A Multi-scale Model for Copper Dishing in Chemical-Mechanical Polishing

The present success in the manufacture of multi-layer interconnects in ultra-large-scale integration is largely due to the acceptable planarization capabilities of the chemical-mechanical polishing (CMP) process. In the past decade, copper has emerged as the preferred interconnect material. The greatest challenge in Cu CMP at present is the control of wafer surface non-uniformity at various scales. As the size of a wafer has increased to 300 mm, the wafer-level non-uniformity has assumed critical importance. Moreover, the pattern geometry in each die has become quite complex due to a wide range of feature sizes and multi-level structures. Therefore, it is important to develop a non-uniformity model that integrates wafer-, die- and feature-level variations into a unified, multi-scale dielectric erosion and Cu dishing model. In this paper, a systematic way of characterizing and modeling dishing in the single-step Cu CMP process is presented. The possible causes of dishing at each scale are identified in terms of several geometric and process parameters. The feature-scale pressure calculation based on the step-height at each polishing stage is introduced. The dishing model is based on pad elastic deformation and the evolving pattern geometry, and is integrated with the wafer- and die-level variations. Experimental and analytical means of determining the model parameters are outlined and the model is validated by polishing experiments on patterned wafers. Finally, practical approaches for minimizing Cu dishing are suggested.

A Multi-scale Model for Copper Dishing in Chemical-Mechanical Polishing

The present success in the manufacture of multi-layer interconnects in ultra-large-scale integration is largely due to the acceptable planarization capabilities of the chemical-mechanical polishing (CMP) process. In the past decade, copper has emerged as the preferred interconnect material. The greatest challenge in Cu CMP at present is the control of wafer surface non-uniformity at various scales. As the size of a wafer has increased to 300 mm, the wafer-level non-uniformity has assumed critical importance. Moreover, the pattern geometry in each die has become quite complex due to a wide range of feature sizes and multi-level structures. Therefore, it is important to develop a non-uniformity model that integrates wafer-, die- and feature-level variations into a unified, multi-scale dielectric erosion and Cu dishing model. In this paper, a systematic way of characterizing and modeling dishing in the single-step Cu CMP process is presented. The possible causes of dishing at each scale are identified in terms of several geometric and process parameters. The feature-scale pressure calculation based on the step-height at each polishing stage is introduced. The dishing model is based on pad elastic deformation and the evolving pattern geometry, and is integrated with the wafer- and die-level variations. Experimental and analytical means of determining the model parameters are outlined and the model is validated by polishing experiments on patterned wafers. Finally, practical approaches for minimizing Cu dishing are suggested.

Biomax : un caso de liderazgo y crecimiento exitoso

En este documento se escribe el caso de Biomax, se hace un análisis de la regulación del sector de distribución de combustibles en Colombia, de Hacinamiento Cuantitativo, de erosión estratégica y de la productividad. También se hace una aproximación a la identificación de los comportamientos asociados al liderazgo transformacional y/o transaccional en la conducta del presidente de la compañía. Se presenta una reseña de la historia de la compañía y su modelo de negocio. Finalmente se encuentra que hay una inclinación en el presidente de la compañía hacia un estilo de liderazgo transformacional que puede estar relacionado con los logros que la compañía ha alcanzado en un corto periodo.

Estudi sobre l'habitatge a la demarcació de Girona: habitatges principals, segones residències i apartaments turístics

Aquesta tesi doctoral estudia diferents aspectes sobre els habitatges a la província de Girona, combinant l'anàlisi sobre l'evolució històrica dels habitatges, el fenomen de les segones residències i el mercat d'apartaments turístics. El paper de la població és el principal motor del creixement dels habitatges durant el segle XX. Tot i així, durant la segona meitat, el pes dels habitatges secundaris en zones turístiques com Costa Brava i municipis de muntanya han tingut el seu paper significatiu. Altres factors determinants en els darrers anys han estat la immigració i la disminució del tamany de les llars. Les segones residències a Girona s'ubiquen en gran part a la Costa Brava (al voltant del 75% del total a la província). S'observa un fenomen d'expansió en forma de "taca d'oli" des de la Costa Brava cap a l'interior i des de la Cerdanya cap a zones més orientals. Dins el mercat d'apartaments turístics, una sèrie de regressions hedòniques han posat de manifest les variables que més influeixen sobre el preu final del lloguer de l'habitatge turístic com el nombre d'habitacions, el tipus d'allotjament, la distància sobre la platja, el municipi d'ubicació i la temporada turística. Respecte als hotels (el mateix exercici) com a bé substitutiu destaquen les mateixes variables excepte la piscina (menys valorat) i el pàrking (més valorat).

Developing a desertification indicator system for a small Mediterranean catchment: a case study from the Serra de Rodes, Alt Empordà, Catalunya, NE Spain

La desertificació és un problema de degradació de sòls de gran importància en regions àrides, semi-àrides i sub-humides, amb serioses conseqüències ambientals, socials i econòmiques com a resultat de l'impacte d'activitats humanes en combinació amb condicions físiques i medi ambientals desfavorables (UNEP, 1994). L'objectiu principal d'aquesta tesi va ser el desenvolupament d'una metodologia simple per tal de poder avaluar de forma precisa l'estat i l'evolució de la desertificació a escala local, a través de la creació d'un model anomenat sistema d'indicators de desertificació (DIS). En aquest mateix context, un dels dos objectius específics d'aquesta recerca es va centrar en l'estudi dels factors més importants de degradació de sòls a escala de parcel.la, comportant un extens treball de camp, analisi de laboratori i la corresponent interpretació i discussió dels resultats obtinguts. El segon objectiu específic es va basar en el desenvolupament i aplicació del DIS. L'àrea d'estudi seleccionada va ser la conca de la Serra de Rodes, un ambient típic Mediterràni inclòs en el Parc Natural del Cap de Creus, NE Espanya, el qual ha estat progressivament abandonat pels agricultors durant el segle passat. Actualment, els incendis forestals així com el canvi d'ús del sòl i especialment l'abandonament de terres són considerats els problemes ambientals més importants a l'àrea d'estudi (Dunjó et al., 2003). En primer lloc, es va realitzar l'estudi dels processos i causes de la degradació dels sòls a l'àrea d'interés. En base a aquest coneixement, es va dur a terme la identificació i selecció dels indicadors de desertificació més rellevants. Finalment, els indicadors de desertificació seleccionats a escala de conca, incloent l'erosió del sòl i l'escolament superficial, es van integrar en un model espaial de procés. Ja que el sòl és considerat el principal indicador dels processos d'erosió, segons la FAO/UNEP/UNESCO (1979), tant el paisatge original així com els dos escenaris d'ús del sòl desenvolupats, un centrat en el cas hipotétic del pas d'un incendi forestal, i l'altre un paisatge completament cultivat, poden ser ambients classificats sota baixa o moderada degradació. En comparació amb l'escenari original, els dos escenaris creats van revelar uns valors més elevats d'erosió i escolament superficial, i en particular l'escenari cultivat. Per tant, aquests dos hipotètic escenaris no semblen ser una alternativa sostenible vàlida als processos de degradació que es donen a l'àrea d'estudi. No obstant, un ampli ventall d'escenaris alternatius poden ser desenvolupats amb el DIS, tinguent en compte les polítiques d'especial interés per la regió de manera que puguin contribuir a determinar les conseqüències potencials de desertificació derivades d'aquestes polítiques aplicades en aquest escenari tan complexe espaialment. En conclusió, el model desenvolupat sembla ser un sistema força acurat per la identificació de riscs presents i futurs, així com per programar efectivament mesures per combatre la desertificació a escala de conca. No obstant, aquesta primera versió del model presenta varies limitacions i la necessitat de realitzar més recerca en cas de voler desenvolupar una versió futura i millor del DIS.

Dinámicas sociales y étnicas de desestructuración y recomposición en Cuenca colonial (Debate: perspectivas sobre El Mosaico Indígena de Jaques Poloni-Simard)

Presentación del libro 'El mosaico indígena' (Quito, Abya-Yala 2006) desarrollada en la Universidad Andina Simón Bolívar, Sede Ecuador, el 11 de abril de 2006.

Piping Plover response to coastal storms occurring during the nonbreeding season

The increase in coastal storm frequency and intensity expected under most climate change scenarios is likely to substantially modify beach configuration and associated habitats. This study aimed to analyze the impact of coastal storms on a nesting population of the endangered Piping Plover (Charadrius melodus melodus) in southeastern New Brunswick, Canada. Previous studies have shown that numbers of nesting Piping Plovers may increase following storms that create new nesting habitat at individual beaches. However, to our knowledge, no test of this pattern has been conducted over a regional scale. We hypothesized that Piping Plover abundance would increase after large coastal storms occurring during the nonbreeding season. However, we expected a delay in the colonization of newly created habitat owing to low-density populations, combined with high site fidelity of adults and high variability in survival rate of subadults. We tested this hypothesis using a 27-year (1986-2012) data set of Piping Plover abundance and productivity (nesting pairs and fledged young) collected at five sites in eastern New Brunswick. We identified 11 major storms that could potentially have modified Piping Plover habitat over the study period. The number of fledged young increased three years after a major storm, but the relationship was much weaker for the number of nesting pairs. These findings are consistent with the hypothesized increase in suitable habitat after coastal storms. Including storm occurrence with other factors influencing habitat quality will enhance Piping Plover conservation strategies.

Assessment of soil particle redistribution on two contrasting cultivated hillslopes

The particle size distributions of surface soils from two cultivated silty fields (Moorfield and Railway South) in Herefordshire, UK, were assessed by sampling on 20-m grids across the fields. Moorfield (8 ha) had a uniform landscape sloping mainly in a North-South direction while Railway South (12 ha) had complex undulating landscape characteristics. Samples from 3 surficial layers were also taken at 3 landscape positions at Moorfield to investigate recent (within-season) soil particle redistribution. Size fractions were determined using chemical dispersion, wet sieving (to separate the sand fractions) and laser gramilometry (for the finer fractions). The distribution of various fractions and the relationships between elevation and the various fractions suggest preferential detachment and movement of coarse to very coarse silt fractions (16-63 mu m), which were found mostly at downslope or depositional areas. Upper slope samples had higher clay to fine silt (< 16 mu m) contents than bottom slope samples. The upslope-downslope patterns of size fractions, particularly on uniformly sloping areas, of the 2 fields were similar and their deposited sediments were dominated by coarse silt fractions. Samples from 3 landscape positions at Moorfield became coarser from the less eroded summit, through the eroding side-slope to the bottom-slope depositional area. Within each of these landscape positions the top 0-2.5 cm layers were more enriched in coarse silt fractions than the bottom layers. The spatial patterns of soil particle size distributions in the 2 fields may be a result of sediment detachment and deposition caused by water erosion and tillage operations. (c) 2005 Elsevier B.V. All rights reserved.

An ichnofabric approach to the depositional interpretation of the intensely burrowed Bateig Limestone, Miocene, SE Spain

The foraminiferal-rich pelagic Bateig Limestone forms several varieties of the important building stones quarried at Bateig Hill in southeastern Spain. Three principal ichnofabrics (Bichordites, mottled-Palaeophycus and mottled-Ophiomorpha) are recognized, which are present in at least two (possibly up to four) repeated successions (cycles). Each succession begins with an erosional event. The Bichordites ichnofabric represents a new type of facies, formed as thin turbidity/grain flow, stratiform units derived from sediment slips off a fault into deep water. Each slipped unit became almost completely bioturbated by infaunal echinoids, colonizing by lateral migration. Because of the thinness of the units, successive colonizations tended to truncate the underlying burrows giving rise to a pseudo-stratification. As the Bichordites ichnofabric accumulated on the fault apron, thus reducing the effective height of the fault scarp, the substrate gradually came under the influence of currents traversing the shelf. This led to a change in hydraulic regime, and to the mottled-Palaeophycus and mottled-Ophiomorpha ichnofabrics in sediment deposited under bed load transport, and associated with laminar and cross-stratified beds and local muddy intervals. Reactivation of the fault triggered erosion and channeling and a return to grain flow sedimentation, and to the Bichordites ichnofabric of the succeeding cycle. The highest unit of the Bateig Limestone is formed entirely of cross-stratified calcarenites with occasional Ophiomorpha (Ophiomorpha-primary lamination ichnofabric) and is similar to many shallow marine facies but they still bear a significant content of pelagic foraminifera. The sedimentary setting bears resemblance with that described for the Pleistocene Monte Torre Paleostrait and the modem Strait of Messina (Italy), where the narrow morphology of the depositional area enhanced tidal currents and allowed for high-energy sandy deposition in relatively deep areas. More data on the Miocene paleogeography of the Bateig area should provide further testing for this hypothesis. The ichnofacies and stacking of the Bateig Limestone differ from the classic Seilacherian model in that they reflect changes in hydraulic process and are associated with faulting and subsidence and changes in sediment supply. Recognition of the unusual ichnofabrics and their relationships provides a clear indication of the overall dynamic setting. (c) 2006 Elsevier B.V. All rights reserved.

Estimating detailed soil water profile records from point measurements

Temporal and spatial patterns of soil water content affect many soil processes including evaporation, infiltration, ground water recharge, erosion and vegetation distribution. This paper describes the analysis of a soil moisture dataset comprising a combination of continuous time series of measurements at a few depths and locations, and occasional roving measurements at a large number of depths and locations. The objectives of the paper are: (i) to develop a technique for combining continuous measurements of soil water contents at a limited number of depths within a soil profile with occasional measurements at a large number of depths, to enable accurate estimation of the soil moisture vertical pattern and the integrated profile water content; and (ii) to estimate time series of soil moisture content at locations where there are just occasional soil water measurements available and some continuous records from nearby locations. The vertical interpolation technique presented here can strongly reduce errors in the estimation of profile soil water and its changes with time. On the other hand, the temporal interpolation technique is tested for different sampling strategies in space and time, and the errors generated in each case are compared.

Pleistocene geochronologies for fluvial sedimentary sequences: an archaeologist's perspective

Current models of Pleistocene fluvial system development and dynamics are assessed from the perspective of European Lower and Middle Palaeolithic stone tool assemblages recovered from fluvial secondary contexts. Fluvial activity is reviewed both in terms of Milankovitch-scale processes across the glacial/interglacial cycles of the Middle and Late Pleistocene, and in response to sub-Milankovitch scale, high-frequency, low-magnitude climatic oscillations. The chronological magnitude of individual phases of fluvial activity is explored in terms of radiocarbon-dated sequences from the Late Glacial and early Holocene periods. It is apparent that fluvial activity is associated with periods of climatic transition, both high and low magnitude, although system response is far more universal in the case of the high magnitude glacial/ interglacial transitions. Current geochronological tools do not permit the development of high-resolution sequences for Middle Pleistocene sediments, while localised erosion and variable system responses do not facilitate direct comparison with the ice core records. However, Late Glacial and early Holocene sequences indicate that individual fluvial activity phases are relatively brief in duration (e.g. 10(2) and 10(3) yr). From an archaeological perspective, secondary context assemblages can only be interpreted in terms of a floating geochronology, although the data also permit a reinvestigation of the problems of artefact reworking. Copyright (c) 2005 John Wiley I Sons, Ltd.

A record of Holocene climate change from lake geochemical analyses in southeastern Arabia

Lacustrine sediments from southeastern Arabia reveal variations in lake level corresponding to changes in the strength and duration of Indian Ocean Monsoon (IOM) summer rainfall and winter cyclonic rainfall. The late glacial/Holocene transition of the region was characterised by the development of mega-linear dunes. These dunes became stabilised and vegetated during the early Holocene and interdunal lakes formed in response to the incursion of the IOM at approximately 8500 cal yr BP with the development of C3 dominated savanna grasslands. The IOM weakened ca. 6000 cal yr BP with the onset of regional aridity, aeolian sedimentation and dune reactivation and accretion. Despite this reduction in precipitation, the take was maintained by winter dominated rainfall. There was a shift to drier adapted C4 grasslands across the dune field. Lake sediment geochemical analyses record precipitation minima at 8200, 5000 and 4200 cal yr BP that coincide with Bond events in the North Atlantic. A number of these events correspond with changes in cultural periods, suggesting that climate was a key mechanism affecting human occupation and exploitation of this region. (c) 2006 University of Washington. All rights reserved.

A new data set of soil mineralogy for dust-cycle modeling

The mineralogy of airborne dust affects the impact of dust particles on direct and indirect radiative forcing, on atmospheric chemistry and on biogeochemical cycling. It is determined partly by the mineralogy of the dust-source regions and partly by size-dependent fractionation during erosion and transport. Here we present a data set that characterizes the clay and silt-sized fractions of global soil units in terms of the abundance of 12 minerals that are important for dust–climate interactions: quartz, feldspars, illite, smectite, kaolinite, chlorite, vermiculite, mica, calcite, gypsum, hematite and goethite. The basic mineralogical information is derived from the literature, and is then expanded following explicit rules, in order to characterize as many soil units as possible. We present three alternative realizations of the mineralogical maps, taking the uncertainties in the mineralogical data into account. We examine the implications of the new database for calculations of the single scattering albedo of airborne dust and thus for dust radiative forcing.

A regime-dependent parametrization of subgrid-scale cloud water content variability

The subgrid-scale spatial variability in cloud water content can be described by a parameter f called the fractional standard deviation. This is equal to the standard deviation of the cloud water content divided by the mean. This parameter is an input to schemes that calculate the impact of subgrid-scale cloud inhomogeneity on gridbox-mean radiative fluxes and microphysical process rates. A new regime-dependent parametrization of the spatial variability of cloud water content is derived from CloudSat observations of ice clouds. In addition to the dependencies on horizontal and vertical resolution and cloud fraction included in previous parametrizations, the new parametrization includes an explicit dependence on cloud type. The new parametrization is then implemented in the Global Atmosphere 6 (GA6) configuration of the Met Office Unified Model and used to model the effects of subgrid variability of both ice and liquid water content on radiative fluxes and autoconversion and accretion rates in three 20-year atmosphere-only climate simulations. These simulations show the impact of the new regime-dependent parametrization on diagnostic radiation calculations, interactive radiation calculations and both interactive radiation calculations and in a new warm microphysics scheme. The control simulation uses a globally constant f value of 0.75 to model the effect of cloud water content variability on radiative fluxes. The use of the new regime-dependent parametrization in the model results in a global mean which is higher than the control's fixed value and a global distribution of f which is closer to CloudSat observations. When the new regime-dependent parametrization is used in radiative transfer calculations only, the magnitudes of short-wave and long-wave top of atmosphere cloud radiative forcing are reduced, increasing the existing global mean biases in the control. When also applied in a new warm microphysics scheme, the short-wave global mean bias is reduced.

Flood Risk Assessment in Coastal Drainage Basins through a Multivariate Analysis within a GIS-Based Model

This paper presents a GIS-based multicriteria flood risk assessment and mapping approach applied to coastal drainage basins where hydrological data are not available. It involves risk to different types of possible processes: coastal inundation (storm surge), river, estuarine and flash flood, either at urban or natural areas, and fords. Based on the causes of these processes, several environmental indicators were taken to build-up the risk assessment. Geoindicators include geological-geomorphologic proprieties of Quaternary sedimentary units, water table, drainage basin morphometry, coastal dynamics, beach morphodynamics and microclimatic characteristics. Bioindicators involve coastal plain and low slope native vegetation categories and two alteration states. Anthropogenic indicators encompass land use categories properties such as: type, occupation density, urban structure type and occupation consolidation degree. The selected indicators were stored within an expert Geoenvironmental Information System developed for the State of Sao Paulo Coastal Zone (SIIGAL), which attributes were mathematically classified through deterministic approaches, in order to estimate natural susceptibilities (Sn), human-induced susceptibilities (Sa), return period of rain events (Ri), potential damages (Dp) and the risk classification (R), according to the equation R=(Sn.Sa.Ri).Dp. Thematic maps were automatically processed within the SIIGAL, in which automata cells (""geoenvironmental management units"") aggregating geological-geomorphologic and land use/native vegetation categories were the units of classification. The method has been applied to the Northern Littoral of the State of Sao Paulo (Brazil) in 32 small drainage basins, demonstrating to be very useful for coastal zone public politics, civil defense programs and flood management.