Method for measuring the lateral aberrations of a lithographic projection system with mirror-symmetric FOCAL marks

A novel method for measuring the imaging quality of a projection system with mirror-symmetric FOCAL marks is proposed, and the principle of the method is described. Through experiments, it is demonstrated that not only the axial aberrations but also the lateral aberrations can be measured with high accuracy by the method. The advantages of the method include obtaining more aberrations than the FOCAL technique and making it much simpler to perform a full-scale measurement of the imaging quality of a lithographic projection system. (C) 2006 Society of Photo-Optical Instrumentation Engineers.

Method for measuring the lateral aberrations of a lithographic projection system with mirror-symmetric FOCAL marks

A novel method for measuring the imaging quality of a projection system with mirror-symmetric FOCAL marks is proposed, and the principle of the method is described. Through experiments, it is demonstrated that not only the axial aberrations but also the lateral aberrations can be measured with high accuracy by the method. The advantages of the method include obtaining more aberrations than the FOCAL technique and making it much simpler to perform a full-scale measurement of the imaging quality of a lithographic projection system. (C) 2006 Society of Photo-Optical Instrumentation Engineers.

A novel method for measuring the coma of a lithographic projection system by use of mirror-symmetry marks

A novel method for measuring the coma of a lithographic projection system is proposed and the principle of the method is described. By utilizing mirror-symmetry marks, the adverse effects of axial aberrations on the coma measurement are avoided. Experimental results demonstrated that the method has high accuracy. Compared with TAMIS, the conventional technique used for coma measurement, the method is more reliable because the influences of the process factors on the lateral displacements have been considered. (c) 2006 Elsevier Ltd. All rights reserved.

Parallel plate interferometer with a reflecting mirror for measuring angular displacement

A parallel plate interferometer with a reflecting mirror for measuring angular displacement is proposed. A deflection angle of a beam caused by an angular displacement is amplified by use of a reflecting mirror to increase the optical path difference (OPD) in the plane-parallel plate, which provides high sensitivity of the phase measurement. Detection of light transmitted through the plane-parallel plate with a position sensitive detector (PSD) enables high accurate measurement of the initial angle of incidence to the plane-parallel plate with insensitivity to stray light. The improved parallel plate interferometer achieves a measurement repeatability of 10(-8) rad. (C) 2007 The Optical Society of Japan.

A metal-mirror-based reflecting polarizing beam splitter

We theoretically investigated the design of a metal-mirror-based reflecting polarizing beam splitter (RPBS). The metal mirror is a silver slab, which is embedded in the substrate of a rectangular silica transmission grating. By using a modal analysis and rigorous coupled-wave analysis, an RPBS grating is designed for operation at 1550 nm. When it is illuminated in Littrow mounting, the transverse electric (TE) and transverse magnetic (TM) waves will be mainly reflected in the minus-first and zeroth orders, respectively. Moreover, a wideband RPBS grating is obtained by adopting the simulated annealing algorithm. The RPBS gratings exhibit high diffraction efficiencies (similar to 95%) and high extinction ratios over a certain angle and wavelength range, especially for the minus-first-order reflection. This kind of RPBS should be useful in practical optical applications.

Silenced angels: an obscure Saint Theresa in George Eliots Middlemarch

A presente dissertação objetiva a comparação proposta no Prelúdio do romance Middlemarch por sua autora George Eliot entre a protagonista da obra, Dorothea Brooke, e a figura histórica Teresa dÁvila. A partir de tal estudo, busca-se compreender de que modo a situação específica da mulher na Era Vitoriana é articulada no romance de modo a espelhar a crise ontológica e epistemológica do próprio ser humano diante das transformações consolidadas com o Iluminismo e as revoluções liberais do século XVIII que culminariam na morte de Deus. Dorothea mostra-se uma cristã tão fervorosa quanto a Teresa quinhentista, mas faltam-lhe certezas e a resolução para concretizar as reformas sociais que defende, pois ela encarna o mito de feminilidade oitocentista batizado de Anjo do Lar ideal de sujeição feminina à ordem falocêntrica cujas funções são a proteção e difusão da moralidade burguesa e a substituição de elementos cristãos no universo do sagrado a uma sociedade cada vez mais materialista e insegura de valores absolutos. As aflições de Dorothea representam as aflições da mulher vitoriana, mas o momento crítico desta mulher reflete, em Middlemarch, uma crise muito maior do Ocidente, que teve início com a Era da Razão

The all-seeing mirror: reflecting on vampires as allegories in socio-culturally sensitive literary works

Esta dissertação tem como objetivo analisar a figura do vampiro na literatura como poderosa ferramenta de leitura e interpretação dos medos e angústias que afligem um determinado espaço sociocultural. Ao olhar para a evolução do vampiro literário através dos séculos dezenove, vinte e vinte e um, notamos que cada uma de suas encarnações difere dramaticamente da anterior, e no que o vampiro é reinventado, ele engaja-se num diálogo pertinente e coerente com questões de seu próprio tempo, nunca perdendo assim sua relevância. Sua existência heterogênea, explicitada na dissertação primariamente através das obras Carmilla, de Sheridan LeFanu, Dracula, de Bram Stoker, Eu Sou a Lenda, de Richard Matheson, Entrevista com o Vampiro, de Anne Rice e Fledgling, de Octavia Butler, e as diferentes questões suscitadas em cada uma dessas obras como a sexualidade, a alteridade e o hibridismo nos levarão ao entendimento de que o vampiro pode potencialmente desempenhar importante função alegórica, tornando-se um espelho da própria humanidade através da qual se sustenta

Christian Champagnat: in memoriam

CRO dedicated this issue to Christian Champagnat with the view of attesting his important role in the development of African fisheries oceanography.

A novel non-intrusive sampling technique for CO2 laser on-line beam monitoring utilising a silicon mirror

The measurement of high speed laser beam parameters during processing is a topic that has seen growing attention over the last few years as quality assurance places greater demand on the monitoring of the manufacturing process. The targets for any monitoring system is to be non-intrusive, low cost, simple to operate, high speed and capable of operation in process. A new ISO compliant system is presented based on the integration of an imaging plate and camera located behind a proprietary mirror sampling device. The general layout of the device is presented along with the thermal and optical performance of the sampling optic. Diagnostic performance of the system is compared with industry standard devices, demonstrating the high quality high speed data which has been generated using this system.

Newly designed multilayer thin film mirror for dispersion compensation in Ti:sapphire femtosecond lasers

There are two different effects to generate group delay dispersion by multilayer thin film mirrors: chirper effect and Gires-Tournois effect. Both effects are employed to introduce desired dispersion in the designed mirror. Thus the designed mirror provides large dispersion throughout broad waveband. Such mirror can be used for dispersion compensation in Ti:sapphire femtosecond lasers. Most group delay dispersion of a 5-mm Ti:sapphire crystal can be compensated perfectly with only four bounces of the designed mirror.

Laser conditioning of ZrO2 : Y2O3/SiO2 mirror coatings prepared by E-beam evaporation

Laser conditioning effects of the dielectric mirror coatings with different designs were investigated. Simple quarter-wave ZrO2:Y2O3/SiO2 mirrors and half-wave SiO2 over-coated ZrO2:Y2O3/SiO2 mirror coatings were fabricated by E-beam evaporation (EBE). The absorbance of the samples before and after laser conditioning was measured by surface thermal lensing (STL) technology and the defects density was detected under Nomarski microscope. The enhancement of the laser damage resistance was found after laser conditioning. The dependence of the laser conditioning on the coating design was also observed and the over-coated sample obtained greatest enhancement, whereas the absorbance of the samples did not change obviously. During the sub-threshold fluence raster scanning, the minor damage about defects size was found and the assumption of pre-damage mechanism, based on the functional damage concept, was put forward. The improvement of the laser induced damage threshold (LIDT) was attributed to the benign damage of the defects and the dependence on the coating design owed to the damage growth behavior of different coating designs. (C) 2004 Elsevier B.V. All rights reserved.

Far-field intensity distribution of a beam generated by a resonator with a phase-unifying mirror

The far-field intensity distribution (FFID) of a beam generated by a phase-unifying mirror resonator was investigated based on scalar diffraction theory. Attention was paid to the parameters, such as obscuration ratio and reflectivity of the phase-unifying mirror, that determine the FFID. All analyses were limited to the TEM00 fundamental mode. (c) 2005 Optical Society of America.

Far-field intensity distribution of beam generated by Gaussian mirror resonator

Based on scalar diffraction theory, we investigated far-field intensity distribution (FFID) of beam generated by Gaussian mirror resonator. We found usable analytical expressions of diffracted field with respect to variation of diffraction parameters. Particular attention was paid to the parameters such as mirror spot size and radius of the Gaussian mirror, which determine the FFID. All analyses were limited to TEM00 fundamental mode. (c) 2004 Elsevier B.V. All rights reserved.

Propagation properties of a hard-edged diffracted beam generated by a Gaussian mirror resonator

Based on the scalar diffraction theory, the propagation and focusing properties of a hard-edged diffracted beam generated by a Gaussian mirror resonator were investigated. Explicit expressions for the field distribution of the truncated beam that propagates through a paraxial optical ABCD system were derived in detail. Numerical examples are given to illustrate our analytical results. (c) 2006 Optical Society of America.