Untersuchungen zum Dotieren von Silicium aus einer Oberflächenbelegung mit Phosphor in einem Kurzzeitprozess

Silicon, shallow junction, rapid thermal doping, vapour phase doping, atomic-layer doping, phosphorus diffusion, phosphine adsorption, sheet resistance, four-point probe, native oxidation

stochastic method for automated matching of horizons across a fault in 3D seismic data

Seismic analysis, horizon matching, fault tracking, marked point process,stochastic annealing