Development of a low actuation voltage electrostatic RF MEMS switch
| Contribuinte(s) |
Kouzani, Abbas Kaynak, Akif |
|---|---|
| Data(s) |
01/04/2015
|
| Resumo |
The research focused on the design, fabrication and measurement of a low actuation voltage micro electro mechanical high frequency switch. The fabricated micro switch offers outstanding radio frequency parameters for a very large frequency band, with actuation voltage and switching time less than 20 volts and 3 micro seconds, respectively. |
| Identificador | |
| Idioma(s) |
eng |
| Publicador |
Deakin Univeristy, Faculty of Science, Engineering and Built Environment, School of Engineering |
| Relação |
http://dro.deakin.edu.au/eserv/DU:30079097/mafinejad-agreement-2015.pdf http://dro.deakin.edu.au/eserv/DU:30079097/mafinejad-developmentof-2015A.pdf |
| Direitos |
The author |
| Palavras-Chave | #radio frequency microelectromechanical system (RF MEMS) switch #high actuation voltage #low switching speed #dielectric charging #fabrication complexity |
| Tipo |
Thesis |
