Desenvolvimento de um monitor de vibrações utilizando sensores de tecnologia micro-eletromecânica - MEMS

Pós-graduação em Engenharia Mecânica - FEG

The dynamic behavior of a parametrically excited time-periodic MEMS taking into account parametric errors

Micro-electromechanical systems (MEMS) are micro scale devices that are able to convert electrical energy into mechanical energy or vice versa. In this paper, the mathematical model of an electronic circuit of a resonant MEMS mass sensor, with time-periodic parametric excitation, was analyzed and controlled by Chebyshev polynomial expansion of the Picard interaction and Lyapunov-Floquet transformation, and by Optimal Linear Feedback Control (OLFC). Both controls consider the union of feedback and feedforward controls. The feedback control obtained by Picard interaction and Lyapunov-Floquet transformation is the first strategy and the optimal control theory the second strategy. Numerical simulations show the efficiency of the two control methods, as well as the sensitivity of each control strategy to parametric errors. Without parametric errors, both control strategies were effective in maintaining the system in the desired orbit. On the other hand, in the presence of parametric errors, the OLFC technique was more robust.

Electromechanical properties of calcium bismuth titanate films: A potential candidate for lead-free thin-film piezoelectrics

CaBi4Ti4O15 (CBTi144) thin films were evaluated for use as lead-free thin-film piezoelectrics in microelectromechanical systems. The films were grown by the polymeric precursor method on (100)Pt/Ti/SiO2/Si substrates. The a/b-axis orientation of the ferroelectric film is considered to be associated with the preferred orientation of the Pt bottom electrode. The P-r and E-c were 14 mu C/cm(2) and 64 kV/cm, respectively, for a maximum applied field of 400 kV/cm. The domain structure was investigated by piezoresponse force microscopy. The film has a piezoelectric coefficient, d(33), equal to 60 pm/V and a current density of 0.7 mA/cm(2).

Optimal linear control to parametric uncertainties in a micro electro mechanical system

This paper, a micro-electro-mechanical systems (MEMS) with parametric uncertainties is considered. The non-linear dynamics in MEMS system is demonstrated with a chaotic behavior. We present the linear optimal control technique for reducing the chaotic movement of the micro-electromechanical system with parametric uncertainties to a small periodic orbit. The simulation results show the identification by linear optimal control is very effective. © 2013 Academic Publications, Ltd.

Effects of railway track vibration induced by passing trains on an energy harvesting device

Pós-graduação em Engenharia Mecânica - FEIS

Short Comments on an Energy Pumping Levels in a MEMS Gyroscope Vibrating Problem, by Using of an Global and Local Optimal Linear Control Design

This paper deals with an energy pumping that occurs in a (MEMS) Gyroscope nonlinear dynamical system, modeled with a proof mass constrained to move in a plane with two resonant modes, which are nominally orthogonal. The two modes are ideally coupled only by the rotation of the gyro about the plane's normal vector. We also developed a linear optimal control design for reducing the oscillatory movement of the nonlinear systems to a stable point.

Swarm control designs applied to a micro-electro-mechanical gyroscope system (MEMS)

This paper analyzes the non-linear dynamics of a MEMS Gyroscope system, modeled with a proof mass constrained to move in a plane with two resonant modes, which are nominally orthogonal. The two modes are ideally coupled only by the rotation of the gyro about the plane's normal vector. We demonstrated that this model has an unstable behavior. Control problems consist of attempts to stabilize a system to an equilibrium point, a periodic orbit, or more general, about a given reference trajectory. We also developed a particle swarm optimization technique for reducing the oscillatory movement of the nonlinear system to a periodic orbit. © 2010 Springer-Verlag.