Process control of cantilever deflection for sensor application based on optical waveguides

This paper reports on the fabrication of cantilever silicon-on-insulator (SOI) optical waveguides and presents solutions to the challenges of using a very thin 260-nm active silicon layer in the SOI structure to enable single-transverse-mode operation of the waveguide with minimal optical transmission losses. In particular, to ameliorate the anchor effect caused by the mean stress difference between the active silicon layer and buried oxide layer, a cantilever flattening process based on Ar plasma treatment is developed and presented. Vertical deflections of 0.5 mu m for 70-mu m-long cantilevers are mitigated to within few nanometers. Experimental investigations of cantilever mechanical resonance characteristics confirm the absence of significant detrimental side effects. Optical and mechanical modeling is extensively used to supplement experimental observations. This approach can satisfy the requirements for on-chip simultaneous readout of many integrated cantilever sensors in which the displacement or resonant frequency changes induced by analyte absorption are measured using an optical-waveguide-based division multiplexed system.

Optical read-out scheme based on Grated Waveguide Cantilever cavity resonance for interrogation of cantilever sensor arrays

The design and analysis of an optical read-out scheme based on a grated waveguide (GWG) resonator for interrogating microcantilever sensor arrays is presented. The optical system consisting of a micro cantilever monolithically integrated in proximity to a grated waveguide (GWG), is realized in silicon optical bench platform. The mathematical analysis of the optical system is performed using a Fabry-Perot interferometer model with a lossy cavity formed between the cantilever and the GWG and an analytical expression is derived for the optical power transmission as a function of the cantilever deflection which corresponds to cavity width variation. The intensity transmission of the optical system for different cantilever deflections estimated using the analytical expression captures the essential features exhibited by a FDTD numerical model.

Cantilever resonator with integrated actuation and sensing fabricated using a single step lithography

Micro- and nano-mechanical resonators have been proposed for a variety of applications ranging from mass sensing to signal processing. Often their actuation and/or detection involve external subsystems that are much larger than the resonator itself. We have designed a simple microcantilever resonator with integrated sensor and actuator, facilitating the integration of large arrays of resonators. This unique design can be manufactured with a low-cost fabrication process, involving just a single step of lithography. The bilayer cantilever of gold and silicon dioxide is used as piezoresistive sensor as well as thermal bimorph actuator. The ac current used for actuation and the dc current used for piezoresistive detection are separated in the frequency-domain using a bias-tee circuit configuration. The resonant response is measured by detecting the second harmonic of the actuation current using a lock-in amplifier.

Analysis of grating inscribed micro-cantilever for high resolution AFM probe

We present a mathematical modelling and analysis of reflection grating etched Si AFM cantilever deflections under different loading conditions. A simple analysis of the effect of grating structures on cantilever deflection is carried out with emphasis on optimizing the beam and gratings such that maximum amount of diffracted light remains within the detector area.

VIBRATIONAL CHARACTERISTICS OF ZIGZAG, ARMCHAIR AND CHIRAL CANTILEVER SINGLE-WALLED CARBON NANOTUBES

Finite element analysis has been performed to study vibrational characteristics of cantilever single walled carbon nanotubes. Finite element models are generated by specifying the C-C bond rigidities, which are estimated by equating energies from molecular mechanics and continuum mechanics. Bending, torsion, and axial modes are identified based on effective mass for armchair, zigzag and chiral cantilever single walled carbon nanotubes, whose Young's modulus is evaluated from the bending frequency. Empirical relations are provided for frequencies of bending, torsion, and axial modes.

Fabrication and Experimentation of a Cantilever Beam Based Piezoelectric Actuator and Sensor for Vibration Energy Harvesting

In the immediate surroundings of our daily life, we can find a lot of places where the energy in the form of vibration is being wasted. Therefore, we have enormous opportunities to utilize the same. Piezoelectric character of matter enables us to convert this mechanical vibration energy into electrical energy which can be stored and used to power other device, instead of being wasted. This work is done to realize both actuator and sensor in a cantilever beam based on piezoelectricity. The sensor part is called vibration energy harvester. The numerical analyses were performed for the cantilever beam using the commercial package ANSYS and MATLAB. The cantilever beam is realized by taking a plate and fixing its one end between two massive plates. Two PZT patches were glued to the beam on its two faces. Experiments were performed using data acquisition system (DAQ) and LABVIEW software for actuating and sensing the vibration of the cantilever beam.

Exploring isospectral cantilever beams using electromagnetism inspired optimization technique

Isospectral beams have identical free vibration frequency spectrum for a specific boundary condition. The problem of finding non-uniform beams which are isospectral to a given uniform beam, with fixed-free boundary condition, leads to a multimodal optimization problem. The first Q natural frequencies of the given uniform Euler-Bernoulli beam are determined using analytical solution. The first Q natural frequencies of a non-uniform beam are obtained with the help of finite element modeling. In order to obtain the non-uniform beams isospectral to a given uniform beam, an error function is designed, which calculates the difference between the spectra of the given uniform beam and the non-uniform beam. In our study, this error function is minimized using electromagnetism inspired optimization technique, a population based iterative algorithm inspired by the attraction-repulsion physics of electromagnetism. Numerical results show the existence of the isospectral non-uniform beams for a given uniform beam, which occur as local minima. Non-uniform beams isospectral to a damaged beam, are also explored using the proposed methodology to illustrate the fact that accurate structural damage identification is difficult by just frequency measurements. (C) 2012 Elsevier B.V. All rights reserved.

Note: A resonating reflector-based optical system for motion measurement in micro-cantilever arrays

A robust, compact optical measurement unit for motion measurement in micro-cantilever arrays enables development of portable micro-cantilever sensors. This paper reports on an optical beam deflection-based system to measure the deflection of micro-cantilevers in an array that employs a single laser source, a single detector, and a resonating reflector to scan the measurement laser across the array. A strategy is also proposed to extract the deflection of individual cantilevers from the acquired data. The proposed system and measurement strategy are experimentally evaluated and demonstrated to measure motion of multiple cantilevers in an array. (C) 2015 AIP Publishing LLC.

An Effective Method of Determining the Residual Stress Gradients in a Micro-Cantilever

A method of determining the micro-cantilever residual stress gradients by studying its deflection and curvature is presented. The stress gradients contribute to both axial load and bending moment, which, in prebuckling regime, cause the structural stiffness change and curving up/down, respectively. As the axial load corresponds to the even polynomial terms of stress gradients and bending moment corresponds to the odd polynomial terms, the deflection itself is not enough to determine the axial load and bending moment. Curvature together with the deflection can uniquely determine these two parameters. Both linear analysis and nonlinear analysis of micro-cantilever deflection under axial load and bending moment are presented. Because of the stiffening effect due to the nonlinearity of (large) deformation, the difference between linear and nonlinear analyses enlarges as the micro-cantilever deflection increases. The model developed in this paper determines the resultant axial load and bending moment due to the stress gradients. Under proper assumptions, the stress gradients profile is obtained through the resultant axial load and bending moment.

Propagation Properties of Electromagnetic Wave in a Plasma Slab

In this paper, the calculated results about the propagation properties of electromagnetic wave in a plasma slab are described. The relationship of the propagation properties with frequencies of electromagnetic wave, and parameters of plasma (electron temperature, electron density, dimensionless collision frequency and the size of the plasma slab) is analyzed.

Static Study of Cantilever Beam stiction under Electrostatic Force Influence

The model and analysis of the cantilever beam adhesion problem under the action of electrostatic force are given. Owing to the nonlinearity of electrostatic force, the analytical solution for this kind of problem is not available. In this paper, a systematic method of generating polynomials which are the exact beamsolutions of the loads with different distributions is provided. The polynomials are used to approximate the beam displacement due to electrostatic force. The equilibrium equation offers an answer to how the beam deforms but no information about the unstuck length. The derivative of the functional with respect to the unstuck length offers such information. But to compute the functional it is necessary to know the beam deformation. So the problem is iteratively solved until the results are converged. Galerkin and Newton-Raphson methods are used to solve this nonlinear problem. The effects of dielectric layer thickness and electrostatic voltage on the cantilever beamstiction are studied.The method provided in this paper exhibits good convergence. For the adhesion problem of cantilever beam without electrostatic voltage, the analytical solution is available and is also exactly matched by the computational results given by the method presented in this paper.

Concentrated-Mass Cantilever Enhances Multiple Harmonics In Tapping-Mode Atomic Force Microscopy

The natural frequencies of a cantilever probe can be tuned with an attached concentrated mass to coincide with the higher harmonics generated in a tapping-mode atomic force microscopy by the nonlinear tip-sample interaction force. We provide a comprehensive map to guide the choice of the mass and the position of the attached particle in order to significantly enhance the higher harmonic signals containing information on the material properties. The first three eigenmodes can be simultaneously excited with only one carefully positioned particle of specific mass to enhance multiple harmonics. Accessing the interaction force qualitatively based on the high-sensitive harmonic signals combines the real-time material characterization with the imaging capability. (C) 2008 American Institute of Physics.