Analysis of grating inscribed micro-cantilever for high resolution AFM probe
| Data(s) |
2013
|
|---|---|
| Resumo |
We present a mathematical modelling and analysis of reflection grating etched Si AFM cantilever deflections under different loading conditions. A simple analysis of the effect of grating structures on cantilever deflection is carried out with emphasis on optimizing the beam and gratings such that maximum amount of diffracted light remains within the detector area. |
| Formato |
application/pdf |
| Identificador |
http://eprints.iisc.ernet.in/47554/1/icOPEN_balaji_2013.pdf Balajee, N and Mahapatra, Roy D and Hegde, GM (2013) Analysis of grating inscribed micro-cantilever for high resolution AFM probe. In: 2nd Conference of the Optics-and-Photonics-Society-of-Singapore / International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN), APR 09-11, 2013, Singapore, SINGAPORE. |
| Publicador |
SPIE-International Society for Optical Engineering |
| Relação |
http://dx.doi.org/10.1117/12.2020330 http://eprints.iisc.ernet.in/47554/ |
| Palavras-Chave | #Aerospace Engineering (Formerly, Aeronautical Engineering) |
| Tipo |
Conference Paper PeerReviewed |
