468 resultados para NANOSPHERE LITHOGRAPHY


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Grundlage für die hier gezeigte Arbeit stellt die Eigenschaft von amphiphilen Blockcopolymeren dar immer den Block mit der niedrigsten Grenzflächenenergie zum angrenzenden Medium an die Oberfläche zu bringen. Durch einen Austausch des Mediums an der Grenzfläche zum Blockcopolymer kann eine Reorientierung erzwungen werden, wenn die Grenzflächenenergie des anderen Blocks nun die niedrigere Grenzflächenenergie besitzt. Dieses Verhalten von dünnen amphiphilen Blockcopolymerfilmen wurde zur Strukturierung von Oberflächen ausgenutzt und in nachfolgenden Synthesen weiter verstärkt. Um dies zu erreichen wurde das zur Strukturierung erforderliche Poly(4-Octylstyrol)block(4-hydroxystyrol) durch kontrollierte radikalische Polymerisationsmethode mit dem Tempo Unimer (2,2,6,6-Tetramethyl-1-1(1-phenyl-ethoxy)-piperidin) synthetisiert. Für die geplanten Reorientierungen und Modifizierungen von Oberflächen wurden dünne Filme durch Schleuderbeschichtung auf verschiedenen Substraten (Siliziumwafern, Glassubstraten und Goldoberflächen) hergestellt. Das Verhalten der Oberflächen von diesen Filmen wurde durch Kontaktwinkelmessungen untersucht. Auf diese Weise konnte gezeigt werden, dass die Oberfläche von Polymerfilmen nach der Präparation aus dem hydrophoben Block des Polymers gebildet wird. Durch Kontakt des Polymerfilms mit Wasser kann dieser zur Reorientierung gebracht werden, so dass der hydrophile Block des Polymers an der Oberfläche erscheint. Dieses Verhalten wurde zur Strukturierung mit softlithographischen Techniken genutzt. Dazu wurden hydrophil/hydrophob strukturierte Oberflächen durch Aufsetzen von hydrophoben PDMS-Stempeln, die Teile der Oberfläche selektiv abdeckten, und Einbringen von Wasser in die dabei entstehenden Kapillaren hergestellt. Dies ermöglichte es die Oberfläche selektiv im Größenbereich von 500nm bis zu 50µm zu strukturieren und an den reaktiven Bereichen Materialien, wie z.B. Kupfer, Titandioxid, Polyelektrolyte, photonische Kristalle und angegraftete Polymere, mit verschiedenen Methoden selektiv auf die Oberfläche aufzubringen. Um den Reorganisationsprozess der Oberfläche genauer zu studieren, wurde ein für diese Aufgabe besser geeignetes Polymer (Poly(Styrol)-block-poly(essigsäure-2-(2-(4-vinyl-phenoxy)-ethoxy)ethylester)) synthetisiert. Aus diesem Blockcopolymer wurden wieder dünne Filme durch Spincoaten hergestellt. Die Reorientierung dieses Polymers in 70°C warmen Wasser konnte durch Kontaktwinkelmessungen und NEXAFS Spektroskopie nachgewiesen werden. Mit Hilfe der NEXAFS Spektroskopie konnte festgestellt werden, dass die Geschwindigkeit der Reorientierung durch eine exponentielle Funktion beschrieben werden kann. Eine Auswertung der Geschwindigkeitskonstante für die Reorientierung einer hydrophilen zu einer hydrophoben Oberfläche des Polymers bei 60°C führt zu =75min. Aufgrund des exponentiellen Charakters der Reorientierung macht es den Anschein, dass die Reorientierung bei verschiedenen Reorientierungstemperaturen bis zu einem gewissen Grad erfolgt und dann stoppt. Eine weitere Reorientierung scheint erst wieder bei einer Temperaturerhöhung zu beginnen. Aus AFM Messungen ist ein Beginnen der Reorientierung durch Bildung kleiner Löcher in der Polymeroberfläche zu erkennen, die sich zu runden Erhöhungen und Vertiefungen vergrößern, um letztendlich in ein spinodales Entmischungsmuster über zu gehen. Dieses heilt dann im Laufe der Zeit langsam durch Verschwinden der hydrophilen Bereiche langsam aus. Der Beginn des zuvor beschriebenen Reorientierungsprozesses einer hydrophilen Oberfläche in eine hydrophobe konnte sowohl in den AFM, als auch in den NEXAFS-Messungen zu ca. 50°C bestimmt werden.

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Regenerative medicine and tissue engineering attempt to repair or improve the biological functions of tissues that have been damaged or have ceased to perform their role through three main components: a biocompatible scaffold, cellular component and bioactive molecules. Nanotechnology provide a toolbox of innovative scaffold fabrication procedures in regenerative medicine. In fact, nanotechnology, using manufacturing techniques such as conventional and unconventional lithography, allows fabricating supports with different geometries and sizes as well as displaying physical chemical properties tunable over different length scales. Soft lithography techniques allow to functionalize the support by specific molecules that promote adhesion and control the growth of cells. Understanding cell response to scaffold, and viceversa, is a key issue; here we show our investigation of the essential features required for improving the cell-surface interaction over different scale lengths. The main goal of this thesis has been to devise a nanotechnology-based strategy for the fabrication of scaffolds for tissue regeneration. We made four types of scaffolds, which are able to accurately control cell adhesion and proliferation. For each scaffold, we chose properly designed materials, fabrication and characterization techniques.

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This thesis focuses on the controlled assembly of monodisperse polymer colloids into ordered two-dimensional arrangements. These assemblies, commonly referred to as colloidal monolayers, are subsequently used as masks for the generation of arrays of complex metal nanostructures on solid substrates.rnThe motivation of the research presented here is twofold. First, monolayer crystallization methods were developed to simplify the assembly of colloids and to produce more complex arrangements of colloids in a precise way. Second, various approaches to colloidal lithography are designed with the aim to include novel features or functions to arrays of metal nanostructures.rnThe air/water interface was exploited for the crystallization of colloidal monolayer architectures as it combines a two-dimensional confinement with a high lateral mobility of the colloids that is beneficial for the creation of high long range order. A direct assembly of colloids is presented that provides a cheap, fast and conceptually simple methodology for the preparation of ordered colloidal monolayers. The produced two-dimensional crystals can be transformed into non-close-packed architectures by a plasma-induced size reduction step, thus providing valuable masks for more sophisticated lithographic processes. Finally, the controlled co-assembly of binary colloidal crystals with defined stoichiometries on a Langmuir trough is introduced and characterized with respect to accessible configurations and size ratios. rnSeveral approaches to lithography are presented that aim at introducing different features to colloidal lithography. First, using metal-complex containing latex particles, the synthesis of which is described as well, symmetric arrays of metal nanoparticles can be created by controlled combustion of the organic material of the colloids. The process does not feature an inherent limit in nanoparticle size and is able to produce complex materials as will be demonstrated for FePt alloy particles. Precise control over both size and spacing of the particle array is presented. rnSecond, two lithographic processes are introduced to create sophisticated nanoparticle dimer units consisting of two crescent shaped nanostructures in close proximity; essentially by using a single colloid as mask to generate two structures simultaneously. Strong coupling processes of the parental plasmon resonances of the two objects are observed that are accompanied by high near-field enhancements. A plasmon hybridization model is elaborated to explain all polarization dependent shifts of the resonance positions. Last, a technique to produce laterally patterned, ultra-flat substrates without surface topographies by embedding gold nanoparticles in a silicon dioxide matrix is applied to construct robust and re-usable sensing architectures and to introduce an approach for the nanoscale patterning of solid supported lipid bilayer membranes. rn

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In the search to understand the interaction between cells and their underlying substrates, life sciences are beginning to incorporate micro and nano-technology based tools to probe, measure and improve cellular behavior. In this frame, patterned surfaces provide a platform for highly defined cellular interactions and, in perspective, they offer unique advantages for artificial implants. For these reasons, functionalized materials have recently become a central topic in tissue engineering. Nanotechnology, with its rich toolbox of techniques, can be the leading actor in the materials patterning field. Laser assisted methods, conventional and un-conventional lithography and other patterning techniques, allow the fabrication of functional supports with tunable properties, either physically, or topographically and chemically. Among them, soft lithography provides an effective (and low cost) strategy for manufacturing micro and nanostructures. The main focus of this work is the use of different fabrication approaches aiming at a precise control of cell behavior, adhesion, proliferation and differentiation, through chemically and spatially designed surfaces.

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Plasmabasierte Röntgenlaser sind aufgrund ihrer kurzen Wellenlänge und schma-rnlen spektralen Bandbreite attraktive Diagnose-Instrumente in einer Vielzahl potentieller Anwendungen, beispielsweise in den Bereichen Spektroskopie, Mikroskopie und EUV-Lithografie. Dennoch sind Röntgenlaser zum heutigen Stand noch nicht sehr weit verbreitet, was vorwiegend auf eine zu geringe Pulsenergie und für manche Anwendungen nicht hinreichende Strahlqualität zurückzuführen ist. In diesem Zusammenhang wurden in den letzten Jahren bedeutende Fortschritte erzielt. Die gleichzeitige Weiterentwicklung von Pumplasersystemen und Pumpmechanismen ermöglichte es, kompakte Röntgenlaserquellen mit bis zu 100 Hz zu betreiben. Um gleichzeitig höhere Pulsenergien, höhere Strahlqualität und volle räumliche Kohärenz zu erhalten, wurden intensive Studien theoretischer und experimenteller Natur durchgeführt. In diesem Kontext wurde in der vorliegenden Arbeit ein experimenteller Aufbau zur Kombination von zwei Röntgenlaser-Targets entwickelt, die sogenannte Butterfly-Konfiguration. Der erste Röntgenlaser wird dabei als sogenannter Seed für das zweite, als Verstärker dienende Röntgenlasermedium verwendet (injection-seeding). Aufrndiese Weise werden störende Effekte vermieden, welche beim Entstehungsprozessrndes Röntgenlasers durch die Verstärkung von spontaner Emission zustande kom-rnmen. Unter Verwendung des ebenfalls an der GSI entwickelten Double-Pulse Gra-rnzing Incidence Pumpschemas ermöglicht das hier vorgestellte Konzept, erstmaligrnbeide Röntgenlasertargets effizient und inklusive Wanderwellenanregung zu pum-rnpen.rnBei einer ersten experimentellen Umsetzung gelang die Erzeugung verstärkter Silber-Röntgenlaserpulse von 1 µJ bei 13.9 nm Wellenlänge. Anhand der gewonnenen Daten erfolgte neben dem Nachweis der Verstärkung die Bestimmung der Lebensdauer der Besetzungsinversion zu 3 ps. In einem Nachfolgeexperiment wurden die Eigenschaften eines Molybdän-Röntgenlaserplasmas näher untersucht. Neben dem bisher an der GSI angewandten Pumpschema kam in dieser Strahlzeit noch eine weitere Technik zum Einsatz, welche auf einem zusätzlichen Pumppuls basierte. In beiden Schemata gelang neben dem Nachweis der Verstärkung die zeitliche und räumliche Charakterisierung des Verstärkermediums. Röntgenlaserpulse mit bis zu 240 nJ bei einer Wellenlänge von 18.9 nm wurden nachgewiesen. Die erreichte Brillanz der verstärkten Pulse lag ca. zwei Größenordnungen über der des ursprünglichen Seeds und mehr als eine Größenordnung über der Brillanz eines Röntgenlasers, dessen Erzeugung auf der Verwendung eines einzelnen Targets basierte. Das in dieser Arbeitrnentwickelte und experimentell verifizierte Konzept birgt somit das Potential, extrem brillante plasmabasierte Röntgenlaser mit vollständiger räumlicher und zeitlicher Kohärenz zu erzeugen.rnDie in dieser Arbeit diskutierten Ergebnisse sind ein wesentlicher Beitrag zu der Entwicklung eines Röntgenlasers, der bei spektroskopischen Untersuchungen von hochgeladenen Schwerionen eingesetzt werden soll. Diese Experimente sind amrnExperimentierspeicherring der GSI und zukünftig auch am High-Energy StoragernRing der FAIR-Anlage vorgesehen.rn

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This dissertation describes the synthesis of surface attached hydrogel biomaterials, characterization of their properties, evaluation of structuring concepts and the investigation of these materials in the isolation of DNA from human whole blood. Photosensitive hydrogel precursor materials on the basis of hydroxyethylmethacrylate (HEMA) were synthesized by free radical polymerization. In order to obtain surface bound hydrogel films, the precursors were deposited on a suitable substrate and subsequently irradatiated with UV - light to accomplish the formation of crosslinks in the film and create surface attachment. The composition of the polymerization precursor materials was determined by comprehensive NMR and GPC studies, revealing the copolymerizationrnbehaviour of the used monomers - HEMA derivatives and the photocrosslinkerrnMABP - and their respective distribution in the hydrogel precursors. The degree of crosslinking of the hydrogels was characterized with UV/vis spectroscopy. Stress-strain measurements were conducted in order to investigate the mechanical properties of the biomaterials. Moreover, the swelling process and biomolecule adsorption properties of the hydrogels were investigated with SPR/OW spectroscopy. For this, the deposition and binding of the hydrogels on gold or SiO2 surfaces was facilitated with photocrosslinkable adhesion promotors. The produced hydrogels were mechanically rigid and stablernunder the conditions of PCR and blood lysis. Furthermore, strategies towards the increase of hydrogel surface structure and porosity with porosigens, 2D laser interference lithography and photocleavable blockcopolymers were investigated. At last, a combinatorial strategy was used for the determination of the usefulness of hydrogels for the isolation from DNA from blood. A series of functionalized hydrogel precursors were synthesized, transferred to the surface inside a PCR tube and subsequently screened in regard to DNA adsorption properties with Taqman quantitative PCR. This approach yielded a promising candidate for a functional PCR tube coating that would allow the entire DNA isolation procedure being carried out in a single reaction container.rnThereforce, the practical application of such macromolecular architectures can be envisioned to improve industrial DNA diagnostic processes.

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This thesis investigates metallic nanostructures exhibiting surface plasmon resonance for the amplification of fluorescence signal in sandwich immunoassays. In this approach, an analyte is captured by an antibody immobilized on a plasmonic structure and detected by a subsequently bound fluorophore labeled detection antibody. The highly confined field of surface plasmons originates from collective charge oscillations which are associated with high electromagnetic field enhancements at the metal surface and allow for greatly increased fluorescence signal from the attached fluorophores. This feature allows for improving the signal-to-noise ratio in fluorescence measurements and thus advancing the sensitivity of the sensor platform. In particular, the thesis presents two plasmonic nanostructures that amplify fluorescence signal in devices that rely on epifluorescence geometry, in which the fluorophore absorbs and emits light from the same direction perpendicular to the substrate surface.rnThe first is a crossed relief gold grating that supports propagating surface plasmon polaritons (SPPs) and second, gold nanoparticles embedded in refractive index symmetric environment exhibiting collective localized surface plasmons (cLSPs). Finite-difference time-domain simulations are performed in order to design structures for the optimum amplification of established Cy5 and Alexa Fluor 647 fluorophore labels with the absorption and emission wavelengths in the red region of spectrum. The design takes into account combined effect of surface plasmon-enhanced excitation rate, directional surface plasmon-driven emission and modified quantum yield for characteristic distances in immunoassays. Homebuilt optical instruments are developed for the experimental observation of the surface plasmon mode spectrum, measurements of the angular distribution of surface plasmon-coupled fluorescence light and a setup mimicking commercial fluorescence reading systems in epifluorescence geometry.rnCrossed relief grating structures are prepared by interference lithography and multiple copies are made by UV nanoimprint lithography. The fabricated crossed diffraction gratings were utilized for sandwich immunoassay-based detection of the clinically relevant inflammation marker interleukin 6 (IL-6). The enhancement factor of the crossed grating reached EF=100 when compared to a flat gold substrate. This result is comparable to the highest reported enhancements to date, for fluorophores with relatively high intrinsic quantum yield. The measured enhancement factor excellently agrees with the predictions of the simulations and the mechanisms of the enhancement are explained in detail. Main contributions were the high electric field intensity enhancement (30-fold increase) and the directional fluorescence emission at (4-fold increase) compared to a flat gold substrate.rnCollective localized surface plasmons (cLSPs) hold potential for even stronger fluorescence enhancement of EF=1000, due to higher electric field intensity confinement. cLSPs are established by diffractive coupling of the localized surface plasmon resonance (LSPR) of metallic nanoparticles and result in a narrow resonance. Due to the narrow resonance, it is hard to overlap the cLSPs mode with the absorption and emission bands of the used fluorophore, simultaneously. Therefore, a novel two resonance structure that supports SPP and cLSP modes was proposed. It consists of a 2D array of cylindrical gold nanoparticles above a low refractive index polymer and a silver film. A structure that supports the proposed SPP and cLSP modes was prepared by employing laser interference lithography and the measured mode spectrum was compared to simulation results.rn

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Interaction between differentiating neurons and the extracellular environment guides the establishment of cell polarity during nervous system development. Developing neurons read the physical properties of the local substrate in a contact-dependent manner and retrieve essential guidance cues. In previous works we demonstrated that PC12 cell interaction with nanogratings (alternating lines of ridges and grooves of submicron size) promotes bipolarity and alignment to the substrate topography. Here, we investigate the role of focal adhesions, cell contractility, and actin dynamics in this process. Exploiting nanoimprint lithography techniques and a cyclic olefin copolymer, we engineered biocompatible nanostructured substrates designed for high-resolution live-cell microscopy. Our results reveal that neuronal polarization and contact guidance are based on a geometrical constraint of focal adhesions resulting in an angular modulation of their maturation and persistence. We report on ROCK1/2-myosin-II pathway activity and demonstrate that ROCK-mediated contractility contributes to polarity selection during neuronal differentiation. Importantly, the selection process confined the generation of actin-supported membrane protrusions and the initiation of new neurites at the poles. Maintenance of the established polarity was independent from NGF stimulation. Altogether our results imply that focal adhesions and cell contractility stably link the topographical configuration of the extracellular environment to a corresponding neuronal polarity state.

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Microfluidic systems have become competitive tools in the invitro modelling of diseases and promising alternatives to animal studies. They allow obtaining more invivo like conditions for cellular assays. Research in idiopathic pulmonary fibrosis could benefit from this novel methodological approach to understand the pathophysiology of the disease & develop efficient therapies. The use of hepatocyte growth factor (HGF) for alveolar reepithelisation is a promising approach. In this study, we show a new microfluidic system to analyse the effects of HGF on injured alveolar epithelial cells. Microfluidic systems in polydimethylsiloxane were fabricated by soft lithography. The alveolar A549 epithelial cells (10,000 cells) were seeded and studied in these microfluidic systems with media perfusion (1μl/30min). Injury tests were made on the cells by the perfusion with media containing H2O2 or bleomycin. The degree of injury was then assessed by a metabolic and an apoptotic assays. Wound assays were also performed with a central laminar flow of trypsin. Monitoring of wound closure with HGF vs control media was assessed. The alveolar A549 epithelial cells grew and proliferated in the microfluidic system. In the wound closure assay, the degree of wound closure after 5 hours was (53.3±1.3%) with HGF compared to (9.8±2.4%) without HGF (P <0.001). We present a novel microfluidic model that allows culture, injury and wounding of A549 epithelial cells and represents the first step towards the development of an invitro reconstitution of the alveolar-capillary interface. We were also able to confirm that HGF increased alveolar epithelial repair in this system.

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Background: Microfluidics system are novel tools to study cell-cell interactions in vitro. This project focuses on the development of a new microfluidic device to co-culture alveolar epithelial cells and mesenchymal stem cells to study cellular interactions involved in healing the injured alveolar epithelium. Methods: Microfluidic systems in polydimethylsiloxane were fabricated by soft lithography. The alveolar A549 epithelial cells were seeded and injury tests were made on the cells by perfusion with media containing H2O2 or bleomycin during 6 or 18hrs. Rat Bone marrow derived stromal cells (BMSC) were then introduced into the system and cell-cell interaction was studied over 24 hrs. Results: A successful co-culture of A549 alveolar epithelial cells and BMS was achieved in the microfluidic system. The seeded alveolar epithelial cells and BMSC adhered to the bottom surface of the microfluidic device and proliferated under constant perfusion. Epithelial injury to mimic mechanisms seen in idiopathic pulmonary fibrosis was induced in the microchannels by perfusing with H2O2 or bleomycin. Migration of BMSC towards the injured epithelium was observed as well as cell-cell interaction between the two cell types was also seen. Conclusion: We demonstrate a novel microfluidic device aimed at showing interactions between different cell types on the basis of a changing microenvironment. Also we were able to confirm interaction between injured alvolar epithelium and BMSC, and showed that BMSC try to heal the injured epitelium.

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As the demand for miniature products and components continues to increase, the need for manufacturing processes to provide these products and components has also increased. To meet this need, successful macroscale processes are being scaled down and applied at the microscale. Unfortunately, many challenges have been experienced when directly scaling down macro processes. Initially, frictional effects were believed to be the largest challenge encountered. However, in recent studies it has been found that the greatest challenge encountered has been with size effects. Size effect is a broad term that largely refers to the thickness of the material being formed and how this thickness directly affects the product dimensions and manufacturability. At the microscale, the thickness becomes critical due to the reduced number of grains. When surface contact between the forming tools and the material blanks occur at the macroscale, there is enough material (hundreds of layers of material grains) across the blank thickness to compensate for material flow and the effect of grain orientation. At the microscale, there may be under 10 grains across the blank thickness. With a decreased amount of grains across the thickness, the influence of the grain size, shape and orientation is significant. Any material defects (either natural occurring or ones that occur as a result of the material preparation) have a significant role in altering the forming potential. To date, various micro metal forming and micro materials testing equipment setups have been constructed at the Michigan Tech lab. Initially, the research focus was to create a micro deep drawing setup to potentially build micro sensor encapsulation housings. The research focus shifted to micro metal materials testing equipment setups. These include the construction and testing of the following setups: a micro mechanical bulge test, a micro sheet tension test (testing micro tensile bars), a micro strain analysis (with the use of optical lithography and chemical etching) and a micro sheet hydroforming bulge test. Recently, the focus has shifted to study a micro tube hydroforming process. The intent is to target fuel cells, medical, and sensor encapsulation applications. While the tube hydroforming process is widely understood at the macroscale, the microscale process also offers some significant challenges in terms of size effects. Current work is being conducted in applying direct current to enhance micro tube hydroforming formability. Initially, adding direct current to various metal forming operations has shown some phenomenal results. The focus of current research is to determine the validity of this process.

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The single electron transistor (SET) is a charge-based device that may complement the dominant metal-oxide-semiconductor field effect transistor (MOSFET) technology. As the cost of scaling MOSFET to smaller dimensions are rising and the the basic functionality of MOSFET is encountering numerous challenges at dimensions smaller than 10nm, the SET has shown the potential to become the next generation device which operates based on the tunneling of electrons. Since the electron transfer mechanism of a SET device is based on the non-dissipative electron tunneling effect, the power consumption of a SET device is extremely low, estimated to be on the order of 10^-18J. The objectives of this research are to demonstrate technologies that would enable the mass produce of SET devices that are operational at room temperature and to integrate these devices on top of an active complementary-MOSFET (CMOS) substrate. To achieve these goals, two fabrication techniques are considered in this work. The Focus Ion Beam (FIB) technique is used to fabricate the islands and the tunnel junctions of the SET device. A Ultra-Violet (UV) light based Nano-Imprint Lithography (NIL) call Step-and-Flash- Imprint Lithography (SFIL) is used to fabricate the interconnections of the SET devices. Combining these two techniques, a full array of SET devices are fabricated on a planar substrate. Test and characterization of the SET devices has shown consistent Coulomb blockade effect, an important single electron characteristic. To realize a room temperature operational SET device that function as a logic device to work along CMOS, it is important to know the device behavior at different temperatures. Based on the theory developed for a single island SET device, a thermal analysis is carried out on the multi-island SET device and the observation of changes in Coulomb blockade effect is presented. The results show that the multi-island SET device operation highly depends on temperature. The important parameters that determine the SET operation is the effective capacitance Ceff and tunneling resistance Rt . These two parameters lead to the tunneling rate of an electron in the SET device, Γ. To obtain an accurate model for SET operation, the effects of the deviation in dimensions, the trap states in the insulation, and the background charge effect have to be taken into consideration. The theoretical and experimental evidence for these non-ideal effects are presented in this work.

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The single-electron transistor (SET) is one of the best candidates for future nano electronic circuits because of its ultralow power consumption, small size and unique functionality. SET devices operate on the principle of Coulomb blockade, which is more prominent at dimensions of a few nano meters. Typically, the SET device consists of two capacitively coupled ultra-small tunnel junctions with a nano island between them. In order to observe the Coulomb blockade effects in a SET device the charging energy of the device has to be greater that the thermal energy. This condition limits the operation of most of the existing SET devices to cryogenic temperatures. Room temperature operation of SET devices requires sub-10nm nano-islands due to the inverse dependence of charging energy on the radius of the conducting nano-island. Fabrication of sub-10nm structures using lithography processes is still a technological challenge. In the present investigation, Focused Ion Beam based etch and deposition technology is used to fabricate single electron transistors devices operating at room temperature. The SET device incorporates an array of tungsten nano-islands with an average diameter of 8nm. The fabricated devices are characterized at room temperature and clear Coulomb blockade and Coulomb oscillations are observed. An improvement in the resolution limitation of the FIB etching process is demonstrated by optimizing the thickness of the active layer. SET devices with structural and topological variation are developed to explore their impact on the behavior of the device. The threshold voltage of the device was minimized to ~500mV by minimizing the source-drain gap of the device to 17nm. Vertical source and drain terminals are fabricated to realize single-dot based SET device. A unique process flow is developed to fabricate Si dot based SET devices for better gate controllability in the device characteristic. The device vi parameters of the fabricated devices are extracted by using a conductance model. Finally, characteristic of these devices are validated with the simulated data from theoretical modeling.

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We present the design, fabrication, and testing of a microelectromechanical systems (MEMS) light modulator based on pixels patterned with periodic nanohole arrays. Flexure-suspended silicon pixels are patterned with a two dimensional array of 150 nm diameter nanoholes using nanoimprint lithography. A top glass plate assembled above the pixel array is used to provide a counter electrode for electrostatic actuation. The nanohole pattern is designed so that normally-incident light is coupled into an in-plane grating resonance, resulting in an optical stop-band at a desired wavelength. When the pixel is switched into contact with the top plate, the pixel becomes highly reflective. A 3:1 contrast ratio at the resonant wavelength is demonstrated for gratings patterned on bulk Si substrates. The switching time is 0.08 ms and the switching voltage is less than 15V.

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Free-radical retrograde-precipitation polymerization, FRRPP in short, is a novel polymerization process discovered by Dr. Gerard Caneba in the late 1980s. The current study is aimed at gaining a better understanding of the reaction mechanism of the FRRPP and its thermodynamically-driven features that are predominant in controlling the chain reaction. A previously developed mathematical model to represent free radical polymerization kinetics was used to simulate a classic bulk polymerization system from the literature. Unlike other existing models, such a sparse-matrix-based representation allows one to explicitly accommodate the chain length dependent kinetic parameters. Extrapolating from the past results, mixing was experimentally shown to be exerting a significant influence on reaction control in FRRPP systems. Mixing alone drives the otherwise severely diffusion-controlled reaction propagation in phase-separated polymer domains. Therefore, in a quiescent system, in the absence of mixing, it is possible to retard the growth of phase-separated domains, thus producing isolated polymer nanoparticles (globules). Such a diffusion-controlled, self-limiting phenomenon of chain growth was also observed using time-resolved small angle x-ray scattering studies of reaction kinetics in quiescent systems of FRRPP. Combining the concept of self-limiting chain growth in quiescent FRRPP systems with spatioselective reaction initiation of lithography, microgel structures were synthesized in a single step, without the use of molds or additives. Hard x-rays from the bending magnet radiation of a synchrotron were used as an initiation source, instead of the more statistally-oriented chemical initiators. Such a spatially-defined reaction was shown to be self-limiting to the irradiated regions following a polymerization-induced self-assembly phenomenon. The pattern transfer aspects of this technique were, therefore, studied in the FRRP polymerization of N-isopropylacrylamide (NIPAm) and methacrylic acid (MAA), a thermoreversible and ionic hydrogel, respectively. Reaction temperature increases the contrast between the exposed and unexposed zones of the formed microgels, while the irradiation dose is directly proportional to the extent of phase separation. The response of Poly (NIPAm) microgels prepared from the technique described in this study was also characterized by small angle neutron scattering.