Nano-Hardness Tester and its Application in MEMS

微机电系统(MEMS)技术的迅速崛起,推动了对其所用材料和结构的力学性能研究。简要介绍纳米硬度技术的发展展、理论模型和MTS公司的Nano Indenter XP系统的配置、测量原理及功能。并根据我们的一些研究结果,说明它在微机电系统中的应用。

Depth dependence of nanohardness in a CuAlNi single crystal shape memory alloy

Instrumented nanoindentation was employed to study the depth dependence of nanohardness in a CuAlNi single crystal shape memory alloy that exhibits shape memory effect (SME). A Berkovich indenter and a cube comer indenter were used in this study, and the

Further analysis of indentation loading curves: Effects of tip rounding on mechanical property measurements

The effects of indenter tip rounding on the shape of indentation loading curves have been analyzed using dimensional and finite element analysis for conical indentation in elastic-perfectly plastic solids. A method for obtaining mechanical properties from indentation loading curves is then proposed. The validity of this method is examined using finite element analysis. Finally, the method is used to determine the yield strength of several materials for which the indentation loading curves are available in the literature.

Relationship Between Contact Stiffness, Contact Depth, and Mechanical Properties for Indentation in Linear Viscoelastic Solids Using Axisymmetric Indenters

We derive a relationship between the initial unloading slope, contact depth, and the instantaneous relaxation modulus for indentation in linear viscoelastic solids by a rigid indenter with an arbitrary axisymmetric smooth profile. Although the same expres

影响纳米压入测试结果的因素

纳米硬度计,又称深度测量压入仪.该仪器在刚性压针上施加特定载荷,同时记录压入试样深度.此技术广泛应用于微纳米尺度力学性能的研究.以MTS Nano Indenter○ RXP为测试手段,参考试样熔融硅为研究对象,进行了不同压入深度的测试.结果显示,硬度和模量有随压入深度减小而增大的趋势.分析了接触零点的确定、压针尖端缺陷、试样表面的吸湿和粗糙度、弹塑性转变等因素对测试结果的影响.在压入深度为微米和亚微米量级时,上述因素对测试结果无显著影响;而在纳米量级时,有显著影响.所以,当压入深度为几十纳米时,纳米压入测试结果的可靠性值得注意.

考虑压头曲率半径和应变梯度的微压痕分析

在压头尖端曲率半径取100nm的前提下,采用Chen和Wang的应变梯度理论,对微压痕实验进行了系统的数值分析.首先通过拟合载荷-位移实验曲线的后半段来确定材料的屈服应力和幂硬化指数值,然后用有限元方法数值模拟压痕实验,并将计算得到的整段载荷-位移曲线及硬度-位移曲线和实验结果进行了比较.结果表明应变梯度理论所预测的计算结果和实验结果很好地符合,包括压痕深度在亚微米和微米范围内的整段曲线.

Nonlinear Analysis of Oscillatory Indentation in Elastic and Viscoelastic Solids

Determining the mechanical properties at micro- and nanometer length scales using nanoindentation or atomic force microscopy is important to many areas of science and engineering. Here we establish equations for obtaining storage and loss modulus from oscillatory indentations by performing a nonlinear analysis of conical and spherical indentation in elastic and viscoelastic solids. We show that, when the conical indenter is driven by a sinusoidal force, the square of displacement is a sinusoidal function of time, not the displacement itself, which is commonly assumed. Similar conclusions hold for spherical indentations. Well-known difficulties associated with measuring contact area and correcting thermal drift may be circumvented using the newly derived equations. These results may help improve methods of using oscillatory indentation for determining elastic and viscoelastic properties of solids.

An Energy-Based Method for Analyzing Instrumented Spherical Indentation Experiments

Using dimensional analysis and finite element calculation, we studied spherical indentation in elastic-plastic solids with work hardening. We report two previously unknown relationships between hardness, reduced modulus, indentation depth, indenter radius, and work of indentation. These relationships, together with the relationship between initial unloading stiffness and reduced modulus, provide an energy-based method for determining contact area, reduced modulus, and hardness of materials from instrumented spherical indentation measurements. This method also provides a means for calibrating the effective radius of imperfectly shaped spherical indenters. Finally, the method is applied to the analysis of instrumented spherical indentation experiments on copper, aluminum, tungsten, and fused silica.

Analysis of indentation loading curves obtained using conical indenters

Using dimensional analysis and finite-element calculations we determine the functional form of indentation loading curves for a rigid conical indenter indenting into elastic-perfectly plastic solids. The new results are compared with the existing theories of indentation using conical indenters, including the slip-line theory for rigid-plastic solids, Sneddon's result for elastic solids, and Johnson's model for elastic-perfectly plastic solids. In the limit of small ratio of yield strength (Y) to Young's modulus (E), both the new results and Johnson's model approach that predicted by slip-line theory for rigid-plastic solids. In the limit of large Y/E, the new results agree with that for elastic solids. For a wide range of Y/E, some difference is found between Johnson's model-and the present result. This study also demonstrates the possibilities and limitations of using indentation loading curves to extract fundamental mechanical properties of solids.

A constitutive model for transversely isotropic foams, and its application to the indentation of balsa wood

An elastic-plastic constitutive model for transversely isotropic compressible solids (foams) has been developed. A quadratic yield surface with four parameters and one hardening function is proposed. Associated plastic flow is assumed and the yield surface evolves in a self-similar manner calibrated by the uniaxial compressive (or tensile) response of the cellular solid in the axial direction. All material constants in the model (elastic and plastic) can be determined from a combination of a total of four uniaxial and shear tests. The model is used to predict the indentation response of balsa wood to a conical indenter. For the three cone angles considered in this study, very good agreement is found between the experimental measurements and the finite element (FE) predictions of the transversely isotropic cellular solid model. On the other hand, an isotropic foam model is shown to be inadequate to capture the indentation response. © 2005 Elsevier Ltd. All rights reserved.

考虑压头尖端曲率的弹塑性材料硬度的解答形式

结合近年来发表的对金属材料采用球形压头的微压痕实验结果及Johnson对应原理，讨论了在传统弹塑性理论下锥形压头在计及压头顶端曲率半径影响时硬度的解答形式。进而得出结论：压头尖端曲率半径不是引起尺度效应的根源，相反，它全使尺度效应减弱。

A New Modified Expanding Cavity Model for Characterizing the Spherical Indentation Behaviour of Bulk Metallic Glass with Pile-up

Spherical nanoindentation tests were performed on Zr41.2Ti13.8Cu12.5Ni10Be22.5 bulk metallic glass and pile-ups were observed around the indenter. A new modified expanding cavity model was developed to characterize the indentation deformation behavior of strain-hardening and pressure-dependent materials. By using this model, the representative stress-strain response of this bulk metallic glass to hardness and indentation in the elastic-plastic regime were obtained taking into consideration the effect of pile-up.

Scaling, Dimensional Analysis, and Indentation Measurements

We provide an overview of the basic concepts of scaling and dimensional analysis, followed by a review of some of the recent work on applying these concepts to modeling instrumented indentation measurements. Specifically, we examine conical and pyramidal indentation in elastic-plastic solids with power-law work-hardening, in power-law creep solids, and in linear viscoelastic materials. We show that the scaling approach to indentation modeling provides new insights into several basic questions in instrumented indentation, including, what information is contained in the indentation load-displacement curves? How does hardness depend on the mechanical properties and indenter geometry? What are the factors determining piling-up and sinking-in of surface profiles around indents? Can stress-strain relationships be obtained from indentation load-displacement curves? How to measure time dependent mechanical properties from indentation? How to detect or confirm indentation size effects? The scaling approach also helps organize knowledge and provides a framework for bridging micro- and macroscales. We hope that this review will accomplish two purposes: (1) introducing the basic concepts of scaling and dimensional analysis to materials scientists and engineers, and (2) providing a better understanding of instrumented indentation measurements.

Size Dependent Nanoindentation of a Soft Film on a Hard Substrate

Nanoindentation experiments on Al/glass systems show that, as the indentation depth increases, the hardness decreases during a shallow indentation, and increases when the indenter tip approaches the film–substrate interface. We associate the rise in hardness during two stages with the strong strain gradient effects, the first stage is related with the small scale effects and the second stage with the strain gradient between the indenter and the hard substrate. Using the strain gradient theory proposed by Chen and Wang and the classical plasticity theory, the observed nanoindentation behavior is modeled and analyzed by means of the finite element method, and it is found that the classical plasticity cannot explain the experiment results but the strain gradient theory can describe the experiment data at both shallow and deep indentation depths very well. The results prove that both the strain gradient effects and substrate effects exist in the nanoindentation of the film–substrate system.

Measurement of Microscopic Deformation in a Cualni Single Crystal Alloy by Nanoindentation with a Heating Stage

Thermally induced recovery of nanoindents in a CUAINi single crystal shape memory alloy was studied by nanoindentation in conjunction with a heating stage. Nanoindents formed by a Berkovich indenter at room temperature were heated to 40, 70 and 100 degrees C. Partial recovery was observed for the nanoindents. The recovery ratio depended on the heating temperature. Indentation of CuAlNi can induce inelastic deformation via dislocation motion and a stress-induced matensitic transformation. The percentages of dislocation-induced plastic strain would affect the thermal deformation of CuAlNi, because the induced dislocations could stabilize stress-induced martensite plates even when the temperature above austenite finish temperature, A(f). When the applied indentation load is low (less than 10,000 mu N), the shape recovery strain is predominant, compared with the dislocation-induced plastic strain. Therefore, the degree of indent recovery in the depth direction, delta(D), is high (about 0.7-0.8 at 100 degrees C).