90°全息记录衍射效率分析与提高

对光折变全息记录特别是双中心全息记录中90°记录结构下较低的衍射效率进行了研究, 采用局域衍射理论对90°记录结构的衍射进行了分析,表明在同样的折射率变化和2 mm的光束宽度的情况下, 只有当折射率光栅振幅大于10-4时, 90°记录结构衍射效率才能够与小角度透射记录结构的衍射效率大致相当。针对环境干扰导致的干涉条纹振动影响光栅记录, 提出了有效调制度概念, 根据分析90°记录结构的干涉条纹间距很小, 容易受外界环境干扰而导致低的折射率变化率, 因此应采用主动条纹锁定系统。此外在双中心全息记录中, 微观光

正弦相位调制的频域光学相干层析成像

提出一种基于正弦相位调制的频域光学相干层析成像,利用正弦相位调制干涉术探测复频域干涉条纹的实部和虚部,重建复频域干涉条纹。对该复频域干涉条纹作逆傅里叶变换后,消除了频域光学相干层析成像中存在的复共轭镜像以及直流背景和自相干噪声。对玻璃片样品进行了层析成像实验。实验结果表明,采用正弦相位调制的频域光学相干层析成像,将可利用的成像深度范围扩大到原来的2倍,实现了全深度探测的频域光学相干层析成像。

物体表面形貌的正弦相位调制实时干涉测量技术研究

表面形貌干涉测量技术是一种高精度的非接触式测量技术,在工业生产和科学研究中具有广泛的应用。提出一种实时测量表面形貌的正弦相位调制干涉测量新技术。该技术用激光二极管作光源,用自制的高速图像传感器探测干涉信号,通过信号处理电路实时解相得到被测表面所对应的相位分布,实时分析相位获得物体表面形貌。该技术消除了光强和部分外界干扰的影响,提高了系统的测量精度。楔形光学平板表面形貌的测量结果表明,测量点为60×60个的情况下,测量时间小于8.2 ms,重复测量精度(RMS)为4.3 nm。

基于低速面阵CCD的正弦相位调制干涉测量

正弦相位调制(SPM)干涉测量技术用于表面形貌测量时, 需要帧速高于300 frame/s的图像传感器, 同时要求调制信号频率与图像传感器帧速成确定的整数倍关系。提出一种基于低速CCD(30 frame/s)的帧速可调的高速图像传感技术, 通过控制每帧像素总数提高CCD帧速, 研制出一种高帧速图像传感器, 帧速可达300～1600 frame/s, 且每帧大小连续可调。将该CCD传感器用于正弦相位调制干涉泰曼-格林干涉仪, 测量镀膜玻璃板表面形貌, 当CCD图像传感器的帧速与调制信号频率呈16, 8, 4

一种测量光刻机工件台方镜不平度的新方法

提出一种新的步进扫描投影光刻机工件台方镜不平度测量方法。以方镜平移补偿量与旋转补偿量为测量目标,使用两个双频激光干涉仪分别测量工件台在x和y方向的位置和旋转量；将方镜不平度的测量按照一定的偏移量分成若干个序列,每一个序列包括对方镜有效区域的若干次往返测量；根据所有序列的测量结果计算出方镜的旋转补偿量；为每一个序列建立临时边界条件,并据此计算出每一序列所测得的方镜粗略平移补偿量；采用三次样条插值与最小二乘法建立每一个序列间的关系,以平滑连接所有测量序列得到精确的方镜平移补偿量。结果表明,该方法用于测量方镜平

频谱泄漏对正弦相位调制干涉测量精度的影响何

在正弦相位调制(SPM)干涉仪中,若调制频率或者采样频率发生变化将使干涉信号出现频谱泄漏,减小了谐波分量的幅值,在测量结果中引入了误差。对频谱泄漏的产生及其对测量精度的影响进行了理论分析,获得了频谱泄漏引入测量误差的计算方法。实验测得频率漂移量在-0.3～0.3 Hz内,得到的频谱泄漏引入的误差为0.3～7.9 nm,当超出这个范围时,频谱泄漏误差将迅速增长。实验结果与模拟分析结果一致。

Discussions about FFT-based two-step phase-shifting algorithm

An FFT-based two-step phase-shifting (TPS) algorithm is described in detail and implemented by use of experimental interferograms. This algorithm has been proposed to solve the TPS problem with random phase shift except pi. By comparison with the visibility-function-based TPS algorithm, it proves that the FFT-based algorithm has obvious advantages in phase extracting. Meanwhile, we present a pi-phase-shift supplement to the TPS algorithm, which combines the two interferograms and demodulates the phase map by locating the extrema of the combined fringes after removing the respective backgrounds. So combining this method and FFT-based one, one could really implement the TPS with random phase shift. Whereafter, we systematically compare the TPS with single-interferogram analysis algorithm and conventional three-step phase-shifting one. The results demonstrate that the FFT-based TPS algorithm has a satisfactory accuracy. At last, based on the polarizing interferometry, a schematic setup of two-channel TPS interferometer with random phase shift is suggested to implement the simultaneous collection of interferograms. (c) 2007 Elsevier GrnbH. All rights reserved.

Generation of double pulses in-line by using reflective Dammann gratings

Doubled femtosecond laser pulses in-line are needed in the collinear pump-probe technique, collinear second harmonic generation frequency-resolved optical gating (SHG FROG) and the spectral phase interferometry for direct electric-field reconstruction (SPIDER), etc. Normally, it is generated by using a Michelson's structure. In this paper, we proposed a novel structure with two-layered reflective Dammann gratings and the reflective mirrors to generate doubled femtosecond laser pulses in line without transmission optical elements. Angular dispersion and spectral spatial walk-off are both compensated. In addition, this structure can also compress the positive chirped pulse, which cannot be realized with a Michelson's structure. By adopting triangular grating and blazed gratings, the efficiency of the system would in principle be increased as the Michelson's scheme. Experiments demonstrated that this method should be an alternative approach for generation of the double compressed pulses of femtosecond laser for practical applications. (c) 2006 Elsevier GmbH. All rights reserved.

Wideband two-port beam splitter of a binary fused-silica phase grating

The usual beam splitter of multilayer-coated film with a wideband spectrum is not easy to achieve. We describe the realization of a wideband transmission two-port beam splitter based on a binary fused-silica phase grating. To achieve high efficiency and equality in the diffracted 0th and -1st orders, the grating profile parameters are optimized using rigorous coupled-wave analysis at a wavelength of 1550 nm. Holographic recording and the inductively coupled plasma dry etching technique are used to fabricate the fused-silica beam splitter grating. The measured efficiency of (45% x 2) = 90% diffracted into the both orders can be obtained with the fabricated grating under Littrow mounting. The physical mechanism of such a wideband two-port beam splitter grating can be well explained by the modal method based on two-beam interference of the modes excited by the incident wave. With the high damage threshold, low coefficient of thermal expansion, and wideband high efficiency, the presented beam splitter etched in fused silica should be a useful optical element for a variety of practical applications. (C) 2008 Optical Society of America.

Three-port beam splitter of a binary fused-silica grating

A deep-etched polarization-independent binary fused-silica phase grating as a three-port beam splitter is designed and manufactured. The grating profile is optimized by use of the rigorous coupled-wave analysis around the 785 nm wavelength. The physical explanation of the grating is illustrated by the modal method. Simple analytical expressions of the diffraction efficiencies and modal guidelines for the three-port beam splitter grating design are given. Holographic recording technology and inductively coupled plasma etching are used to manufacture the fused-silica grating. Experimental results are in good agreement with the theoretical values. (c) 2008 Optical Society of America.

One-shot parallel complex Fourier-domain optical coherence tomography using a spatial carrier frequency

We propose a novel method of one-shot parallel complex Fourier-domain optical coherence tomography using a spatial carrier frequency for full range imaging. The spatial carrier frequency is introduced into the 2-D spectral interferogram in the lateral direction by using a tilted reference wavefront. This spatial-carrier- contained 2-D spectral interferogram is recorded with one shot of a 2-D CCD camera, and is Fourier-transformed in the lateral direction to obtain a 2-D complex spectral interferogram by a spatial-carrier technique. A full-range tomogram is reconstructed from the 2-D complex spectral interferogram. The principle of this method is confirmed by cross-sectional imaging of a glass slip object. (c) 2008 Society of Photo-Optical Instrumentation Engineers.

Deep silicon grating as high-extinction-ratio polarizing beam splitter

A deep binary silicon grating as high-extinction-ratio reflective polarizing beam splitter (PBS) at the wavelength of 1550 nm is presented. The design is based on the phenomenon of total internal reflection (TIR) by using the rigorous coupled wave analysis (RCWA). The extinction ratio of the rectangular PBS grating can reach 2.5×105 with the optimum grating period of 397 nm and groove depth of 1.092 μm. The effciencies of TM-polarized wave in the 0th order and TE-polarized wave in the −1st order can both reach unity at the Littrow angle. Holographic recording technology and inductively coupled plasma (ICP) etching could be used to fabricate the silicon PBS grating.

光谱相位相干技术测量飞秒脉冲的倍频误差

从理论上推导了第Ⅱ类相位匹配下宽带飞秒脉冲的二次谐波光场,分析输入飞秒脉冲的非共线相位匹配方式、脉冲带宽引起相位失配与群速失配对测量的影响。结果表明,为了消除飞秒脉冲的带宽影响,需要对测量记录的光强乘以一个调制因子;测量相位误差与非共线相位匹配的夹角和晶体长度成正比;相位失配与群速失配产生相位测量误差,且第Ⅱ类相位匹配方式下脉冲附加相位值较大;强度和相位误差需要在脉冲重建结果中补偿。

Photobleaching process of xanthene dyes initiated by N-phenylglycine in the polyvinylalcohol film

The parameters such as quantum yield and molar absorption coefficients of the photoinitiator that are responsible for holographic sensitivity in photopolymer material are investigated with a single beam exposure experiment. The influence of exposure intensity, the concentrations of N-phenylglycine and dye on the photobleaching process of xanthenes dyes are presented. In addition, the effect of diphenyliodonium hexafluorophosphate salt on the quantum yield and molar absorption of xanthene dyes is studied. (c) 2005 Elsevier Ltd. All rights reserved.