Flexible pneumatic micro-actuators: Analysis and production

Compliant pneumatic micro-actuators are interesting for applications requiring large strokes and forces in delicate environments. These include for instance minimally invasive surgery and assembly of microcomponents. This paper presents a theoretical and experimental analysis of a balloon-type compliant micro-actuator. Finite element modeling is used to describe the complex behavior of these actuators, which is validated through prototype experiments. Prototypes with dimensions ranging from 11mm × 2mm × 0.24mm to 4mm × 1mm × 0.12mm are fabricated by a newly developed production process based on micromilling and micromolding. The larger actuators are capable of delivering out-of-plane strokes of up to 7mm. Further, they have been integrated in a platform with two rotational and one translational degree of freedom. © 2011 Published by Elsevier Ltd.

Elektrochemo- und mikromechanisches Verhalten elektronisch leitfähiger Polymere

Intrinsisch leitfähige Polymere sind durch eine Reihe materialspezifischer Eigenschaften gekennzeichnet. In Abhängigkeit des angelegten Potenzials und der chemischen Umgebung zeigen sie elektrochromes Verhalten, Veränderungen der Masse, des Volumens und der elektronischen Leitfähigkeit. Basierend auf diesen Eigenschaften eignen sich halbleitende organische Polymere als funktionales Material für Anwendungen in der Mikro- und Nanotechnologie, insbesondere für miniaturisierte chemische Sensoren und Aktoren. Im Gegensatz zu konventionellen Piezo-Aktoren operieren diese Aktoren z. B. bei Spannungen unterhalb 1 V. Diese Arbeit befasst sich mit den elektrochemomechanischen Eigenschaften der ausgewählten Polymere Polyanilin und Polypyrrol, d. h. mit den potenzialkontrollierten Veränderungen des Volumens, der Struktur und der mechanischen Eigenschaften. Bei diesem Prozess werden positive Ladungen innerhalb der Polymerphase generiert. Um die für den Ladungsausgleich benötigten Gegenionen bereitzustellen, werden alle Messungen in Anwesenheit eines wässrigen Elektrolyten durchgeführt. Der Ladungstransport und die Volumenänderungen werden mit den Methoden der zyklischen Voltammetrie, der elektrochemischen Quarzmikrowaage und der Rastersondenmikroskopie untersucht. Signifikante Ergebnisse können für dünne homogene Polymerschichten erhalten werden, wobei Schichtdicken oberhalb 150 nm aufgrund der insbesondere bei Polyanilin einsetzenden Bildung von Fadenstrukturen (Fibrillen) vermieden werden. Von besonderem Interesse im Rahmen dieser Arbeit ist die Kombination der funktionalen Polymere mit Strukturen auf Siliziumbasis, insbesondere mit mikrostrukturierten Cantilevern. Die zuvor erhaltenen Ergebnisse bilden die Grundlage für das Design und die Dimensionierung der Mikroaktoren. Diese bestehen aus Siliziumcantilevern, die eine Elektrodenschicht aus Gold oder Platin tragen. Auf der Elektrode wird mittels Elektrodeposition eine homogene Schicht Polymer mit Schichtdicken bis zu 150 nm aufgebracht. Die Aktorcharakteristik, die Biegung des Cantilevers aufgrund des angelegten Potenzials, wird mit dem aus der Rastersondenmikroskopie bekannten Lichtzeigerverfahren gemessen. Das Aktorsystem wird hinsichtlich des angelegten Potenzials, des Elektrolyten und der Redox-Kinetik charakterisiert. Die verschiedenen Beiträge zum Aktorverhalten werden in situ während des Schichtwachstums untersucht. Das beobachtete Verhalten kann als Superposition verschiedener Effekte beschrieben werden. Darunter sind die Elektrodenaufladung (Elektrokapillarität), die Veränderungen der Elektrodenoberfläche durch dünne Oxidschichten und die Elektrochemomechanik des Polymers.

Integration von Heizern in thermotrope flüssigkristalline Elastomer-Aktoren und deren Anwendung beim technischen Nachbau eines menschlichen Auges

Flüssigkristalline Elastomere (LCE) zeigen eine reversible Kontraktion und werden in der Literatur auch als „künstliche Muskeln“ bezeichnet. In dieser Arbeit werden sie mit einem integrierten Heizer versehen, um eine schnelle und präzise Ansteuerung zu ermöglichen. Anschließend werden diese als Aktoren zur Realisierung eines technischen Nachbaus des menschlichen Auges verwendet. rnDas einzigartige Verhalten der flüssigkristallinen Elastomere beruht auf der Kombination der Entropie Elastizität des Elastomers mit der Selbstorganisation der flüssigkristallinen Einheiten (Mesogene). Diese beiden Eigenschaften ermöglichen eine reversible, makroskopische Verformung beim Phasenübergang des Flüssigkristalls in die isotrope Phase. Hierbei ist es wichtig eine homogene Orientierung der Mesogene zu erzeugen, was in dieser Arbeit durch ein Magnetfeld erreicht wird. Da es sich um ein thermotropes flüssigkristallines Elastomer handelt, werden in dieser Arbeit zwei Ansätze vorgestellt, um den LCE intern zu heizen. Zum einen werden Kohlenstoffnanoröhren integriert, um diese über Strahlung oder Strom zu heizen und zum anderen wird ein flexibler Heizdraht integriert, welcher ebenfalls über Strom geheizt wird. rnUm den technischen Nachbau des menschlichen Auges zu realisieren, ist die Herstellung einer flüssigkristallinen Iris gezeigt. Hierzu wird ein radiales Magnetfeld aufgebaut, welches eine radiale Orientierung des Mesogene ermöglicht, wodurch wiederum eine radiale Kontraktion ermöglicht wird. Außerdem sind zwei Konzepte vorgestellt, um eine Elastomer Linse zu verformen. Zum einen wird diese mit einem ringförmigen LCE auseinandergezogen und somit abgeflacht. Zum anderen sind acht Aktoren über Anker an einer Linse angebracht, welche ebenfalls eine Vergrößerung der Linse bewirken. In beiden Fällen werden LCE mit dem zuvor präsentierten integrierten Heizdraht verwendet. Abschließend ist das Zusammensetzen des technische Nachbaus des menschlichen Auges dargestellt, sowie Aufnahmen, welche mit diesem erzeugt wurden.

Pull-In Instability Of Micro-Switch Actuators: Model Review

The existing three widely used pull-in theoretical models (i.e., one-dimensional lumped model, linear supposition model and planar model) are compared with the nonlinear beam mode in this paper by considering both cantilever and fixed-fixed type micro and nano-switches. It is found that the error of the pull-in parameters between one-dimensional lumped model and the nonlinear beam model is large because the denominator of the electrostatic force is minimal when the electrostatic force is computed at the maximum deflection along the beam. Since both the linear superposition model and the slender planar model consider the variation of electrostatic force with the beam's deflection, these two models not only are of the same type but also own little error of the pull-in parameters with the nonlinear beam model, the error brought by these two models attributes to that the boundary conditions are not completely satisfied when computing the numerical integration of the deflection.

Parallel Coupled Micro-Macro Actuators

This thesis presents a new actuator system consisting of a micro-actuator and a macro-actuator coupled in parallel via a compliant transmission. The system is called the Parallel Coupled Micro-Macro Actuator, or PaCMMA. In this system, the micro-actuator is capable of high bandwidth force control due to its low mass and direct-drive connection to the output shaft. The compliant transmission of the macro-actuator reduces the impedance (stiffness) at the output shaft and increases the dynamic range of force. Performance improvement over single actuator systems was expected in force control, impedance control, force distortion and reduction of transient impact forces. A set of quantitative measures is proposed and the actuator system is evaluated against them: Force Control Bandwidth, Position Bandwidth, Dynamic Range, Impact Force, Impedance ("Backdriveability'"), Force Distortion and Force Performance Space. Several theoretical performance limits are derived from the saturation limits of the system. A control law is proposed and control system performance is compared to the theoretical limits. A prototype testbed was built using permanenent magnet motors and an experimental comparison was performed between this actuator concept and two single actuator systems. The following performance was observed: Force bandwidth of 56Hz, Torque Dynamic Range of 800:1, Peak Torque of 1040mNm, Minimum Torque of 1.3mNm. Peak Impact Force was reduced by an order of magnitude. Distortion at small amplitudes was reduced substantially. Backdriven impedance was reduced by 2-3 orders of magnitude. This actuator system shows promise for manipulator design as well as psychophysical tests of human performance.

Modelling, Design and Analysis of Low Frequency Platform for Attenuating Micro-Vibration in Spacecraft

One of the most important factors that affect the pointing of precision payloads and devices in space platforms is the vibration generated due to static and dynamic unbalanced forces of rotary equipments placed in the neighborhood of payload. Generally, such disturbances are of low amplitude, less than 1 kHz, and are termed as ‘micro-vibrations’. Due to low damping in the space structure, these vibrations have long decay time and they degrade the performance of payload. This paper addresses the design, modeling and analysis of a low frequency space frame platform for passive and active attenuation of micro-vibrations. This flexible platform has been designed to act as a mount for devices like reaction wheels, and consists of four folded continuous beams arranged in three dimensions. Frequency and response analysis have been carried out by varying the number of folds, and thickness of vertical beam. Results show that lower frequencies can be achieved by increasing the number of folds and by decreasing the thickness of the blade. In addition, active vibration control is studied by incorporating piezoelectric actuators and sensors in the dynamic model. It is shown using simulation that a control strategy using optimal control is effective for vibration suppression under a wide variety of loading conditions.

Ring Resonators and Micro Fluidics: Novel Design for Drug/Disease Detection

MEMS systems are technologically developed from integrated circuit industry to create miniature sensors and actuators. Originally these semiconductor processes and materials were used to build electrical and mechanical systems, but expanded to include biological, optical fluidic magnetic and other systems 12]. Here a novel approach is suggested where in two different fields are integrated via moems, micro fluidics and ring resonators. It is well known at any preliminary stage of disease onset, many physiological changes occur in the body fluids like saliva, blood, urine etc. The drawback till now was that current calibrations are not sensitive enough to detect the minor physiological changes. This is overcome using optical detector techniques 1]. The basic concepts of ring resonators, with slight variations can be used for optical detection of these minute disease markers. A well known fact of ring resonators is that a change in refractive index will trigger a shift in the resonant wavelength 5]. The trigger for the wavelength shift in the case discussed will be the presence of disease agents. To trap the disease agents specific antibody has to be used (e. g. BSA).

Effects of phase inhomogeneity and boundary conditions on the dynamic response of SMA wire actuators

This paper reports the simulation results from the dynamic analysis of a Shape Memory Alloy (SMA) actuator. The emphasis is on understanding the dynamic behavior under various loading rates and boundary conditions, resulting in complex scenarios such as thermal and stress gradients. Also, due to the polycrystalline nature of SMA wires, presence of microstructural inhomogeneity is inevitable. Probing the effect of inhomogeneity on the dynamic behavior can facilitate the prediction of life and characteristics of SMA wire actuator under varieties of boundary and loading conditions. To study the effect of these factors, an initial boundary value problem of SMA wire is formulated. This is subsequently solved using finite element method. The dynamic response of the SMA wire actuator is analyzed under mechanical loading and results are reported. Effect of loading rate, micro-structural inhomogeneity and thermal boundary conditions on the dynamic response of SMA wire actuator is investigated and the simulation results are reported.

Design and simulations of SOI CMOS micro-hotplate gas sensors

This paper describes a new generation of integrated solid-state gas-sensors embedded in SOI micro-hotplates. The micro-hotplates lie on a SOI membrane and consist of MOSFET heaters that elevate the operating temperature, through self-heating, of a gas sensitive material. These sensors are fully compatible with SOI CMOS or BiCMOS technologies, offer ultra-low power consumption (under 100 mW), high sensitivity, low noise, low unit cost, reproducibility and reliability through the use of on-chip integration. In addition, the new integrated sensors offer a nearly uniform temperature distribution over the active area at its operating temperatures at up to about 300-350°C. This makes SOI-based gas-sensing devices particularly attractive for use in handheld battery-operated gas monitors. This paper reports on the design of a chemo-resistive gas sensor and proposes for the first time an intelligent SOI membrane microcalorimeter using active micro-FET heaters and temperature sensors. A comprehensive set of numerical and analogue simulations is also presented including complex 2D and 3D electro-thermal numerical analyses. © 2001 Elsevier Science B.V. All rights reserved.

Thermo-optical characterization of fluorescent rhodamine B based temperature-sensitive nanosensors using a CMOS MEMS micro-hotplate

A custom designed microelectromechanical systems (MEMS) micro-hotplate, capable of operating at high temperatures (up to 700 C), was used to thermo-optically characterize fluorescent temperature-sensitive nanosensors. The nanosensors, 550 nm in diameter, are composed of temperature-sensitive rhodamine B (RhB) fluorophore which was conjugated to an inert silica sol-gel matrix. Temperature-sensitive nanosensors were dispersed and dried across the surface of the MEMS micro-hotplate, which was mounted in the slide holder of a fluorescence confocal microscope. Through electrical control of the MEMS micro-hotplate, temperature induced changes in fluorescence intensity of the nanosensors was measured over a wide temperature range. The fluorescence response of all nanosensors dispersed across the surface of the MEMS device was found to decrease in an exponential manner by 94%, when the temperature was increased from 25 C to 145 C. The fluorescence response of all dispersed nanosensors across the whole surface of the MEMS device and individual nanosensors, using line profile analysis, were not statistically different (p < 0.05). The MEMS device used for this study could prove to be a reliable, low cost, low power and high temperature micro-hotplate for the thermo-optical characterisation of sub-micron sized particles. The temperature-sensitive nanosensors could find potential application in the measurement of temperature in biological and micro-electrical systems. The Authors. © 2013 Published by Elsevier B.V. All rights reserved.

Modelling and prototyping the conceptual design of 3D CMM micro-probe

This paper details the prototyping of a novel three axial micro probe based on utilisation of piezoelectric sensors and actuators for true three dimensional metrology and measurements at micro- and nanometre scale. Computational mechanics is used first to model and simulate the performance of the conceptual design of the micro-probe. Piezoelectric analysis is conducted to understand performance of three different materials - silicon, glassy carbon, and nickel - and the effect of load parameters (amplitude, frequency, phase angle) on the magnitude of vibrations. Simulations are also used to compare several design options for layout of the lead zirconium titanate (PZT) sensors and to identify the most feasible from fabrication point of view design. The material options for the realisation of the device have been also tested. Direct laser machining was selected as the primary means of production. It is found that a Yb MOPA based fiber laser was capable of providing the necessary precision on glassy carbon (GC), although machining trials on Si and Ni were less successful due to residual thermal effects.To provide the active and sensing elements on the flexures of the probe, PZT thick films are developed and deposited at low temperatures (Lt720 degC) allowing a high quality functional ceramic to be directly integrated with selected materials. Characterisation of the materials has shown that the film has a homogenous and small pore microstructure.