Copper Diffusion Barrier Deposition on Integrated Circuit Devices by Atomic Layer Deposition Technique

Transfer from aluminum to copper metallization and decreasing feature size of integrated circuit devices generated a need for new diffusion barrier process. Copper metallization comprised entirely new process flow with new materials such as low-k insulators and etch stoppers, which made the diffusion barrier integration demanding. Atomic Layer Deposition technique was seen as one of the most promising techniques to deposit copper diffusion barrier for future devices. Atomic Layer Deposition technique was utilized to deposit titanium nitride, tungsten nitride, and tungsten nitride carbide diffusion barriers. Titanium nitride was deposited with a conventional process, and also with new in situ reduction process where titanium metal was used as a reducing agent. Tungsten nitride was deposited with a well-known process from tungsten hexafluoride and ammonia, but tungsten nitride carbide as a new material required a new process chemistry. In addition to material properties, the process integration for the copper metallization was studied making compatibility experiments on different surface materials. Based on these studies, titanium nitride and tungsten nitride processes were found to be incompatible with copper metal. However, tungsten nitride carbide film was compatible with copper and exhibited the most promising properties to be integrated for the copper metallization scheme. The process scale-up on 300 mm wafer comprised extensive film uniformity studies, which improved understanding of non-uniformity sources of the ALD growth and the process-specific requirements for the ALD reactor design. Based on these studies, it was discovered that the TiN process from titanium tetrachloride and ammonia required the reactor design of perpendicular flow for successful scale-up. The copper metallization scheme also includes process steps of the copper oxide reduction prior to the barrier deposition and the copper seed deposition prior to the copper metal deposition. Easy and simple copper oxide reduction process was developed, where the substrate was exposed gaseous reducing agent under vacuum and at elevated temperature. Because the reduction was observed efficient enough to reduce thick copper oxide film, the process was considered also as an alternative method to make the copper seed film via copper oxide reduction.

A Historical Approach to Children s Physics Education : Modelling of DC-circuit Phenomena in a Small Group

This three-phase design research describes the modelling processes for DC-circuit phenomena. The first phase presents an analysis of the development of the DC-circuit historical models in the context of constructing Volta s pile at the turn of the 18th century. The second phase involves the designing of a teaching experiment for comprehensive school third graders. Among other considerations, the design work utilises the results of the first phase and research literature of pupils mental models for DC-circuit phenomena. The third phase of the research was concerned with the realisation of the planned teaching experiment. The aim of this phase was to study the development of the external representations of DC-circuit phenomena in a small group of third graders. The aim of the study has been to search for new ways to guide pupils to learn DC-circuit phenomena while emphasing understanding at the qualitative level. Thus, electricity, which has been perceived as a difficult and abstract subject, could be learnt more comprehensively. Especially, the research of younger pupils learning of electricity concepts has not been of great interest at the international level, although DC-circuit phenomena are also taught in the lower classes of comprehensive schools. The results of this study are important, because there has tended to be more teaching of natural sciences in the lower classes of comprehensive schools, and attempts are being made to develop this trend in Finland. In the theoretical part of the research an Experimental-centred representation approach, which emphasises the role of experimentalism in the development of pupil s representations, is created. According to this approach learning at the qualitative level consists of empirical operations like experimenting, observations, perception, and prequantification of nature phenomena, and modelling operations like explaining and reasoning. Besides planning teaching, the new approach can be used as an analysis tool in describing both historical modelling and the development of pupils representations. In the first phase of the study, the research question was: How did the historical models of DC-circuit phenomena develop in Volta s time? The analysis uncovered three qualitative historical models associated with the historical concept formation process. The models include conceptions of the electric circuit as a scene in the DC-circuit phenomena, the comparative electric-current phenomenon as a cause of different observable effect phenomena, and the strength of the battery as a cause of the electric-current phenomenon. These models describe the concept formation process and its phases in Volta s time. The models are portrayed in the analysis using fragments of the models, where observation-based fragments and theoretical fragements are distinguished from each other. The results emphasise the significance of the qualitative concept formation and the meaning of language in the historical modelling of DC-circuit phenomena. For this reason these viewpoints are stressed in planning the teaching experiment in the second phase of the research. In addition, the design process utilised the experimentation behind the historical models of DC-circuit phenomena In the third phase of the study the research question is as follows: How will the small group s external representations of DC-circuit phenomena develop during the teaching experiment? The main question is divided into the following two sub questions: What kind of talk exists in the small group s learning? What kinds of external representations for DC-circuit phenomena exist in the small group discourse during the teaching experiment? The analysis revealed that the teaching experiment of the small group succeeded in its aim to activate talk in the small group. The designed connection cards proved especially successful in activating talk. The connection cards are cards that represent the components of the electric circuit. In the teaching experiment the pupils constructed different connections with the connection cards and discussed, what kinds of DC-circuit phenomena would take place in the corresponding real connections. The talk of the small group was analysed by comparing two situations, firstly, when the small group discussed using connections made with the connection cards and secondly with the same connections using real components. According to the results the talk of the small group included more higher-order thinking when using the connection cards than with similar real components. In order to answer the second sub question concerning the small group s external representations that appeared in the talk during the teaching experiment; student talk was visualised by the fragment maps which incorporate the electric circuit, the electric current and the source voltage. The fragment maps represent the gradual development of the external representations of DC-circuit phenomena in the small group during the teaching experiment. The results of the study challenge the results of previous research into the abstractness and difficulty of electricity concepts. According to this research, the external representations of DC-circuit phenomena clearly developed in the small group of third graders. Furthermore, the fragment maps uncover that although the theoretical explanations of DC-circuit phenomena, which have been obtained as results of typical mental model studies, remain undeveloped, learning at the qualitative level of understanding does take place.

Theoretical modeling of ionospheric electrodynamics including induction effects

This thesis deals with theoretical modeling of the electrodynamics of auroral ionospheres. In the five research articles forming the main part of the thesis we have concentrated on two main themes: Development of new data-analysis techniques and study of inductive phenomena in the ionospheric electrodynamics. The introductory part of the thesis provides a background for these new results and places them in the wider context of ionospheric research. In this thesis we have developed a new tool (called 1D SECS) for analysing ground based magnetic measurements from a 1-dimensional magnetometer chain (usually aligned in the North-South direction) and a new method for obtaining ionospheric electric field from combined ground based magnetic measurements and estimated ionospheric electric conductance. Both these methods are based on earlier work, but contain important new features: 1D SECS respects the spherical geometry of large scale ionospheric electrojet systems and due to an innovative way of implementing boundary conditions the new method for obtaining electric fields can be applied also at local scale studies. These new calculation methods have been tested using both simulated and real data. The tests indicate that the new methods are more reliable than the previous techniques. Inductive phenomena are intimately related to temporal changes in electric currents. As the large scale ionospheric current systems change relatively slowly, in time scales of several minutes or hours, inductive effects are usually assumed to be negligible. However, during the past ten years, it has been realised that induction can play an important part in some ionospheric phenomena. In this thesis we have studied the role of inductive electric fields and currents in ionospheric electrodynamics. We have formulated the induction problem so that only ionospheric electric parameters are used in the calculations. This is in contrast to previous studies, which require knowledge of the magnetospheric-ionosphere coupling. We have applied our technique to several realistic models of typical auroral phenomena. The results indicate that inductive electric fields and currents are locally important during the most dynamical phenomena (like the westward travelling surge, WTS). In these situations induction may locally contribute up to 20-30% of the total ionospheric electric field and currents. Inductive phenomena do also change the field-aligned currents flowing between the ionosphere and magnetosphere, thus modifying the coupling between the two regions.

Raman spectrum of guanidinium aluminium sulphate hexahydrate

The Raman spectrum of guanidinium aluminium sulphate hexahydrate also known as ‘GASH’ which is a ferro-electric crystal and has strong hydrogen bonds has been recorded. 38 Raman lines have been identified in the spectra of GASH. The O-H stretching mode is found to be very much influenced by the hydrogen bond and they appear over a widely extended region from 2240–3600 cm.−1 It can therefore be concluded that all the O-H bonds are hydrogen bonded and some of them are quite strong. The Raman lines due to the N-H vibrations appear with the normal frequency shifts indicating thereby that N-H bonds are not hydrogen bonded. These conclusions are fully supported by the results obtained from the X-ray crystal structure analysis of GASH. The principal vibrations of the Al-(OH2)6 groups have also been identified.

Analysis Of The Hvdc Turbine Generator Torsional Interactions

In the recent past it has been found that HVDC transmission systems and turbine-generator shaft torsional dynamics can interact in an unfavourable manner. This paper presents a detailed linearised state space model of AC/DC system to study this torsional interaction. The model developed is used to study the effect of various system parameters, such as, dc line loading, converter firing angle, the firing scheme employed. The results obtained are compared with those given in[3].

A New Structure Preserving Energy Function Incorporating Transmission Line Resistances

A novel method to account for the transmission line resistances in structure preserving energy functions (SPEF) is presented in this paper. The method exploits the equivalence of a lossy network having the same conductance to susceptance ratio for all its elements to a lossless network with a new set of power injections. The system equations and the energy function are developed using centre of inertia (COI) variables and the loads are modelled as arbitrary functions of respective bus voltages. The application of SPEF to direct transient stability evaluation is presented considering a realistic power system example.

DTC Technique for Induction Machine based Integrated Starter-Generator of an Automobile

This paper mainly concentrates on the application of the direct torque control (DTC) technique for the induction machine based integrated startergenerator (ISG) for automobile applications. It also discusses in brief about the higher DC bus voltage requirements in the automobiles i.e. present 14V system vs. 42V system to meet the power requirements, modes of operation of ISG, electric machine and the drive selection for the ISG,description of DTC technique, simulation and experimental results, and implementation.

Simplified Analysis of Steady-State Performance of a Voltage Controlled Induction Motor Drive

Utilizing a circuit model [1, 2] of an induction motor, a simplified analysis of steady state performance of a voltage controlled induction motor (VCIM) drive is described in this paper. By solving a set of nonlinear algebraic equations which describe the VCIM drive under steady operation, the operating variables such as constant components of torque, rotor flux linkages, fundamental components of stator voltage and current and phase angle are obtained for any given value of slip, triggering angle and supply voltage.

Study Of The Hvdc-Torsional Interactions Through Digital Dynamic Simulation

This paper presents the detailed dynamic digital simulation for the study of phenomenon of torsional interaction between HVDC-Turbine generator shaft, dynamics using the novel converter model presented in [ 1 ] The system model includes detailed representation of the synchronous generator and the shaft dynamics, the ac and dc network transients. The results of a case study indicate the various factors that influence the torsional interaction.

Concepts of Static Var System Control For Enhancing Power Transfer in Long Transmission Lines

This paper is concerned with the influence of different levels of complexity in modelling various constituent subsystems on the dynamic stability of power systems compensated by static var systems (SVS) operating on pure voltage control. The system components investigated include thyristor controlled reactor (TCR) transients, SVS delays, network transients, the synchronous generator and automatic voltage regulator (AVR). An overall model is proposed which adequately describes the system performance for small signal perturbations. The SVS performance is validated through detailed nonlinear simulation on a physical simulator.

Analysis of Torsional Interactions with Power System Stabilizer

Torsional interactions can occur due to the speed input Power System Stabilizer (PSS) that are primarily used to damp low frequency oscillations. The solution to this problem can be either in the form of providing a torsional filter or developing an alternate signal for the PSS. This paper deals with the formulation of a linearized state space model of the system and study of the interactions using eigenvalue analysis. The effects of the parameters of PSS and control signals on the damping of torsional modes are investigated.

Influence of Bi 3+ ions in enhancing the magnitude of positive temperature coefficients of resistance in n-BaTiO3 ceramics

Bi3+ ions substituting at Ba-sites in a limited concentration range with another donor dopant occupying the Ti-sites in polycrystalline BaTiO3 enhanced the positive temperature coefficient of resistance (PTCR) by over seven orders of magnitude. These ceramics did not require normal post sinter annealing or a change to an oxygen atmosphere during annealing. These ceramics had low porosities coupled with better stabilities to large applied electric fields and chemically reducing atmospheres. Bi3+ ions limited the grain growth to less than 8 mum in size, they enhanced the concentration of acceptor-type trap centres at the grain-boundary-layer regions and maintained complete tetragonality at low grain sizes in BaTiO3 ceramics.

PC based integrated protection scheme for railway traction applications

This paper presents the design and development of a comprehensive digital protection scheme for applications in 25 KV a.c railway traction system. The scheme provides distance protection, detection of wrong phase coupling both in the lagging and leading directions, high set instantaneous trip and PT fuse failure. Provision is also made to include fault location and disturbance recording. The digital relaying scheme has been tried on two types of hardware platforms, one with PC/AT based hardware and the other with a custom designed standalone 16-bit microcontroller based card. Compared to the existing scheme, the operating time is around one cycle and the relaying algorithm has been optimised to minimise the number of computations. The prototype has been rigorously tested in the laboratory using a specially designed PC based relay test bench and the results are highly satisfactory.

Direct Evaluation Of Transient Stability Improvement With Static Var Compensators Using A Structure Preserving Energy Function

The ability of Static Var Compensators (SVCs) to rapidly and continuously control reactive power in response to changing system conditions can result in the improvement of system stability and also increase the power transfer in the transmission system. This paper concerns the application of strategically located SVCs to enhance the transient stability limits and the direct evaluation of the effect of these SVCs on transient stability using a Structure Preserving Energy Function (SPEF). The SVC control system can be modelled from the steady- state control characteristic to accurately simulate its effect on transient stability. Treating the SVC as a voltage-dependent reactive power load leads to the derivation of a path-independent SPEF for the SVC. Case studies on a 10-machine test system using multiple SVCs illustrate the effects of SVCs on transient stability and its accurate prediction.

Charge-ordering in manganates

Ordering of Mn3+ and Mn4+ ions occurs in the rare earth manganates of the general composition Ln(1-x)A(x)MnO(3) (Ln rare earth, A = Ca, Sr). Such charge-ordering is associated with antiferromagnetic and insulating properties. This phenomenon is to be contrasted with the ferromagnetic metallic behavior that occurs when double-exchange between the Mn3+ and Mn4+ ions predominates. Two distinct types of charge-ordering can be delineated. In one, a ferromagnetic metallic (FMM) state transforms to the charge-ordered (CO) state on cooling. In the other scenario, the CO state is found in the paramagnetic ground stale and there is no ferromagnetism down to the lowest temperatures. Magnetic fields transform the CO state to the FMM state, when the average radius of the A-site cations is sufficiently large ([r(A)] > 1.17 Angstrom). Chemical melting of the CO state by Cr3+ substitution in the Mn site is also found only when [r(A)] greater than or similar to 1.17 Angstrom. The effect of the size of the A-cations on the Mn-O-Mn angle is not enough to explain the observed variations of the charge-ordering temperature as well as the ferromagnetic Curie temperature T-c. An explanation based on a competition between the Mn and A-cation orbitals for sigma-bonding with the oxygen rho(sigma) orbitals is considered to account for the large changes in T-c and hence the true bandwidth, with [r(A]). Effects of radiation, electric field, and other factors on the CO state are discussed along with charge-ordering in other manganate systems. Complex phase transitions, accompanied by changes in electronic and magnetic properties, occur in manganates with critical values of(rA) Or bandwidth. Charge-ordering is found in layered manganates, BixCa1-xMnO3 and CaMnO3-delta.