Profile simulations of gas chopping etching processes : model development and comparison with experiments

The progress in microsystem technology or nano technology places extended requirements to the fabrication processes. The trend is moving towards structuring within the nanometer scale on the one hand, and towards fabrication of structures with high aspect ratio (ratio of vertical vs. lateral dimensions) and large depths in the 100 µm scale on the other hand. Current procedures for the microstructuring of silicon are wet chemical etching and dry or plasma etching. A modern plasma etching technique for the structuring of silicon is the so-called "gas chopping" etching technique (also called "time-multiplexed etching"). In this etching technique, passivation cycles, which prevent lateral underetching of sidewalls, and etching cycles, which etch preferably in the vertical direction because of the sidewall passivation, are constantly alternated during the complete etching process. To do this, a CHF3/CH4 plasma, which generates CF monomeres is employed during the passivation cycle, and a SF6/Ar, which generates fluorine radicals and ions plasma is employed during the etching cycle. Depending on the requirements on the etched profile, the durations of the individual passivation and etching cycles are in the range of a few seconds up to several minutes. The profiles achieved with this etching process crucially depend on the flow of reactants, i.e. CF monomeres during the passivation cycle, and ions and fluorine radicals during the etching cycle, to the bottom of the profile, especially for profiles with high aspect ratio. With regard to the predictability of the etching processes, knowledge of the fundamental effects taking place during a gas chopping etching process, and their impact onto the resulting profile is required. For this purpose in the context of this work, a model for the description of the profile evolution of such etching processes is proposed, which considers the reactions (etching or deposition) at the sample surface on a phenomenological basis. Furthermore, the reactant transport inside the etching trench is modelled, based on angular distribution functions and on absorption probabilities at the sidewalls and bottom of the trench. A comparison of the simulated profiles with corresponding experimental profiles reveals that the proposed model reproduces the experimental profiles, if the angular distribution functions and absorption probabilities employed in the model is in agreement with data found in the literature. Therefor the model developed in the context of this work is an adequate description of the effects taking place during a gas chopping plasma etching process.

KAM: Automatic Planning and Interpretation of Numerical Experiments Using Geometrical Methods

KAM is a computer program that can automatically plan, monitor, and interpret numerical experiments with Hamiltonian systems with two degrees of freedom. The program has recently helped solve an open problem in hydrodynamics. Unlike other approaches to qualitative reasoning about physical system dynamics, KAM embodies a significant amount of knowledge about nonlinear dynamics. KAM's ability to control numerical experiments arises from the fact that it not only produces pictures for us to see, but also looks at (sic---in its mind's eye) the pictures it draws to guide its own actions. KAM is organized in three semantic levels: orbit recognition, phase space searching, and parameter space searching. Within each level spatial properties and relationships that are not explicitly represented in the initial representation are extracted by applying three operations ---(1) aggregation, (2) partition, and (3) classification--- iteratively.

Categorization in IT and PFC: Model and Experiments

In a recent experiment, Freedman et al. recorded from inferotemporal (IT) and prefrontal cortices (PFC) of monkeys performing a "cat/dog" categorization task (Freedman 2001 and Freedman, Riesenhuber, Poggio, Miller 2001). In this paper we analyze the tuning properties of view-tuned units in our HMAX model of object recognition in cortex (Riesenhuber 1999) using the same paradigm and stimuli as in the experiment. We then compare the simulation results to the monkey inferotemporal neuron population data. We find that view-tuned model IT units that were trained without any explicit category information can show category-related tuning as observed in the experiment. This suggests that the tuning properties of experimental IT neurons might primarily be shaped by bottom-up stimulus-space statistics, with little influence of top-down task-specific information. The population of experimental PFC neurons, on the other hand, shows tuning properties that cannot be explained just by stimulus tuning. These analyses are compatible with a model of object recognition in cortex (Riesenhuber 2000) in which a population of shape-tuned neurons provides a general basis for neurons tuned to different recognition tasks.

Avaluació dels aprenentatges en les innovacions docents dels estudis de biologia de la Universitat Pompeu Fabra

Els organitzadors de les Jornades de Treball sobre L’Avaluació dels Aprenentatges a partir de Competències ens van invitar a explicar l’experiència d’avaluació de les innovacions docents que s’estan desenvolupant als estudis de Biologia de la Universitat Pompeu Fabra (UPF) en la seva adaptació a l’espai europeu d’educació superior (EEES). Aquest escrit pretén resumir la nostra experiència i destacar els elements que considerem més rellevants. En primer lloc resumirem les característiques del projecte educatiu i d’avaluació de la Facultat de Ciències de la Salut i de la Vida (FCSV) de la UPF, centre on es desenvolupa l’experiència. Posteriorment descriurem la nostra experiència d’avaluació de les innovacions docents i, finalment, en farem una valoració i destacarem els problemes principals

A Comparative study of germination strategies of two species of genus Allium sect. Allium

Germination experiments were performed with seeds of two species of genus Allium section Allium, a rare and endangered species A. pyrenaicum and a common A. sphaerocephalon. Different pre-treatments and a photoperiod of 24 h darkness were applied in order to simulate different germination conditions. Both species showed a high percentage of viable seeds a part of which were dormant. An elevate percentage of dormant seeds could be caused by a later collection time. Low altitude populations had more mortality than the others, possibly caused by the hard summer conditions during flowering and fruiting time. Comparisons between dates of species coexistence localities only show inter-population variability and it could be caused by the detected dormancy. Darkness accelerates germination, possibly for elongation radicle stimulation. Heat-shock pre-treatments decreased germination time in seeds from localities where fire is a probable event. The rarity of A. Pyrenaicum not seems to be caused by restricted germination requirements but is attributable to distinct habitat preferences, related to his altitudinal range of distribution

A distributed environment for virtual and/or real experiments for underwater robots

This paper presents the distributed environment for virtual and/or real experiments for underwater robots (DEVRE). This environment is composed of a set of processes running on a local area network composed of three sites: 1) the onboard AUV computer; 2) a surface computer used as human-machine interface (HMI); and 3) a computer used for simulating the vehicle dynamics and representing the virtual world. The HMI can be transparently linked to the real sensors and actuators dealing with a real mission. It can also be linked with virtual sensors and virtual actuators, dealing with a virtual mission. The aim of DEVRE is to assist engineers during the software development and testing in the lab prior to real experiments

Apropar les classes de biologia als debats més actuals : a tall de mostra, els parcs naturals. 'Acercar las clases de biología a los debates más actuales : como muestra, los parques naturales'.

La enseñanza de las ciencias se puede realizar mediante diversas aproximaciones pero el enorme contenido conceptual y cierta actitud de inercia hacen que esta enseñanza a menudo se aleje de la realidad. En los últimos años se ha avanzado especialmente en la significacion de los contenidos para el alumnado y en el tratamiento de las cuestiones más candentes y controvertidas de la sociedad actual. Una buena muestra es el estudio del concepto de parque natural para poder usar algunos recursos educativos. Se aborda el caso de los espacios naturales protegidos en las islas Baleares, su evolución histórica y las tendencias actuales. Finalmente se incluyen algunas propuestas pedagógicas y se aconsejan algunas páginas web.

Aplicacions de les TIC a la Biologia i Geologia. 'Aplicaciones de las TIC en la Biolog??a y Geolog??a'

Resumen tomado de la publicaci??n. Incluye im??genes de capturas de pantalla del ordenador que refuerzan las explicaciones del curso. Este documento est?? sujeto a una licencia de Reconocimiento-No comercial-Compartir con la misma licencia 2.5 Espa??a de Creative Commons