987 resultados para lithographic projection system
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Cover title: Towards the development of a county employment projection system for the state of Illinois.
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提出了一种检测光刻机投影物镜密集线焦深(DOF)的新技术。该技术将具有精细结构的测量标记曝光在硅片上,硅片显影后,由光学对准系统获取曝光在硅片上的测量标记图形的对准位置信息,根据对准位置信息计算得到视场中各点的焦深。与传统的FEM焦深测试技术相比,该技术具有测量精度高、速度快、成本低、操作简单等优点,在光刻工艺参数优化及光刻设备性能评价等方面有很好的应用前景。
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In this paper, we propose a novel method for measuring the coma aberrations of lithographic projection optics based on relative image displacements at multiple illumination settings. The measurement accuracy of coma can be improved because the phase-shifting gratings are more sensitive to the aberrations than the binary gratings used in the TAMIS technique, and the impact of distortion on displacements of aerial image can be eliminated when the relative image displacements are measured. The PROLITH simulation results show that, the measurement accuracy of coma increases by more than 25% under conventional illumination, and the measurement accuracy of primary coma increases by more than 20% under annular illumination, compared with the TAMIS technique. (c) 2007 Optical Society of America.
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提出了一种新的光刻机像质参数热漂移原位检测技术(TDFM)。详细分析了该技术利用镜像测试标记检测投影物镜最佳焦面热漂移与放大倍率热漂移的基本原理。实验结果表明TDFM技术可同时实现最佳焦面热漂移(FFT)与放大倍率热漂移(MFT)的精确测量。与现有的放大倍率热漂移检测技术相比,该技术有效地解决了放大倍率热漂移技术中放大倍率热漂移受最佳焦面热漂移影响的问题,简化了光刻机像质参数前馈校正的测试过程,测试成本与耗时均减少50%。
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对比了背投领域几种主要技术的原理和性能特点,同时介绍了多媒体投影系统所需要的各类光学薄膜的作用,参数和光学性能;并针对该领域国内外最新研究状况进行了调研,给出了现在所面临的关键技术难题并对其发展前景做了预测。
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The latest coupled configuration of the Met Office Unified Model (Global Coupled configuration 2, GC2) is presented. This paper documents the model components which make up the configuration (although the scientific description of these components is detailed elsewhere) and provides a description of the coupling between the components. The performance of GC2 in terms of its systematic errors is assessed using a variety of diagnostic techniques. The configuration is intended to be used by the Met Office and collaborating institutes across a range of timescales, with the seasonal forecast system (GloSea5) and climate projection system (HadGEM) being the initial users. In this paper GC2 is compared against the model currently used operationally in those two systems. Overall GC2 is shown to be an improvement on the configurations used currently, particularly in terms of modes of variability (e.g. mid-latitude and tropical cyclone intensities, the Madden–Julian Oscillation and El Niño Southern Oscillation). A number of outstanding errors are identified with the most significant being a considerable warm bias over the Southern Ocean and a dry precipitation bias in the Indian and West African summer monsoons. Research to address these is ongoing.
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Includes bibliography
Visualização da informação colaborativa por meio de um ambiente multiprojetado e dispositivos móveis
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Pós-graduação em Ciência da Computação - IBILCE
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Coordenação de Aperfeiçoamento de Pessoal de Nível Superior (CAPES)
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The decision when to cross a street safely is a challenging task that poses high demands on perception and cognition. Both can be affected by normal aging, neurodegenerative disorder, and brain injury, and there is an increasing interest in studying street-crossing decisions. In this article, we describe how driving simulators can be modified to study pedestrians' street-crossing decisions. The driving simulator's projection system and the virtual driving environment were used to present street-crossing scenarios to the participants. New sensors were added to measure when the test person starts to cross the street. Outcome measures were feasibility, usability, task performance, and visual exploration behavior, and were measured in 15 younger persons, 15 older persons, and 5 post-stroke patients. The experiments showed that the test is feasible and usable, and the selected difficulty level was appropriate. Significant differences in the number of crashes between young participants and patients (p = .001) as well as between healthy older participants and patients (p = .003) were found. When the approaching vehicle's speed is high, significant differences between younger and older participants were found as well (p = .038). Overall, the new test setup was well accepted, and we demonstrated that driving simulators can be used to study pedestrians' street-crossing decisions.
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A method for fast colour and geometric correction of a tiled display system is presented in this paper. Such kind of displays are a common choice for virtual reality applications and simulators, where a high resolution image is required. They are the cheapest and more flexible alternative for large image generation but they require a precise geometric and colour correction. The purpose of the proposed method is to correct the projection system as fast as possible so in case the system needs to be recalibrated it doesn’t interfere with the normal operation of the simulator or virtual reality application. This technique makes use of a single conventional webcam for both geometric and photometric correction. Some previous assumptions are made, like planar projection surface and negligibleintra-projector colour variation and black-offset levels. If these assumptions hold true, geometric and photometric seamlessness can be achievedfor this kind of display systems. The method described in this paper is scalable for an undefined number of projectors and completely automatic.
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Este proyecto está orientado al diseño y el acondicionamiento de una sala de cine siguiendo las normas establecidas por el SMPTE. El primer paso a realizar será el diseño de la sala en el cual habrá que tener en cuenta la distribución de los asientos dentro de la misma, el dimensionado de la pantalla que servirá para establecer la forma y dimensiones del recinto, así como la correcta ubicación del proyector. Posteriormente se realizará el acondicionamiento acústico del cine, con la elección de los diferentes materiales que permitan la obtención de un tiempo de reverberación óptimo. A continuación se procederá a la selección de los equipos electroacústicos más adecuados y a su colocación a lo largo de la sala para posteriormente realizar un estudio de todos los parámetros de esta para garantizar la perfecta escucha dentro de la misma. Se elegirán, al igual que se ha hecho con los elementos electroacústicos, los equipos de video específicos, teniendo en cuenta el sistema de proyección 3D utilizado y se procederá a su instalación dentro de la sala. Se indicará de forma independiente cual será el esquema de conexionado correspondiente a cada una de las partes, tanto de audio como de video. Todos los equipos y parámetros ajustables de la sala, tanto de audio como de video, se realizaran siguiendo las recomendaciones establecidas por el SMPTE para una correcta visión y escucha, así como también el diseño de la sala. Para llevar a cabo todo lo anteriormente descrito se utilizara el programa de simulación EASE 4.3 con él que se ajustaran los parámetros más significativos para verificar que la sala cumple con las condiciones de escucha que determina la norma. Todo esto irá acompañado de un presupuesto detallado de cada uno de los equipos y materiales utilizados, así como de los costes derivados de la mano de obra. Se adjuntarán también los planos de la sala donde se indicarán todas las medidas establecidas a lo largo del proyecto. Para la realización de estos se utilizara el programa de diseño Google SkechUp. Por último se facilitarán las hojas de características de cada uno de los equipos instalados en la sala para conocer sus especificaciones y modo de funcionamiento. Abstract This project is orientated at designing and conditioning a cinema according to standards set by the SMPTE. First of all, the cinema hall needs to be designed, taking into consideration seat distribution and screen dimension, in order to establish the shape and dimensions of the room and the correct location for the projector. Later the acoustic conditioning of the cinema is covered, with the choice of appropriate materials in order to permit an optimum reverberation time. The next step is the selection of the most appropriate electro-acoustic equipment and its positioning throughout the room. A study is then carried out of all the parameters to ensure perfect hearing in the cinema. Then the specific video equipment is chosen, bearing in mind the 3D projection system used and is installed in the theatre. A wiring diagram is indicated for each element used, for both audio and video. All equipment and adjustable parameters of the room, both audio and video, are made according to the recommendations established by the SMPTE for correct viewing and listening, as is the design of the cinema. To carry out the steps described above the EASE 4.3 simulation program is used. This program adjusts all significant parameters to verify that the room complies with the listening conditions determined by the standard. A detailed budget is included for all equipment and materials used, as well as the labour costs. Plans of the room, showing all measurements taken during the project are indicated. This is done using the Google SkechUp program. Finally data sheets are provided for each piece of equipment installed in the room detailing specifications and operating mode.
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This paper describes a novel approach to phonotactic LID, where instead of using soft-counts based on phoneme lattices, we use posteriogram to obtain n-gram counts. The high-dimensional vectors of counts are reduced to low-dimensional units for which we adapted the commonly used term i-vectors. The reduction is based on multinomial subspace modeling and is designed to work in the total-variability space. The proposed technique was tested on the NIST 2009 LRE set with better results to a system based on using soft-counts (Cavg on 30s: 3.15% vs 3.43%), and with very good results when fused with an acoustic i-vector LID system (Cavg on 30s acoustic 2.4% vs 1.25%). The proposed technique is also compared with another low dimensional projection system based on PCA. In comparison with the original soft-counts, the proposed technique provides better results, reduces the problems due to sparse counts, and avoids the process of using pruning techniques when creating the lattices.
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The proximity between Europe and Africa and the fact that the Strait of Gibraltar has historically acted as a link between races, cultures and religions have made absolutely necessary to establish a relationship between the Northern African coast and the Southern European equivalent. From the Nineteenth Century the possibility of building a permanent link between both continents through the Strait of Gibraltar has been taken into account. In order to establish that relationship it is necessary to have coastal zones completely geo-referenced, under the same geodetic system and with a unique projection system. The paper describes the work carried out in the Strait of Gibraltar for this purpose.