Nano-Hardness Tester and its Application in MEMS

微机电系统(MEMS)技术的迅速崛起,推动了对其所用材料和结构的力学性能研究。简要介绍纳米硬度技术的发展展、理论模型和MTS公司的Nano Indenter XP系统的配置、测量原理及功能。并根据我们的一些研究结果,说明它在微机电系统中的应用。

An New Area Function for Sharp indenter Tips in Nanoindentation

A new area function is introduced and applied to a Berkovich tip in order to characterize the contact projected area between an indenter and indented material. The function can be related directly to tip-rounding, thereby having obviously physical meaning. Nanoindentation experiments are performed on a commercial Nano Indenter XPsystem. The other two area functions introduced by Oliver and Pharr and by Thurn and Cook respectively are involved in this paper for comparison. By comparison from experimental results among different area functions, the indenter tip described by the proposed area function here is very close to the experimental indenter.

Further analysis of indentation loading curves: Effects of tip rounding on mechanical property measurements

The effects of indenter tip rounding on the shape of indentation loading curves have been analyzed using dimensional and finite element analysis for conical indentation in elastic-perfectly plastic solids. A method for obtaining mechanical properties from indentation loading curves is then proposed. The validity of this method is examined using finite element analysis. Finally, the method is used to determine the yield strength of several materials for which the indentation loading curves are available in the literature.

Relationship Between Contact Stiffness, Contact Depth, and Mechanical Properties for Indentation in Linear Viscoelastic Solids Using Axisymmetric Indenters

We derive a relationship between the initial unloading slope, contact depth, and the instantaneous relaxation modulus for indentation in linear viscoelastic solids by a rigid indenter with an arbitrary axisymmetric smooth profile. Although the same expres

Relationships between hardness, elastic modulus, and the work of indentation

The work done during indentation is examined using dimensional analysis and finite element calculations for conical indentation in elastic-plastic solids with work hardening. An approximate relationship between the ratio of hardness to elastic modulus and the ratio of irreversible work to total work in indentation is found. Consequently, the ratio of hardness to elastic modulus may be obtained directly from measuring the work of indentation. Together with a well-known relationship between elastic modulus, initial unloading slope, and contact area, a new method is then suggested for estimating the hardness and modulus of solids using instrumented indentation with conical or pyramidal indenters.

Characterisation of carbon nano-onions using Raman spectroscopy

Characteristics of the Raman spectrum from carbon onions have been identified in terms of the position of the G peak and appearance of the transverse optic phonon peaks. Five new peaks were observed in the low wavenumber region, at about 1100, 861, 700, 450 and 250 cm(-1). The origins of these peaks are discussed in terms of the phonon density of states (PDOS) and phonon dispersion curves of graphite. The curvature of the graphene planes is invoked to explain the relaxation of the Raman selection rules and the appearance of the new peaks. The Raman spectrum of carbon onions is compared with that of highly oriented pyrolytic graphite (HOPG). The strain of graphene planes due to curvature has been estimated analytically and is used to account for the downward shift of the G peak. (C) 2003 Elsevier Science B.V. All rights reserved.

Nano-Tribological Study on a Super-Hydrophobic Film Formed on Rough Aluminum

A novel super-hydrophobic stearic acid (STA) film with a water contact angle of 166° was prepared by chemical adsorption on aluminum wafer coated with polyethyleneimine (PEI) film. The micro-tribological behavior of the super-hydrophobic STA monolayer was compared with that of the polished and PEI-coated Al surfaces. The effect of relative humidity on the adhesion and friction was investigated as well. It was found that the STA monolayer showed decreased friction, while the adhesive force was greatly decreased by increasing the surface roughness of the Al wafer to reduce the contact area between the atomic force microscope (AFM) tip and the sample surface to be tested. Thus the friction and adhesion of the Al wafer was effectively decreased by generating the STA monolayer, which indicated that it could be feasible and rational to prepare a surface with good adhesion resistance and lubricity by properly controlling the surface morphology and the chemical composition. Both the adhesion and friction decreased as the relative humidity was lowered from 65% to 10%, though the decrease extent became insignificant for the STA monolayer.

Scaling relationships in indentation of power-law creep solids using self-similar indenters

We use dimensional analysis to derive scaling relationships for self-similar indenters indenting solids that exhibit power-law creep. We identify the parameter that represents the indentation strain rate. The scaling relationships are applied to several types of indentation creep experiment with constant displacement rate, constant loading rate or constant ratio of loading rate over load. The predictions compare favourably with experimental observations reported in the literature. Finally, a connection is found between creep and 'indentation-size effect' (i.e. changing hardness with indentation depth or load).

Optical fringe multiplication technique with TEM nano-moiré method

In this paper, a nano-moiré fringe multiplication method is proposed, which can be used to measure nano-deformation of single crystal materials. The lattice structure of Si (111) is recorded on a film at a given magnification under a transmission microscope, which acts as a specimen grating. A parallel grating (binary type) on glass or film is selected as a reference grating. A multiplied nano-moiré fringe pattern can be reproduced in a 4f optical filter system with the specimen grating and the prepared reference grating. The successful results illustrate that this method can be used to measure deformation in nanometre scale. The method is especially useful in the measurement of the inhomogeneous displacement field, and can be utilized to characterize nano-mechanical behaviour of materials such as dislocation and atomic bond failure.

Nonlinear Analysis of Oscillatory Indentation in Elastic and Viscoelastic Solids

Determining the mechanical properties at micro- and nanometer length scales using nanoindentation or atomic force microscopy is important to many areas of science and engineering. Here we establish equations for obtaining storage and loss modulus from oscillatory indentations by performing a nonlinear analysis of conical and spherical indentation in elastic and viscoelastic solids. We show that, when the conical indenter is driven by a sinusoidal force, the square of displacement is a sinusoidal function of time, not the displacement itself, which is commonly assumed. Similar conclusions hold for spherical indentations. Well-known difficulties associated with measuring contact area and correcting thermal drift may be circumvented using the newly derived equations. These results may help improve methods of using oscillatory indentation for determining elastic and viscoelastic properties of solids.

3D simulation of the micro indentation process and relative problems research

In this paper the finite element method was used to simulate micro-scale indentation process. The several standard indenters were simulated with 3D finite element model. The emphasis of this paper was the differences between 2D axisymmetric cone model and

An Energy-Based Method for Analyzing Instrumented Spherical Indentation Experiments

Using dimensional analysis and finite element calculation, we studied spherical indentation in elastic-plastic solids with work hardening. We report two previously unknown relationships between hardness, reduced modulus, indentation depth, indenter radius, and work of indentation. These relationships, together with the relationship between initial unloading stiffness and reduced modulus, provide an energy-based method for determining contact area, reduced modulus, and hardness of materials from instrumented spherical indentation measurements. This method also provides a means for calibrating the effective radius of imperfectly shaped spherical indenters. Finally, the method is applied to the analysis of instrumented spherical indentation experiments on copper, aluminum, tungsten, and fused silica.

Analysis of indentation loading curves obtained using conical indenters

Using dimensional analysis and finite-element calculations we determine the functional form of indentation loading curves for a rigid conical indenter indenting into elastic-perfectly plastic solids. The new results are compared with the existing theories of indentation using conical indenters, including the slip-line theory for rigid-plastic solids, Sneddon's result for elastic solids, and Johnson's model for elastic-perfectly plastic solids. In the limit of small ratio of yield strength (Y) to Young's modulus (E), both the new results and Johnson's model approach that predicted by slip-line theory for rigid-plastic solids. In the limit of large Y/E, the new results agree with that for elastic solids. For a wide range of Y/E, some difference is found between Johnson's model-and the present result. This study also demonstrates the possibilities and limitations of using indentation loading curves to extract fundamental mechanical properties of solids.