Improved infrared thermal imaging of a CMOS MEMS device

We report a technique which can be used to improve the accuracy of infrared (IR) surface temperature measurements made on MEMS (Micro-Electro-Mechanical- Systems) devices. The technique was used to thermally characterize a SOI (Silicon-On-Insulator) CMOS (Complementary Metal Oxide Semiconductor) MEMS thermal flow sensor. Conventional IR temperature measurements made on the sensor were shown to give significant surface temperature errors, due to the optical transparency of the SiO 2 membrane layers and low emissivity/high reflectivity of the metal. By making IR measurements on radiative carbon micro-particles placed in isothermal contact with the device, the accuracy of the surface temperature measurement was significantly improved. © 2010 EDA Publishing/THERMINIC.

Phase noise analysis of a mechanical autonomous impact oscillator with a MEMS resonator

In this paper, phase noise analysis of a mechanical autonomous impact oscillator with a MEMS resonator is performed. Since the circuit considered belongs to the class of hybrid systems, methods based on the variational model for the evaluation of either phase noise or steady state solutions cannot be directly applied. As a matter of fact, the monodromy matrix is not defined at impact events in these systems. By introducing saltation matrices, this limit is overcome and the aforementioned methods are extended. In particular, the unified theory developed by Demir is used to analyze the phase noise after evaluating the asymptotically stable periodic solution of the system by resorting to the shooting method. Numerical results are presented to show how noise sources affect the phase noise performances. © 2011 IEEE.

Synchronization in a coupled architecture of microelectromechanical oscillators

There has been much recent interest in engineering the phenomenon of synchronization in coupled micro-/nano-scale oscillators for applications ranging from precision time and frequency references to new approaches to information processing. This paper presents descriptive modelling detail and further experimental validation of the phenomenon of mutual synchronization in coupled MEMS oscillators building upon recent experimental validation of this concept by the present authors. In particular, the underlying dependence of the observation of synchronization on system parameters is studied through numerical and analytical modelling while considering essential nonlinearities in both the resonator and circuit domain. Experimental results demonstrating synchronized response are elaborated based on the realization of electrically coupled MEMS resonator based square-wave oscillators. The experimental results on frequency entrainment are found to be in general agreement with results obtained through analytical modeling and numerical simulation. The concept presented here is scalable and could be used to investigate the dynamics of large-arrays of coupled MEMS oscillators. © 2014 AIP Publishing LLC.

Performance-Driven Microfabrication-Oriented Methodology for MEMS Conceptual Design with Application in Microfluidic Device Design

Performance and manufacturability are two important issues that must be taken into account during MEMS design. Existing MEMS design models or systems follow a process-driven design paradigm, that is, design starts from the specification of process sequence or the customization of foundry-ready process template. There has been essentially no methodology or model that supports generic, high-level design synthesis for MEMS conceptual design. As a result, there lacks a basis for specifying the initial process sequences. To address this problem, this paper proposes a performance-driven, microfabrication-oriented methodology for MEMS conceptual design. A unified behaviour representation method is proposed which incorporates information of both physical interactions and chemical/biological/other reactions. Based on this method, a behavioural process based design synthesis model is proposed, which exploits multidisciplinary phenomena for design solutions, including both the structural components and their configuration for the MEMS device, as well as the necessary substances for the chemical/biological/other reactions. The model supports both forward and backward synthetic search for suitable phenomena. To ensure manufacturability, a strategy of using microfabrication-oriented phenomena as design knowledge is proposed, where the phenomena are developed from existing MEMS devices that have associated MEMS-specific microfabrication processes or foundry-ready process templates. To test the applicability of the proposed methodology, the paper also studies microfluidic device design and uses a micro-pump design for the case study.

Review of low actuation voltage RF MEMS electrostatic switches based on metallic and carbon alloys

Radio frequency micro electro mechanical systems (RF MEMS) have enabled a new generation of devices that bring many advantages due to their very high performances. There are many incentives for the integration of the RF MEMS switches and electronic devices on the same chip. However, the high actuation voltage of RF MEMS switches compared to electronic devices poses a major problem. By reducing the actuation voltage of the RF MEMS switch, it is possible to integrate it into current electronic devices. Lowering the actuation voltage will have an impact on RF parameters of the RF MEMS switches. This investigation focuses on recent progress in reducing the actuation voltage with an emphasis on a modular approach that gives acceptable design parameters. A number of rules that should be considered in design and fabrication of low actuation RF MEMS switches are suggested.

Development of a low actuation voltage electrostatic RF MEMS switch

The research focused on the design, fabrication and measurement of a low actuation voltage micro electro mechanical high frequency switch. The fabricated micro switch offers outstanding radio frequency parameters for a very large frequency band, with actuation voltage and switching time less than 20 volts and 3 micro seconds, respectively.

Short Comments on an Energy Pumping Levels in a MEMS Gyroscope Vibrating Problem, by Using of an Global and Local Optimal Linear Control Design

This paper deals with an energy pumping that occurs in a (MEMS) Gyroscope nonlinear dynamical system, modeled with a proof mass constrained to move in a plane with two resonant modes, which are nominally orthogonal. The two modes are ideally coupled only by the rotation of the gyro about the plane's normal vector. We also developed a linear optimal control design for reducing the oscillatory movement of the nonlinear systems to a stable point.

Swarm control designs applied to a micro-electro-mechanical gyroscope system (MEMS)

This paper analyzes the non-linear dynamics of a MEMS Gyroscope system, modeled with a proof mass constrained to move in a plane with two resonant modes, which are nominally orthogonal. The two modes are ideally coupled only by the rotation of the gyro about the plane's normal vector. We demonstrated that this model has an unstable behavior. Control problems consist of attempts to stabilize a system to an equilibrium point, a periodic orbit, or more general, about a given reference trajectory. We also developed a particle swarm optimization technique for reducing the oscillatory movement of the nonlinear system to a periodic orbit. © 2010 Springer-Verlag.

Das OtCM-System zur elektronischen Compliance-Messung : Qualitätsuntersuchung der OtCM-Blister und e-Dispenser ; Validierung und Nutzenevaluation im Vergleich mit MEMS

Im Rahmen der vorliegenden Arbeit wurden Eignung und Nutzen des „Objective therapy Compliance Measurement“ (OtCMTM)-Systems, einer innovativen Weiterentwicklung im Bereich der elektronischen Compliance-Messung, untersucht. Unter experimentellen Bedingungen wurden Funktionalität und Verlässlichkeit der elektronischen OtCMTM-Blisterpackungen überprüft, um deren Eignung für den klinischen Einsatz zu zeigen. Funktionalität (≥90% lesbare Blister), Richtigkeit (≤2% Fehler) und Robustheit waren bei den OtCMTM-Blistern der Version 3 gegeben, nachdem die Fehler der Versionen 1 und 2 in Zusammenarbeit mit dem Hersteller TCG identifiziert und eliminiert worden waren. Der als Alternative zu den elektronischen Blistern für die Verpackung von klinischen Prüfmustern entwickelte OtCMTM e-Dispenser wurde bezüglich Funktionalität und Anwenderfreundlichkeit in einer Pilotstudie untersucht. Dabei wurde ein Optimierungsbedarf festgestellt. In einer klinischen Studie wurde das OtCMTM-System mit dem als „Goldstandard“ geltenden MEMS® verglichen. Vergleichskriterien waren Datenqualität, Akzeptanz und Anwenderfreundlichkeit, Zeitaufwand bei der Bereitstellung der Medikation und Datenauswertung, sowie Validität. Insgesamt 40 Patienten, die mit Rekawan® retard 600mg behandelt wurden, nahmen an der offenen, randomisierten, prospektiven Studie teil. Das OtCMTM-System zeigte sich bezüglich Validität, Akzeptanz und Anwenderfreundlichkeit mit MEMS® vergleichbar. Eine erwartete Zeitersparnis wurde mit dem OtCMTM-System gegenüber MEMS® nicht erreicht. Vorteile des OtCMTM-Systems sind eine höhere Datenqualität und die Möglichkeit zum Einsatz in der Telemedizin.

An investigation of thin amorphous carbon-based sputtered coatings for MEMS and micro-engineering applications

The work presented in this thesis describes an investigation into the production and properties of thin amorphous C films, with and without Cr doping, as a low wear / friction coating applicable to MEMS and other micro- and nano-engineering applications. Firstly, an assessment was made of the available testing techniques. Secondly, the optimised test methods were applied to a series of sputtered films of thickness 10 - 2000 nm in order to: (i) investigate the effect of thickness on the properties of coatingslcoating process (ii) investigate fundamental tribology at the nano-scale and (iii) provide a starting point for nanotribological coating optimisation at ultra low thickness. The use of XPS was investigated for the determination of Sp3/Sp2 carbon bonding. Under C 1s peak analysis, significant errors were identified and this was attributed to the absence of sufficient instrument resolution to guide the component peak structure (even with a high resolution instrument). A simple peak width analysis and correlation work with C KLL D value confirmed the errors. The use of XPS for Sp3/Sp2 was therefore limited to initial tentative estimations. Nanoindentation was shown to provide consistent hardness and reduced modulus results with depth (to < 7nm) when replicate data was suitably statistically processed. No significant pile-up or cracking of the films was identified under nanoindentation. Nanowear experimentation by multiple nanoscratching provided some useful information, however the conditions of test were very different to those expect for MEMS and micro- / nano-engineering systems. A novel 'sample oscillated nanoindentation' system was developed for testing nanowear under more relevant conditions. The films were produced in an industrial production coating line. In order to maximise the available information and to take account of uncontrolled process variation a statistical design of experiment procedure was used to investigate the effect of four key process control parameters. Cr doping was the most significant control parameter at all thicknesses tested and produced a softening effect and thus increased nanowear. Substrate bias voltage was also a significant parameter and produced hardening and a wear reducing effect at all thicknesses tested. The use of a Cr adhesion layer produced beneficial results at 150 nm thickness, but was ineffective at 50 nm. Argon flow to the coating chamber produced a complex effect. All effects reduced significantly with reducing film thickness. Classic fretting wear was produced at low amplitude under nanowear testing. Reciprocating sliding was produced at higher amplitude which generated three body abrasive wear and this was generally consistent with the Archard model. Specific wear rates were very low (typically 10-16 - 10-18 m3N-1m-1). Wear rates reduced exponentially with reduced film thickness and below (approx.) 20 nm, thickness was identified as the most important control of wear.

High-gain frequency reconfigurable Vivaldi antenna

This article proposes a frequency agile antenna whose operating frequency band can be switched. The design is based on a Vivaldi antenna. High-performance radio-frequency microelectromechanical system (RF-MEMS) switches are used to realize the 2.7 GHz and 3.9 GHz band switching. The low band starts from 2.33 GHz and works until 3.02 GHz and the high band ranges from 3.29 GHz up to 4.58 GHz. The average gains of the antenna at the low and high bands are 10.9 and 12.5 dBi, respectively. This high-gain frequency reconfigurable antenna could replace several narrowband antennas for reducing costs and space to support multiple communication systems, while maintaining good performance.

High volume fabrication of laser targets using MEMS techniques

The latest techniques for the fabrication of high power laser targets, using processes developed for the manufacture of Micro-Electro-Mechanical System (MEMS) devices are discussed. These laser targets are designed to meet the needs of the increased shot numbers that are available in the latest design of laser facilities. Traditionally laser targets have been fabricated using conventional machining or coarse etching processes and have been produced in quantities of 10s to low 100s. Such targets can be used for high complexity experiments such as Inertial Fusion Energy (IFE) studies and can have many complex components that need assembling and characterisation with high precision. Using the techniques that are common to MEMS devices and integrating these with an existing target fabrication capability we are able to manufacture and deliver targets to these systems. It also enables us to manufacture novel targets that have not been possible using other techniques. In addition, developments in the positioning systems that are required to deliver these targets to the laser focus are also required and a system to deliver the target to a focus of an F2 beam at 0.1Hz is discussed.

Avances en el proyecto “Determinación de la forma exacta de la tierra a través de MEMS en un Nano-Satélite”

El presente trabajo muestra el avance que se tiene en el proyecto denominado “Diseño y Construcción de un Nano-Satélite”, que se lleva a cabo en la ESIME U.P.-Ticoman del Instituto Politécnico Nacional. Este proyecto tiene como objetivo principal introducir a los alumnos en el que hacer espacial, se trata de un satélite con un peso de un kilogramo y es un cubo de 10 cm de lado y cuya carga útil tiene MEMS (sistema de micro-electromecánicos) que harán las veces de péndulo electrónico, lo anterior y los armónicos gravitacionales permitirán determinar la forma de la tierra. Se presenta el fundamento matemático, los componentes del satélite, el diseño preliminar de la estructura, la manufactura de la estructura, los resultados de un ensaye estructural destructivo y el análisis estático por elementos finitos.