A Multi-scale Model for Copper Dishing in Chemical-Mechanical Polishing

The present success in the manufacture of multi-layer interconnects in ultra-large-scale integration is largely due to the acceptable planarization capabilities of the chemical-mechanical polishing (CMP) process. In the past decade, copper has emerged as the preferred interconnect material. The greatest challenge in Cu CMP at present is the control of wafer surface non-uniformity at various scales. As the size of a wafer has increased to 300 mm, the wafer-level non-uniformity has assumed critical importance. Moreover, the pattern geometry in each die has become quite complex due to a wide range of feature sizes and multi-level structures. Therefore, it is important to develop a non-uniformity model that integrates wafer-, die- and feature-level variations into a unified, multi-scale dielectric erosion and Cu dishing model. In this paper, a systematic way of characterizing and modeling dishing in the single-step Cu CMP process is presented. The possible causes of dishing at each scale are identified in terms of several geometric and process parameters. The feature-scale pressure calculation based on the step-height at each polishing stage is introduced. The dishing model is based on pad elastic deformation and the evolving pattern geometry, and is integrated with the wafer- and die-level variations. Experimental and analytical means of determining the model parameters are outlined and the model is validated by polishing experiments on patterned wafers. Finally, practical approaches for minimizing Cu dishing are suggested.

A Multi-scale Model for Copper Dishing in Chemical-Mechanical Polishing

The present success in the manufacture of multi-layer interconnects in ultra-large-scale integration is largely due to the acceptable planarization capabilities of the chemical-mechanical polishing (CMP) process. In the past decade, copper has emerged as the preferred interconnect material. The greatest challenge in Cu CMP at present is the control of wafer surface non-uniformity at various scales. As the size of a wafer has increased to 300 mm, the wafer-level non-uniformity has assumed critical importance. Moreover, the pattern geometry in each die has become quite complex due to a wide range of feature sizes and multi-level structures. Therefore, it is important to develop a non-uniformity model that integrates wafer-, die- and feature-level variations into a unified, multi-scale dielectric erosion and Cu dishing model. In this paper, a systematic way of characterizing and modeling dishing in the single-step Cu CMP process is presented. The possible causes of dishing at each scale are identified in terms of several geometric and process parameters. The feature-scale pressure calculation based on the step-height at each polishing stage is introduced. The dishing model is based on pad elastic deformation and the evolving pattern geometry, and is integrated with the wafer- and die-level variations. Experimental and analytical means of determining the model parameters are outlined and the model is validated by polishing experiments on patterned wafers. Finally, practical approaches for minimizing Cu dishing are suggested.

Psychometric Properties of the Inventário Dimensional Clínico da Personalidade (IDCP) using the Rating Scale Model

The aim of this study was to evaluate the performance of the Dimensional Clinical Personality Inventory (DCPI) using Rasch-based person and item analysis. 1281 participants were recruited, between 18 and 90 years of age (M=26.64; SD=8.94), 431 men (33.6%) and 127 (9.9%) patients diagnosed with axis I disorders and/or axis II according to DSM-IV-TR. Results indicated the IDCP scales performed reasonably well, and the usefulness of the analyses presented, demonstrate the Rasch model’s applicability for clinical applications. Among the important tools offered by the Rasch model, we explore the use of the person-item map, which visually presents the intuitively understandable psychological construct along the dimensional scale of the instrument.

Getting Them There: A Small-Scale Usability Test of a University Library Website

This presentation was offered as part of the CUNY Library Assessment Conference, Reinventing Libraries: Reinventing Assessment, held at the City University of New York in June 2014.

Cálculo do Value at Risk (VaR) para o Ibovespa, pós crise de 2008, por meio dos modelos de heterocedasticidade condicional (GARCH) e de volatilidade estocástica (Local Scale Model - LSM)

O objetivo deste estudo é propor a implementação de um modelo estatístico para cálculo da volatilidade, não difundido na literatura brasileira, o modelo de escala local (LSM), apresentando suas vantagens e desvantagens em relação aos modelos habitualmente utilizados para mensuração de risco. Para estimação dos parâmetros serão usadas as cotações diárias do Ibovespa, no período de janeiro de 2009 a dezembro de 2014, e para a aferição da acurácia empírica dos modelos serão realizados testes fora da amostra, comparando os VaR obtidos para o período de janeiro a dezembro de 2014. Foram introduzidas variáveis explicativas na tentativa de aprimorar os modelos e optou-se pelo correspondente americano do Ibovespa, o índice Dow Jones, por ter apresentado propriedades como: alta correlação, causalidade no sentido de Granger, e razão de log-verossimilhança significativa. Uma das inovações do modelo de escala local é não utilizar diretamente a variância, mas sim a sua recíproca, chamada de “precisão” da série, que segue uma espécie de passeio aleatório multiplicativo. O LSM captou todos os fatos estilizados das séries financeiras, e os resultados foram favoráveis a sua utilização, logo, o modelo torna-se uma alternativa de especificação eficiente e parcimoniosa para estimar e prever volatilidade, na medida em que possui apenas um parâmetro a ser estimado, o que representa uma mudança de paradigma em relação aos modelos de heterocedasticidade condicional.

Bayesian analysis of random regression models using B-splines to model test-day milk yield of Holstein cattle in Brazil

Conselho Nacional de Desenvolvimento Científico e Tecnológico (CNPq)

Random regression models using different functions to model test-day milk yield of Brazilian Holstein cows

Fundação de Amparo à Pesquisa do Estado de São Paulo (FAPESP)

Bayesian analysis of random regression models using B-splines to model test-day milk yield of Holstein cattle in Brazil

The objective of this paper is to model variations in test-day milk yields of first lactations of Holstein cows by RR using B-spline functions and Bayesian inference in order to fit adequate and parsimonious models for the estimation of genetic parameters. They used 152,145 test day milk yield records from 7317 first lactations of Holstein cows. The model established in this study was additive, permanent environmental and residual random effects. In addition, contemporary group and linear and quadratic effects of the age of cow at calving were included as fixed effects. Authors modeled the average lactation curve of the population with a fourth-order orthogonal Legendre polynomial. They concluded that a cubic B-spline with seven random regression coefficients for both the additive genetic and permanent environment effects was to be the best according to residual mean square and residual variance estimates. Moreover they urged a lower order model (quadratic B-spline with seven random regression coefficients for both random effects) could be adopted because it yielded practically the same genetic parameter estimates with parsimony. (C) 2012 Elsevier B.V. All rights reserved.

MODELING DYNAMICS OF OZONE AND NITROGEN OXIDES AT SUMMIT, GREENLAND WITH A 1-D PROCESS-SCALE MODEL

This work presents a 1-D process scale model used to investigate the chemical dynamics and temporal variability of nitrogen oxides (NOx) and ozone (O3) within and above snowpack at Summit, Greenland for March-May 2009 and estimates surface exchange of NOx between the snowpack and surface layer in April-May 2009. The model assumes the surface of snowflakes have a Liquid Like Layer (LLL) where aqueous chemistry occurs and interacts with the interstitial air of the snowpack. Model parameters and initialization are physically and chemically representative of snowpack at Summit, Greenland and model results are compared to measurements of NOx and O3 collected by our group at Summit, Greenland from 2008-2010. The model paired with measurements confirmed the main hypothesis in literature that photolysis of nitrate on the surface of snowflakes is responsible for nitrogen dioxide (NO2) production in the top ~50 cm of the snowpack at solar noon for March – May time periods in 2009. Nighttime peaks of NO2 in the snowpack for April and May were reproduced with aqueous formation of peroxynitric acid (HNO4) in the top ~50 cm of the snowpack with subsequent mass transfer to the gas phase, decomposition to form NO2 at nighttime, and transportation of the NO2 to depths of 2 meters. Modeled production of HNO4 was hindered in March 2009 due to the low production of its precursor, hydroperoxy radical, resulting in underestimation of nighttime NO2 in the snowpack for March 2009. The aqueous reaction of O3 with formic acid was the major sync of O3 in the snowpack for March-May, 2009. Nitrogen monoxide (NO) production in the top ~50 cm of the snowpack is related to the photolysis of NO2, which underrepresents NO in May of 2009. Modeled surface exchange of NOx in April and May are on the order of 1011 molecules m-2 s-1. Removal of measured downward fluxes of NO and NO2 in measured fluxes resulted in agreement between measured NOx fluxes and modeled surface exchange in April and an order of magnitude deviation in May. Modeled transport of NOx above the snowpack in May shows an order of magnitude increase of NOx fluxes in the first 50 cm of the snowpack and is attributed to the production of NO2 during the day from the thermal decomposition and photolysis of peroxynitric acid with minor contributions of NO from HONO photolysis in the early morning.

Regulation of Phytoplankton Carbon to Chlorophyll Ratio By Light, Nutrients and Temperature in the Equatorial Pacific Ocean: A Basin-Scale Model

The complex effects of light, nutrients and temperature lead to a variable carbon to chlorophyll (C:Chl) ratio in phytoplankton cells. Using field data collected in the Equatorial Pacific, we derived a new dynamic model with a non-steady C:Chl ratio as a function of irradiance, nitrate, iron, and temperature. The dynamic model is implemented into a basin-scale ocean circulation-biogeochemistry model and tested in the Equatorial Pacific Ocean. The model reproduces well the general features of phytoplankton dynamics in this region. For instance, the simulated deep chlorophyll maximum (DCM) is much deeper in the western warm pool (similar to 100 m) than in the Eastern Equatorial Pacific (similar to 50 m). The model also shows the ability to reproduce chlorophyll, including not only the zonal, meridional and vertical variations, but also the interannual variability. This modeling study demonstrates that combination of nitrate and iron regulates the spatial and temporal variations in the phytoplankton C:Chl ratio in the Equatorial Pacific. Sensitivity simulations suggest that nitrate is mainly responsible for the high C:Chl ratio in the western warm pool while iron is responsible for the frontal features in the C:Chl ratio between the warm pool and the upwelling region. In addition, iron plays a dominant role in regulating the spatial and temporal variations of the C:Chl ratio in the Central and Eastern Equatorial Pacific. While temperature has a relatively small effect on the C:Chl ratio, light is primarily responsible for the vertical decrease of phytoplankton C:Chl ratio in the euphotic zone.

Scale model research for room acoustics purposes

In the field of Room Acoustics it is common using scale models to study a room. Through this method it is possible to predict its behavior, which may be very useful to detect and correct any problem prior to build it, saving many resources. Nowadays this method has been relegated to a secondary position due to the peak of simulation software, which makes possible studying rooms in a cheap, flexible and simple way, as well as it is potentially less time consuming. Nevertheless, the scale model method is still under study, as it may give some additional information. This project intends to focus in pedagogic possibilities of the scale model method. This method offers the student the opportunity of study and grasp some of the most important phenomena in Room Acoustics, in a more intuitive way than just a software simulation. Furthermore most of the existing software in this field is aimed to the technician working in the lab, as efficiently as possible, not to the student trying to understand and learn something. Here, the facilities and resources of Syddansk Universitet regarding this matter will be studied and evaluated, as well as the procedure for the experiments, paying special attention not only to its reliability and accuracy, but also to its didactic possibilities. Besides, if possible, any improvement that could help to enhance any of the listed aspects will be suggested. En el ámbito de la Acústica Arquitectónica es común el uso de modelos a escala para estudiar un recinto determinado. Mediante esta técnica es posible por ejemplo predecir el comportamiento del recinto y detectar problemas antes de su construcción, con el consecuente ahorro de recursos. Actualmente el uso de modelos a escala está desplazado a un segundo plano por el uso de software simulación, debido a la sencillez y flexibilidad que puede aportar la simulación por ordenador, así como a la economía de tiempo y recursos que supone. Sin embargo sigue siendo objeto de estudio, dado que puede aportar información muy valiosa para el ingeniero. Este proyecto se centra en las posibilidades pedagógicas de dicho método. El uso de modelos a escala brinda la oportunidad a los estudiantes de estudiar y comprender algunos de los fenómenos más importantes en la Acústica Arquitectónica de una forma más directa e intuitiva que una simulación por ordenador. Se pretende estudiar y evaluar los medios al alcance de los estudiantes en la Syddansk Universitet, así como los métodos usados, atendiendo no sólo a su precisión y fiabilidad, si no a su potencial pedagógico. Así mismo, si es posible, se propondrán cambios que puedan suponer una mejora en cualquiera de estos aspectos. Así el proyecto se divide en varias secciones claramente diferenciadas. En el apartado Background and Theoretical Basis se introduce el tema del estudio y simulación de recintos acústicos. Se explica su importancia y utilidad, y se comenta la situación actual de estas técnicas, abordando diferentes métodos usados así como sus bases teóricas y principales ventajas e inconvenientes. Bajo el apartado de Project se analizan diferentes factores relacionados con el problema. Se estudian los recursos a disposición del alumno, desde el software y hardware implicados hasta el equipo de medida y otros recursos necesarios para la realización de las prácticas. Es en esta parte donde se centra la parte más importante del trabajo, consistente en la medición y comprobación de las características más relevantes del equipo implicado. Haciendo posible así confirmar su validez y precisión, tanto desde el punto de vista técnico como pedagógico, así como estableciendo los límites dentro de los que se puede considerar fiable el modelo. Al final de este apartado se aborda la influencia de la absorción del aire en altas frecuencias, y la variación en los coeficientes de absorción y dispersión de los materiales respecto de la frecuencia. Por último se realiza una verificación subjetiva del sistema completo, debido a que por limitaciones técnicas no ha sido posible evaluar el montaje en el rango equivalente a toda la banda audible, y que los métodos estudiados tienen como meta última asegurar una buena percepción por parte del oyente en el recinto dado. Dentro del apartado Conclusions se hace un breve resumen de las conclusiones extraídas anteriormente, y se valora el rendimiento y utilidad general del modelo, que a pesar de algunos problemas de precisión y repetibilidad lógicos debido a los medios usados, es válido para ilustrar los fenómenos físicos que se quieren enseñar al alumno. En la sección de Future Work se proponen diferentes vías de trabajo para futuros proyectos en la Syddansk Universitet que podrían ser útiles confirmar el trabajo realizado en este proyecto, mejorar la precisión y fiabilidad del montaje o enriquecer las posibilidades pedagógicas de las prácticas relacionadas. Por último se encuentra, tras el apartado de referencias, los anexos con tablas y gráficas relativas a las medidas realizadas en diferentes partes del trabajo. También se puede encontrar información y material relacionado con el proyecto en el CD adjunto.

Influencia del viento en los ensayos de rebase en modelo físico a escala reducida = Wind effect on wave overtopping in physical model test

El artículo que se presenta a continuación recoge la ampliación de una investigación previa sobre los rebases en los espaldones de los diques verticales y en talud. Para ello se han realizado una serie de ensayos en modelo físico a escala reducida sobre la sección vertical del Dique de Levante de Málaga, cuyo objeto principal fue analizar el efecto del viento en el rebase. Los ensayos se han realizado generando oleaje con y sin viento, comparando los resultados obtenidos en cada una de las dos situaciones y se han llevado a cabo en el Canal de Oleaje y Viento de Gran Escala existente en el Laboratorio de Experimentación Marítima del Centro de Estudios de Puertos y Costas del CEDEX. The purpose of the research work as summarised in this article, resulting from diverse work carried out at the CEDEX, is to make an analysis of the influence of wind effects on the wave overtopping of vertical sea-walls. The results obtained in the Málaga´s Levante breakwater tests are presented here. The test was carried out in large sized facilities where waves and wind are generated.

Scale model study of low-density concrete impact attenuators. Final report.

Ohio Department of Transportation, Columbus