Structural properties of polycrystalline silicon films formed by pulsed rapid thermal processing

A novel pulsed rapid thermal processing (PRTP) method has been used for realizing the solid-phase crystallization of amorphous silicon films prepared by PECVD. The microstructure and surface morphology of the crystallized films are investigated by X-ray diffraction (XRD) and atomic force microscopy (AFM). The results indicate that this PRTP is a suitable post-crystallization technique for fabricating large-area polycrystalline silicon films with good structural qualities such as large grain size, small lattice microstain and smooth surface morphology on low-cost substrate.

1.2 MeV/40 mA电子加速器的研制

装置应国内辐照加工需求而研制,采用单相无铁芯变压器结构,初级供以400 Hz的中频交流,次级全波整流倍压后级联形成直流高压。加速管同心地位于次级线圈内,电子枪采用间热式LaB6发射阴极。该装置结构紧凑,电子束1.2 MeV/40 mA,束流功率近50 kW,不稳定度均好于±5%,电功率转化效率高于65%,已通过8 h运行测试。

An 8.1 Ma calcite record of Asian summer monsoon evolution on the Chinese central Loess Plateau

IEECAS SKLLQG

Plio-Quaternary stepwise drying of Asia: Evidence from a 3-Ma pollen record from the Chinese Loess Plateau

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Multiple expansions of C-4 plant biomass in East Asia since 7 Ma coupled with strengthened monsoon circulation

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Pollen record from red clay sequence in the central Loess Plateau between 8.10 and 2.60 Ma

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Tectonic uplift in the northern Tibetan Plateau since 13.7 Ma ago inferred from molasse deposits along the Altyn Tagh Fault

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黄土高原陇东盆地朝那红黏土8.1～2.6 Ma的孢粉记录

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