the peak rise heights of a release formed by dispensing saline solution into fresh water for 0of the initial rise height attained, as either finite-volume or continuous flux. The critical aspect ratio (L/D) f, for a given Fr D, which when exceeded no longer influenced release behaviour, led to the determination of Fr D, (L/D) f paired source conditions that give rise to solely Froude-number-dependent, i.e. fountain-like, behaviour. As such, we make the link between finite-volume releases and continuous fountains. The Fr D(L/D) f pairs led us directly to the classification of a Fr D, L/D space from which source conditions giving rise to either negatively buoyant projectiles or fountains may be readily identified. The variation of (L/D) f with Fr D corresponds closely to established fountain regimes of very weak, weak and forced fountains. Moreover, our results indicate that the formation or otherwise of a primary vortex, as fluid is ejected, has a profound influence on the length of the dispensed fluid column that is necessary to achieve rise heights equal to fountain rise heights. © 2012 Cambridge University Press.

The fluid mechanics of a two-dimensional Aaberg exhaust hood

In this paper a study of the air flow pattern created by a two-dimensional Aaberg exhaust hood local ventilation system is presented. A mathematical model of the flow, in terms of the stream function ψ, is derived analytically for both laminar and turbulent injections of fluid. Streamlines and lines of constant speed deduced from the model are examined for various values of the governing dimensionless operating parameter and predictions are given as to the area in front of the hood from which the air can be sampled. The effect of the injection of fluid on the centre-line velocity of the flow is examined and a comparison of the results with the available experimental data is given. © 1992.

Semi-implicit second order finite volume jet stream computations

Semi-implicit, second order temporal and spatial finite volume computations of the flow in a differentially heated rotating annulus are presented. For the regime considered, three cyclones and anticyclones separated by a relatively fast moving jet of fluid or "jet stream" are predicted. Two second order methods are compared with, first order spatial predictions, and experimental measurements. Velocity vector plots are used to illustrate the predicted flow structure. Computations made using second order central differences are shown to agree best with experimental measurements, and to be stable for integrations over long time periods (> 1000s). No periodic smoothing is required to prevent divergence.

Finite element analysis of compressor disc heat transfer using the transient conduction method with sparse boundary collocation points

Surface temperature measurements from two discs of a gas turbine compressor rig are used as boundary conditions for the transient conduction solution (inverse heat transfer analysis). The disc geometry is complex, and so the finite element method is used. There are often large radial temperature gradients on the discs, and the equations are therefore solved taking into account the dependence of thermal conductivity on temperature. The solution technique also makes use of a multigrid algorithm to reduce the solution time. This is particularly important since a large amount of data must be analyzed to obtain correlations of the heat transfer. The finite element grid is also used for a network analysis to calculate the radiant heat transfer in the cavity formed between the two compressor discs. The work discussed here proved particularly challenging as the disc temperatures were only measured at four different radial locations. Four methods of surface temperature interpolation are examined, together with their effect on the local heat fluxes. It is found that the choice of interpolation method depends on the available number of data points. Bessel interpolation gives the best results for four data points, whereas cubic splines are preferred when there are considerably more data points. The results from the analysis of the compressor rig data show that the heat transfer near the disc inner radius appears to be influenced by the central throughflow. However, for larger radii, the heat transfer from the discs and peripheral shroud is found to be consistent with that of a buoyancy-induced flow.